- 专利标题： DUAL MODEL-BASED TEMPERATURE CONTROLLER
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申请号： US18344543申请日： 2023-06-29
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公开(公告)号： US20240004409A1公开(公告)日： 2024-01-04
- 发明人: Liu Zhenduo , Theodorus G.M. Oosterlaken
- 申请人： ASM IP Holding, B.V.
- 申请人地址： NL Almere
- 专利权人： ASM IP Holding, B.V.
- 当前专利权人： ASM IP Holding, B.V.
- 当前专利权人地址： NL Almere
- 主分类号： G05D23/19
- IPC分类号： G05D23/19 ; H05B1/02
摘要：
Temperature control systems and methods for a thermal reactor having a process chamber, the control system comprising a first control loop comprising a first Model-Based Predictive Controller (MBPC) and a second control loop comprising a second MBPC, wherein the first and second MBPC are provided with predictive models representing the behavior of the thermal reactor.
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