公开(公告)号：US06774993B2

公开(公告)日：2004-08-10

申请号：US09825048

申请日：2001-04-03

申请人： George J. Hudak

发明人： George J. Hudak

IPC分类号： G01J330

CPC分类号： G01J3/443 ,  G01N21/68

摘要： A gas plasma emission source includes a solid state signal power source coupled to a resonant cavity. In an alternative embodiment of the invention, an atomic emission detector includes a solid state signal power source coupled to a resonant cavity and a spectrographic detector to sense atomic emissions from a gas within the resonant cavity. In yet another embodiment of the invention, a method of sustaining a plasma includes passing a gas through a resonant cavity and exciting the resonant cavity with signal power from a solid state power source to sustain the plasma in the gas. In another embodiment of the invention, a method of using a solid state power source includes passing a gas through a resonant cavity and coupling sufficient signal power from an output of the solid state power source to sustain a plasma in the gas where the sufficient power is less than 300 watts.

摘要翻译： 气体等离子体发射源包括耦合到谐振腔的固态信号电源。 在本发明的替代实施例中，原子发射检测器包括耦合到谐振腔的固态信号电源和用于感测来自谐振腔内的气体的原子发射的光谱检测器。 在本发明的另一个实施例中，维持等离子体的方法包括使气体通过谐振腔并且利用来自固态电源的信号功率激励谐振腔以维持气体中的等离子体。 在本发明的另一个实施例中，使用固态电源的方法包括使气体通过谐振腔并耦合来自固态电源的输出的足够的信号功率，以维持充足电力的气体中的等离子体 小于300瓦。

公开(公告)号：US06757061B2

公开(公告)日：2004-06-29

申请号：US10321130

申请日：2002-12-17

申请人： Gary Powell

发明人： Gary Powell

IPC分类号： G01J330

CPC分类号： G01N1/2226 ,  G01N21/68

摘要： Aspects of the present invention provide novel methods and devices for sampling gas, exciting the sampled gas to emit radiation and detecting in real time from the emitted radiation a plurality of wave bands of an emission spectrum. Energy used to excite the sampled gas may be adjusted based on the detected wave bands. A process may be controlled in real time based on the detected wave bands. Novel interfaces may be used to display portions of the detected wave bands. A known flow of a reference gas may be included in the flow of sampled gases and an unknown flow of an unknown flow gas determined.

摘要翻译： 本发明的方面提供了用于对气体进行采样的新方法和装置，激发采样的气体发射辐射并且从发射的辐射实时地检测发射光谱的多个波段。 用于激发采样气体的能量可以基于检测到的波段进行调整。 可以基于检测到的波段来实时地控制过程。 可以使用新的接口来显示检测到的波段的部分。 参考气体的已知流可以包括在采样气体流中，并且确定未知流量气体的未知流量。

公开(公告)号：US06693709B2

公开(公告)日：2004-02-17

申请号：US10266062

申请日：2002-10-07

申请人： Mark Wechsler ,  Howard H. Barney ,  Roger A. Kaye ,  David G. Ogle ,  Michael M. Lacy ,  Calvin Y. Chow ,  Kimberly L. Crawford ,  Dean G. Hafeman

发明人： Mark Wechsler ,  Howard H. Barney ,  Roger A. Kaye ,  David G. Ogle ,  Michael M. Lacy ,  Calvin Y. Chow ,  Kimberly L. Crawford ,  Dean G. Hafeman

IPC分类号： G01J330

CPC分类号： G01N21/33 ,  G01N21/253 ,  G01N21/31 ,  G01N35/028 ,  G01N2201/0231 ,  G01N2201/0446 ,  G01N2201/1222 ,  G01N2201/127

摘要： The present invention relates to a photometric device for measuring optical parameters. The invention functions in the ultraviolet light range through use of a monochromator and splits the test light in multiple channels by a rotor assembly, including a mirror.

摘要翻译： 本发明涉及一种用于测量光学参数的测光装置。 本发明通过使用单色仪在紫外光范围内起作用，并通过包括反射镜的转子组件在多个通道中分离测试光。

公开(公告)号：US06690462B2

公开(公告)日：2004-02-10

申请号：US10005822

申请日：2001-12-05

申请人： Michael D. Seltzer

发明人： Michael D. Seltzer

IPC分类号： G01J330

CPC分类号： G01N21/73 ,  G01N21/274

摘要： The disclosed invention relates to a calibration method, system and apparatus for a multimetals continuous emissions monitor system (hereinafter “multimetals CEMS”). More specifically, this invention relates to a calibration scheme for continuous monitoring of mercury emissions from stationary sources by plasma emission spectrometry. A source of mercury vapor, preferably a mercury permeation tube, entrains mercury vapor into a constant flow of carrier air. The carrier air mixes with a constant flow of diluent air in an aerosol mixer. The mixer is operably coupled to the analyzer. A gaseous mixture having a calibration mercury concentration flows from the mixer into the analyzer at a constant rate. A graph having coordinates of analyzer signal intensity and mercury concentration is used to plot the calibration scheme. A first signal intensity generated by the analyzer in response to the calibration mercury concentration is used for the first plot on the graph. A second signal intensity generated by the analyzer in response to a blank having zero mercury concentration is used as the second plot on the graph. A linear relationship between the analyzer signal intensity and the mercury concentration on the graph is established from the first plot and the second plot. The slope intercept and slope are used to create a mathematical relationship between the analyzer signal intensity and the mercury concentration. This enables the analyzer to be calibrated by inserting a known mercury concentration into the analyzer and adjusting the signal intensity to conform to the signal intensity calculated from the graph or mathematical relationship.

摘要翻译： 所公开的发明涉及用于多金属连续排放监测系统（以下称为“多金属CEMS”）的校准方法，系统和装置。 更具体地，本发明涉及通过等离子体发射光谱法连续监测来自固定源的汞排放的校准方案。 汞蒸汽源，优选汞渗透管，将汞蒸汽引入恒定流动的载气中。 载气在气溶胶混合器中与恒定流量的稀释空气混合。 混合器可操作地耦合到分析器。 具有校准汞浓度的气体混合物以恒定速率从混合器流入分析器。 使用具有分析仪信号强度和汞浓度坐标的曲线图来绘制校准方案。 分析仪响应校准汞浓度产生的第一信号强度用于图形上的第一个图。 由分析仪响应于具有零汞浓度的空白产生的第二信号强度被用作图上的第二个图。 分析仪信号强度与图中汞浓度之间的线性关系由第一个图和第二个图确定。 斜率截距和斜率用于产生分析仪信号强度和汞浓度之间的数学关系。 这样可以通过将分析仪中已知的汞浓度插入分析仪来校准分析仪，并调整信号强度以符合从图形或数学关系计算的信号强度。

公开(公告)号：US06633381B2

公开(公告)日：2003-10-14

申请号：US09829065

申请日：2001-04-10

申请人： Rainer Uhl

发明人： Rainer Uhl

IPC分类号： G01J330

CPC分类号： G02B21/0076

摘要： A fluorescence-measuring device for scanning a specimen (36, 226) with a selection element (26, 206). Excitation light is coupled to an excitation beam path and guided to the specimen surface. Fluorescent light, which is emitted by the specimen surface, crosses the excitation beam path in a reverse direction and at the same time is decoupled from the excitation beam path. In the beam path, there is a first dispersive element (30, 210) so that the fluorescent light emitted by the specimen surface can strike the selection element spectrally split. The selection element includes a first area (48, 240) and a second area (26, 242) allowing selection between the excitation and fluorescent light. According to a first aspect, a spatial extension of a transmission area (26) is adjustable in order to adjust the transmitted wavelength range of the emission light. According to a second aspect, the selection element (206) makes it possible to operate with a coherent excitation having several laser lines. A two-dimensional confocal measurement arrangement can be accomplished and the emission light separated from the excitation light can be detected with spectral resolution.

摘要翻译： 用于用选择元素（ 26,206 ）扫描样本的荧光测量装置（ 36,226 ）。 激发光耦合到激发光束路径并被引导到样品表面。 由样品表面发射的荧光灯在相反方向上穿过激发光束路径，同时与激发光束路径解耦。 在光束路径中，存在第一色散元件（ 30,210 ），使得由样品表面发射的荧光可以使光谱分裂的选择元件发生。 选择元素包括第一区域（ 48,240 ）和第二区域（ 26,242 ）， 激发和荧光灯。 根据第一方面，传输区域（ 26 ）的空间扩展是可调节的，以便调整发射光的透射波长范围。 根据第二方面，选择元件（ 206 ）使得可以用具有几条激光线的相干激励来操作。 可以实现二维共焦测量装置，并且可以用光谱分辨率检测与激发光分离的发射光。

公开(公告)号：US06628384B2

公开(公告)日：2003-09-30

申请号：US09876731

申请日：2001-06-07

申请人： Szetsen Steven Lee

发明人： Szetsen Steven Lee

IPC分类号： G01J330

CPC分类号： G01B11/00 ,  G01J3/443

摘要： This invention provides a method for accurately measuring a gap distance between two electrodes. According to the method, a plasma space is formed between the electrodes, across which a DC voltage is coupled. The plasma space has a reactive gas that emits a spectrum of spectral lines. The spectrum is monitored to determine at least one line distance between the spectral lines. Finally, the gap distance can be deduced according to the line distance and a specific rule.

摘要翻译： 本发明提供一种精确测量两个电极之间的间隙距离的方法。 根据该方法，在电极之间形成等离子体空间，通过该电极连接DC电压。 等离子体空间具有发射光谱线谱的反应气体。 监测光谱以确定光谱线之间的至少一行距离。 最后，可以根据行距离和具体规则推导间隙距离。

公开(公告)号：US06449038B1

公开(公告)日：2002-09-10

申请号：US09460198

申请日：1999-12-13

申请人： Jens Stolze

发明人： Jens Stolze

IPC分类号： G01J330

CPC分类号： H01L22/26 ,  G01N21/55

摘要： A substrate processing apparatus comprises a process chamber capable of processing a first material on the substrate. A radiation source is capable of emitting radiation that is reflected from the substrate during processing. A radiation detector is provided to detect the reflected radiation and generate a signal trace. A controller is adapted to receive the signal trace and evaluate an endpoint of processing the first material from a change in the signal trace that is distinctive of an exposure of a second material having a different reflectivity coefficient than the first material.

摘要翻译： 基板处理装置包括能够处理基板上的第一材料的处理室。 辐射源能够在处理期间发射从衬底反射的辐射。 提供辐射检测器以检测反射的辐射并产生信号迹线。 控制器适于接收信号迹线，并根据与第一材料具有不同反射系数的第二材料的曝光不同的信号迹线的改变来评估处理第一材料的端点。

公开(公告)号：US06407811B1

公开(公告)日：2002-06-18

申请号：US09440786

申请日：1999-11-15

申请人： Stuart C. Snyder ,  Judy K. Partin ,  Jon D. Grandy ,  Charles L. Jeffery

发明人： Stuart C. Snyder ,  Judy K. Partin ,  Jon D. Grandy ,  Charles L. Jeffery

IPC分类号： G01J330

CPC分类号： G01N21/6408 ,  G01J3/443 ,  G01N21/718

摘要： A method and apparatus are disclosed for measuring trace amounts of constituents in samples by using laser induced breakdown spectroscopy and laser induced fluorescence under ambient conditions. The laser induced fluorescence is performed at a selected wavelength corresponding to an absorption state of a selected trace constituent. The intensity value of the emission decay signal which is generated by the trace constituent is compared to calibrated emission intensity decay values to determine the amount of trace constituent present.

摘要翻译： 公开了一种用于通过在环境条件下使用激光诱导击穿光谱和激光诱导荧光来测量样品中痕量成分的方法和装置。 在对应于所选择的微量成分的吸收状态的选定波长下进行激光诱导的荧光。 将由微量成分产生的发射衰减信号的强度值与校准的发射强度衰减值进行比较，以确定存在的痕量成分的量。

公开(公告)号：US06184982B2

公开(公告)日：2001-02-06

申请号：US08853481

申请日：1997-05-09

申请人： Vassili Karanassios

发明人： Vassili Karanassios

IPC分类号： G01J330

CPC分类号： H05H1/42 ,  H05H1/30

摘要： An in-torch vaporization sample introduction system for introducing a sample to be analyzed into a spectrometer, comprising sample holder means for carrying the sample to be analyzed, a modified Fassel-type torch having a plasma fed by inert gas through outer and intermediate feed channels in an enlarged gas tube, an inner axial tube having one end open adjacent the plasma and an opposite end open for receiving the sample holder means for feeding the sample to the plasma, the inner axial tube tapering to a reduced diameter adjacent the one end to form a well defined channel for feeding the sample to the plasma means for positioning the sample holder means in the inner axial tube a predetermined distance below the plasma, and means for sealing the opposite end of the inner axial tube and means for vaporizing the sample.

摘要翻译： 一种用于将要分析的样品引入光谱仪的手动蒸发样品引入系统，包括用于携带待分析样品的样品保持器装置，具有通过惰性气体通过外部和中间进料通道供给的等离子体的改性的Fassel型炬 在扩大的气体管中，具有一端在等离子体附近打开的内轴管，并且相对端打开以接收用于将样品供给到等离子体的样品保持器装置，内轴向管逐渐缩小至邻近一端至 形成用于将样品供给到等离子体装置的良好定义的通道，用于将样品保持器装置定位在等离子体下方预定距离的内轴向管内，以及用于密封内轴管的相对端和用于蒸发样品的装置的装置。

公开(公告)号：US06825927B2

公开(公告)日：2004-11-30

申请号：US10170662

申请日：2002-06-12

申请人： Jeffrey A. Goldman ,  Igor Kordunsky ,  Khalid M. Aboushhiwa ,  Robert Alan Iovanni

发明人： Jeffrey A. Goldman ,  Igor Kordunsky ,  Khalid M. Aboushhiwa ,  Robert Alan Iovanni

IPC分类号： G01J330

CPC分类号： G01N21/6452 ,  G01J3/10 ,  G01J3/4406 ,  G01N21/64 ,  G01N2201/062 ,  G01N2201/0694

摘要： A method and apparatus relating to a controller for controlling a light emitting array by setting a power level provided to each individual light emission source within the light emitting array is provided. The controller includes a processor for executing instructions and a memory device for storing data. The data from the memory device provides individual instruction for a power level required for each individual light emission source to achieve a normalized detection of light within the fluorometer. A method of manufacturing a controller for controlling the emission of light in a fluorometer includes analyzing the well values of illumination and storing power level values in a memory device corresponding to predetermined illumination levels of the illumination sources.

摘要翻译： 提供了一种与通过设置提供给发光阵列内的每个单独发光源的功率电平来控制发光阵列的控制器有关的方法和装置。 控制器包括用于执行指令的处理器和用于存储数据的存储器件。 来自存储器件的数据为每个单独的发光源所需的功率水平提供单独的指令，以实现荧光计内的光的归一化检测。 一种制造用于控制荧光计中的光的发射的控制器的方法包括分析照明的阱值并将功率电平值存储在对应于照明源的预定照明电平的存储器件中。