Substrate processing apparatus
    1.
    发明授权

    公开(公告)号:US12133297B2

    公开(公告)日:2024-10-29

    申请号:US16842848

    申请日:2020-04-08

    IPC分类号: H05B1/02 H01L21/67

    摘要: A substrate processing apparatus includes a holder and a heating device. The holder is configured to hold a central portion of a bottom surface of a substrate to be rotated. The heating device is configured to supply a heated fluid to the bottom surface of the substrate. The heating device includes multiple fins, a heat source, a fluid introduction unit and a fluid discharge unit. The multiple fins are arranged along a circumferential direction of the substrate to be located under the substrate at an outer side than the holder. The heat source is configured to heat the multiple fins. The fluid introduction unit is configured to introduce the fluid to the multiple fins. The fluid discharge unit is configured to discharge the fluid, which is heated while passing through the multiple fins, to the bottom surface of the substrate.

    Portable Heating Apparatus for Heating Interior Piping Systems
    6.
    发明申请
    Portable Heating Apparatus for Heating Interior Piping Systems 有权
    便携式加热室内管道系统加热装置

    公开(公告)号:US20130157209A1

    公开(公告)日:2013-06-20

    申请号:US13767296

    申请日:2013-02-14

    申请人: Larry Gillanders

    发明人: Larry Gillanders

    IPC分类号: F24J3/00

    摘要: Devices, apparatus, systems and methods of using a portable heater that does not use a separate compressor or blower or vacuum. The heater can be attached to a piping system to dry interior walls and/or heat coatings in the piping system. The heater can be attached to a manifold having alternative inlet end and two outlet ends. The manifold ends can have quick connect fittings with similar fittings to be easily mateably attached by rotating fittings with one another. A quick connect/disconnect air pressure regulator with quick connect fitting can be attached to the manifold ends. A quick connect/disconnect plug with similar quick connect fitting can close the manifold ends.

    摘要翻译: 使用不使用单独的压缩机或鼓风机或真空的便携式加热器的装置,装置,系统和方法。 加热器可以连接到管道系统以干燥管道系统中的内壁和/或热涂层。 加热器可以连接到具有备选入口端和两个出口端的歧管。 歧管端部可以具有类似配件的快速连接配件,以便通过彼此旋转配件容易地配合。 快速连接/断开空气压力调节器与快速连接配件可以连接到歧管端。 具有类似快速连接配件的快速连接/断开插头可以关闭歧管端。

    Portable Heating Apparatus for Heating Interior Piping Systems
    7.
    发明申请
    Portable Heating Apparatus for Heating Interior Piping Systems 有权
    便携式加热室内管道系统加热装置

    公开(公告)号:US20100096384A1

    公开(公告)日:2010-04-22

    申请号:US12571561

    申请日:2009-10-01

    申请人: Larry Gillanders

    发明人: Larry Gillanders

    IPC分类号: H05B3/06 H05B3/58

    摘要: Devices, apparatus, systems and methods of using a portable heating unit that does not use a separate compressor or blower or vacuum. The unit can be attached to an inlet of a piping system or section and be used to dry the interior walls of the piping system or section, and/or heat coatings passing through the piping system or section, etc. The portable heating unit includes a heater attached to an inlet end of a manifold, where the manifold can include alternative inlet end and two outlet ends. The inlet and outlet ends of the manifold can have quick connect fittings that allow similar fittings to be easily mateably attached thereto by rotating the fittings with one another. A quick connect/disconnect air pressure regulator with similar quick connect fitting can be attached to anyone of the inlet and outlet ends of the manifold. A quick connect/disconnect plug or plugs with similar quick connect fitting can close off any of the inlet and outlet ends of the manifold. The portable heating unit can be used with both a separate compressor and blower/filter having vacuum generator. The portable heating unit can also be used with only a compressor. The portable heating unit can also be used with only a vacuum generator.

    摘要翻译: 使用不使用单独的压缩机或鼓风机或真空的便携式加热单元的装置,装置,系统和方法。 该单元可以连接到管道系统或部分的入口,并用于干燥管道系统或部分的内壁,和/或通过管道系统或部分等加热涂层。便携式加热单元包括 连接到歧管的入口端的加热器,其中歧管可以包括可选的入口端和两个出口端。 歧管的入口和出口端可以具有快速连接配件,其允许类似的配件通过彼此旋转配件而容易地配合到其上。 具有类似快速连接配件的快速连接/断开空气压力调节器可以连接到歧管的入口端和出口端的任何一个。 具有类似快速连接配件的快速连接/断开插头或插头可以关闭歧管的任何入口端和出口端。 便携式加热单元可以与具有真空发生器的单独的压缩机和鼓风机/过滤器一起使用。 便携式加热单元也可以仅用于压缩机。 便携式加热单元也可以仅用于真空发生器。