公开(公告)号：US06824594B2

公开(公告)日：2004-11-30

申请号：US10629126

申请日：2003-07-29

Applicant: Sven-Olof Larsson

Inventor： Sven-Olof Larsson

IPC: B01D5304

CPC classification number: B60T17/004

Abstract: The present invention concerns a modular air supply system for a vehicle, normally a truck or bus. The system comprises a base unit forming an interface to different modules of the air supply system. Such further modules may include an air treatment module, an electronic drier unit and air distribution module.

Abstract translation: 本发明涉及用于车辆的模块化空气供应系统，通常是卡车或公共汽车。 该系统包括形成与供气系统的不同模块的接口的基座单元。 这样的模块可以包括空气处理模块，电子干燥器单元和空气分配模块。

公开(公告)号：US06824592B2

公开(公告)日：2004-11-30

申请号：US10298073

申请日：2002-11-15

Applicant: Bruce F. Monzyk ,  Anna Lee Y. Tonkovich ,  Yong Wang ,  David P. VanderWiel ,  Steven T. Perry ,  Sean P. Fitzgerald ,  Wayne W. Simmons ,  Jeffrey S. McDaniel ,  Albert E. Weller, Jr. ,  Chad M. Cucksey

Inventor： Bruce F. Monzyk ,  Anna Lee Y. Tonkovich ,  Yong Wang ,  David P. VanderWiel ,  Steven T. Perry ,  Sean P. Fitzgerald ,  Wayne W. Simmons ,  Jeffrey S. McDaniel ,  Albert E. Weller, Jr. ,  Chad M. Cucksey

IPC: B01D5304

CPC classification number: B01D53/0473 ,  B01D53/02 ,  B01D53/0438 ,  B01D53/0462 ,  B01D2253/108 ,  B01D2253/1126 ,  B01D2253/25 ,  B01D2253/304 ,  B01D2253/308 ,  B01D2256/16 ,  B01D2257/102 ,  B01D2257/104 ,  B01D2257/108 ,  B01D2257/11 ,  B01D2257/30 ,  B01D2257/50 ,  B01D2257/702 ,  B01D2257/80 ,  B01D2258/0208 ,  B01D2259/4006 ,  B01D2259/4009 ,  B01D2259/40096 ,  B01J19/0093 ,  C01B3/56 ,  C01B2203/043 ,  C01B2203/0465 ,  C01B2203/047 ,  C01B2203/0475 ,  C01B2203/048 ,  C01B2203/0485 ,  C01B2203/0495 ,  F28D9/00 ,  F28F2260/02 ,  Y10S420/90

Abstract: The present invention provides apparatus and methods for separating hydrogen. In preferred embodiments, the apparatus and methods utilize microchannel devices with small distances for heat and mass transfer to achieve rapid cycle times and surprisingly large volumes of hydrogen separated in short times using relatively compact hardware.

Abstract translation: 本发明提供用于分离氢的装置和方法。 在优选实施例中，该装置和方法利用具有小距离的微通道装置进行热和质量传递，以实现快速循环时间，并且使用相对紧凑的硬件在短时间内分离出惊人的大体积氢。

公开(公告)号：US06805728B2

公开(公告)日：2004-10-19

申请号：US10314727

申请日：2002-12-09

Applicant: Joseph D. Sweeney ,  Paul J. Marganski ,  W. Karl Olander ,  Luping Wang

Inventor： Joseph D. Sweeney ,  Paul J. Marganski ,  W. Karl Olander ,  Luping Wang

IPC: B01D5304

CPC classification number: B01D53/0407 ,  B01D2253/10 ,  B01D2253/112 ,  B01D2253/304 ,  B01D2257/2022 ,  B01D2257/2025 ,  B01D2257/2027 ,  B01D2257/204 ,  B01D2257/2042 ,  B01D2257/2045 ,  B01D2257/2047 ,  B01D2257/206 ,  B01D2257/406 ,  B01D2257/70 ,  B01D2258/0216 ,  B01D2259/4146

Abstract: An apparatus and process for abating at least one acid or hydride gas component or by-product thereof, from an effluent stream deriving from a semiconductor manufacturing process, comprising, a first sorbent bed material having a high capacity sorbent affinity for the acid or hydride gas component, a second and discreet sorbent bed material having a high capture rate sorbent affinity for the same gas component, and a flow path joining the process in gas flow communication with the sorbent bed materials such that effluent is flowed through the sorbent beds, to reduce the acid or hydride gas component. The first sorbent bed material preferably comprises basic copper carbonate and the second sorbent bed preferably comprises at least one of, CuO, AgO, CoO, Co3O4, ZnO, MnO2 and mixtures thereof.

Abstract translation: 一种用于从源自半导体制造工艺的流出物流中减轻至少一种酸或氢气体组分或其副产物的装置和方法，包括：具有对酸或氢化物气体具有高容量吸附剂亲和性的第一吸附剂床材料 组分，具有对相同气体组分的高捕获率吸附剂亲和力的第二和离散的吸附剂床材料，以及将流程连接到与吸附剂床材料气流连通的流路，使得流出物流过吸附剂床，以减少 酸或氢气组分。 第一吸附剂床材料优选包含碱式碳酸铜，第二吸附剂床优选包含CuO，AgO，CoO，Co 3 O 4，ZnO，MnO 2及其混合物中的至少一种。

公开(公告)号：US06800114B2

公开(公告)日：2004-10-05

申请号：US10213640

申请日：2002-08-07

Applicant: Troy Inslee Vanderhoof ,  Brian Douglas Cross ,  John Michael Curry ,  Gordon L. Treichler

Inventor： Troy Inslee Vanderhoof ,  Brian Douglas Cross ,  John Michael Curry ,  Gordon L. Treichler

IPC: B01D5304

CPC classification number: H01Q1/02 ,  B01D53/02 ,  B01D53/261 ,  H05K5/068

Abstract: A pressure equalization apparatus for decreasing or eliminating the pressure differential between the internal pressure within a sealed system and the external ambient air pressure while concurrently sustaining a dry atmosphere inside the enclosure. The apparatus includes a variable volume chamber coupled in fluid communication with the sealed system and adapted to change its volume as in relation to the pressurization of the sealed system. Gas flowing between the sealed system and the variable volume chamber, as the pressurization changes, is exposed to an adsorbent operative for dehumidifying the exchanged gas.

Abstract translation: 一种压力均衡装置，用于减少或消除密封系统内的内部压力与外部环境空气压力之间的压力差，同时维持外壳内部的干燥气氛。 该装置包括与密封系统流体连通并且适于相对于密封系统的加压改变其体积的可变容积室。 在密封系统和可变容积室之间流动的气体，随着加压变化，暴露于用于对交换的气体进行除湿的吸附剂。

公开(公告)号：US06770117B2

公开(公告)日：2004-08-03

申请号：US10284910

申请日：2002-10-31

Applicant: W. Karl Olander

Inventor： W. Karl Olander

IPC: B01D5304

CPC classification number: B01D53/74 ,  C23C14/48 ,  C23C14/564

Abstract: Apparatus and method for utilizing recirculated exhaust gas in semiconductor manufacturing system, in a manner substantially reducing the effluent burden on the exhaust treatment system and infrastructure of the semiconductor process facility.

Abstract translation: 在半导体制造系统中利用再循环废气的装置和方法，其方式大大降低了排气处理系统和半导体处理设备的基础设施的流出物负担。

公开(公告)号：US06749671B2

公开(公告)日：2004-06-15

申请号：US10358972

申请日：2003-02-05

Applicant: Mark Holst ,  Ray Dubois ,  Jose Arno ,  Rebecca Faller ,  Glenn Tom

Inventor： Mark Holst ,  Ray Dubois ,  Jose Arno ,  Rebecca Faller ,  Glenn Tom

IPC: B01D5304

CPC classification number: B01D53/04 ,  B01D53/0446 ,  B01D53/06 ,  B01D2253/102 ,  B01D2253/104 ,  B01D2253/106 ,  B01D2253/108 ,  B01D2256/26 ,  B01D2257/706 ,  B01D2258/0216 ,  B01D2259/40096 ,  B01D2259/40098 ,  C23C16/18 ,  C23C16/4412

Abstract: A method and apparatus for abatement of effluent from a CVD process using a source reagent having a metal organic loosely bound to a organic or organometallic molecule such that upon exposure to heat such bond is readily cleavable, e.g., copper deposition process involving the formation of films on a substrate by metalorganic chemical vapor deposition (CVD) utilizing a precursor composition for such film formation. The abatement process in specific embodiments facilitates high efficiency abatement of effluents from copper deposition processes utilizing Cu(hfac)TMVS as a copper source reagent.

Abstract translation: 一种使用具有松散地结合有机或有机金属分子的金属有机物的源试剂从CVD工艺中消除流出物的方法和装置，使得当暴露于热时，这种键易于切割，例如涉及形成膜的铜沉积工艺 通过利用用于这种成膜的前体组合物的金属有机化学气相沉积（CVD）在衬底上。 在具体实施方案中的减排方法有利于利用Cu（hfac）TMVS作为铜源试剂从铜沉积过程中高效地减少废水。

公开(公告)号：US06730142B2

公开(公告)日：2004-05-04

申请号：US10100978

申请日：2002-03-19

Applicant: Sebastian C. Reyes ,  Venkatesan V. Krishnan ,  Gregory J. DeMartin ,  John H. Sinfelt ,  Karl G. Strohmaier ,  Jose G. Santiesteban

Inventor： Sebastian C. Reyes ,  Venkatesan V. Krishnan ,  Gregory J. DeMartin ,  John H. Sinfelt ,  Karl G. Strohmaier ,  Jose G. Santiesteban

IPC: B01D5304

CPC classification number: B01D53/04 ,  B01D53/02 ,  B01D53/0462 ,  B01D53/047 ,  B01D2253/30 ,  B01D2256/24 ,  B01D2257/702 ,  B01D2259/40083 ,  Y10S95/902

Abstract: In a process for separating propylene from a mixture comprising propylene and propane, the mixture is passed through a bed of an adsorbent comprising a porous crystalline material having (i) a diffusion time constant for propylene of at least 0.1 sec−1, when measured at a temperature of 373° K and a propylene partial pressure of 8 kPa, and (ii) a diffusion time constant for propane, when measured at a temperature of 373° K and a propane partial pressure of 8 kPa, less than 0.02 of said diffusion time constant for propylene. The bed preferentially adsorbs propylene from the mixture. The adsorbed propylene is then desorbed from the bed either by lowering the pressure or raising the temperature of the bed.

Abstract translation: 在从包含丙烯和丙烷的混合物中分离丙烯的方法中，将混合物通过包含多孔结晶材料的吸附剂床，该多孔结晶材料的床（i）丙烯的扩散时间常数至少为0.1秒-1，当 在373°K的温度和8kPa的丙烯分压下测量，和（ii）丙烷的扩散时间常数，当在373°K的温度和8kPa的丙烷分压下测量时，小于0.02的 所述丙烯的扩散时间常数。 床优先从混合物中吸附丙烯。 然后通过降低压力或提高床的温度，将吸附的丙烯从床中解吸。

公开(公告)号：US06709487B1

公开(公告)日：2004-03-23

申请号：US10278131

申请日：2002-10-22

Applicant: Chun Christine Dong ,  Madhukar Bhaskara Rao ,  Dingjun Wu

Inventor： Chun Christine Dong ,  Madhukar Bhaskara Rao ,  Dingjun Wu

IPC: B01D5304

CPC classification number: B01D53/261 ,  B01D53/28 ,  Y10S95/90

Abstract: An adsorbent, method, and apparatus involving same for the removal of moisture from a fluoride-containing fluid such as gaseous nitrogen trifluoride are disclosed herein. In certain preferred embodiments, the adsorbent of the present invention comprises an organic support having a porosity of 30% or greater and a pore size of 2 &mgr;m or less; and at least one metal fluoride disposed within at least a portion of the organic substrate.

Abstract translation: 本文公开了一种用于从含氟化物的流体例如气态三氟化氮中除去水分的吸附剂，方法和装置。 在某些优选的实施方式中，本发明的吸附剂包含孔隙率为30％以上，孔径为2μm以下的有机载体， 以及至少一种配置在有机基材的至少一部分内的金属氟化物。

公开(公告)号：US06709483B1

公开(公告)日：2004-03-23

申请号：US10265495

申请日：2002-10-07

Applicant: Edward W. Hodgson, Jr.

Inventor： Edward W. Hodgson, Jr.

IPC: B01D5304

CPC classification number: B01D53/04 ,  B01D2256/22 ,  B01D2257/504 ,  B01D2259/402 ,  B01D2259/4575 ,  Y02C10/08

Abstract: A carbon dioxide (CO2) adsorption membrane or bed is operative to separate metabolic CO2 from an exhaust stream from a breathable atmosphere which is discharged from a closed habitable environment. The habitable environment is in a low ambient pressure surrounding. A portion of the scrubbed exhaust gas stream is diverted from the habitable environment and passed through a desorption chamber. The desorption chamber is open to the low ambient pressure surrounding to maintain a pressure which is slightly greater than the pressure in the ambient surrounding so that the desorption chamber gas stream will exit the system into the ambient surroundings. When the diverted exhaust gas enters the low pressure desorption pressure chamber its CO2 partial pressure content is reduced. The reduced CO2 partial pressure content of the gas stream in the desorption chamber enables the desorption chamber gas stream to remove CO2 from the adsorption membrane or bed.

Abstract translation: 二氧化碳（CO2）吸附膜或床可操作以将代谢二氧化碳与来自可密闭的可居住环境中排放的透气气体的废气流分开。 居住环境环境低环境。 洗涤废气流的一部分从可居住的环境转移并通过解吸室。 解吸室对周围的低环境压力开放，以保持比周围环境中的压力稍大的压力，使得解吸室气流将离开系统进入周围环境。 当转向排气进入低压解吸压力室时，其CO 2分压含量降低。 解吸室中气流的二氧化碳分压降低使得解吸室气流能够从吸附膜或床上除去CO 2。

公开(公告)号：US06610122B1

公开(公告)日：2003-08-26

申请号：US10134945

申请日：2002-04-30

Applicant: Thomas Filburn ,  Karen Murdoch

Inventor： Thomas Filburn ,  Karen Murdoch

IPC: B01D5304

CPC classification number: B01D53/04 ,  B01D53/229 ,  B01D53/268 ,  B01D2256/22 ,  Y02C10/08 ,  Y02C10/10

Abstract: Water vapor is removed from a mixture of air, metabolic carbon dioxide (CO2), and water vapor prior to removing the CO2 from the mixture. The water vapor-containing mixture is passed through a membrane module which is operative to separate the water vapor from the air and CO2 mixture. The water vapor in the entering mixture will pass in one direction through the membrane in the module from an entry side of the membrane to an exit side of the membrane. The membrane divides the module into two chambers, one of which receives the water vapor-containing mixture, and the other of which receives CO2-free air from a CO2 adsorbant station. The water vapor-containing mixture is removed from a closed habitable environment such as a space station, a space suit, a submarine, or the like, and is moved through the membrane module where the water vapor is removed from the gas stream. The water vapor-free gas stream then flows through the CO2 adsorption station where the CO2 and any remaining water vapor are separated from the air in the mixture. The CO2-free air then flows back through the membrane module via the membrane module exit chamber where the air is rehumidified with the water vapor that has passed through the membrane. The rehumidified air stream is then returned to the dosed habitable environment where it can be used for breathing purposes.

Abstract translation: 在从混合物中除去CO 2之前，从空气，代谢二氧化碳（CO 2）和水蒸气的混合物中除去水蒸气。 含水蒸汽的混合物通过膜组件，其可操作以将水蒸汽与空气和CO 2混合物分离。 进入混合物中的水蒸气将沿一个方向通过模块中的膜从膜的进入侧到膜的出口侧。 膜将模块分成两个室，其中一个容纳含有水蒸气的混合物，另一个室从二氧化碳吸附站接收无CO2的空气。 将含水蒸气的混合物从诸如空间站，太空服，潜艇等的封闭的可居住的环境中移除，并且通过膜模块移动，其中水蒸气从气流中移除。 然后，无水蒸气气流流过CO 2吸附站，其中CO 2和任何剩余的水蒸汽与混合物中的空气分离。 然后，无CO2的空气经由膜组件出口室通过膜组件流回，空气用已经通过膜的水蒸汽进行再湿化。 然后将再加湿的空气流返回到可用于呼吸目的的定量适应环境中。