Printed fourier filtering in optical inspection tools
    1.
    发明申请
    Printed fourier filtering in optical inspection tools 有权
    光学检测工具中的印刷光栅过滤

    公开(公告)号:US20070247668A1

    公开(公告)日:2007-10-25

    申请号:US11410276

    申请日:2006-04-24

    CPC classification number: G06K9/741 G01N21/95623 G06K2209/19

    Abstract: A spatial mask printer may be used in conjunction with an optical inspection tool. The tool can be used to obtain a Fourier image of an inspected object, and a filter mask image can be designed to block certain aspects of the object's image in the Fourier plane corresponding to repetitive aspects of the imaged object. The filter mask image can then be printed and used in the tool during the inspection process. The mask image may be designed by hand or by computer and may be stored for later use. Filters may be automatically placed into the optical path of the inspection tool by a filter wheel, or may be housed in other filter banks. The printer may be configured to operate in a clean room environment, and may be integrated into the optical inspection tool.

    Abstract translation: 空间掩模打印机可以与光学检查工具结合使用。 可以使用该工具来获得被检查对象的傅里叶图像,并且可以设计滤波器掩模图像以阻挡对应于成像对象的重复方面的傅立叶平面中的对象的图像的某些方面。 然后可以在检查过程中将过滤器掩模图像打印并在工具中使用。 掩模图像可以手动或通过计算机设计,并且可以存储以供以后使用。 过滤器可以通过过滤轮自动地放置在检查工具的光路中,或者可以容纳在其他过滤器组中。 打印机可以被配置为在洁净室环境中操作,并且可以集成到光学检查工具中。

    Alignment system for an optical matched filter correlator
    2.
    发明授权
    Alignment system for an optical matched filter correlator 失效
    光学匹配滤波器相关器的对准系统

    公开(公告)号:US4972498A

    公开(公告)日:1990-11-20

    申请号:US216399

    申请日:1988-07-07

    Inventor: Kenneth G. Leib

    CPC classification number: G06K9/741 G06E3/003 G06K9/74

    Abstract: As multiple matched filter memories for optical correlators increase in size, their design, fabrication and alignment becomes increasingly complex and critical for proper operation of the optical correlator. The present invention places special alignment targets on the multiple matched filter memory to provide for proper alignment thereof to enable efficient correlator operation.

    Abstract translation: 由于用于光学相关器的多个匹配滤波器存储器的尺寸增加,因此其设计,制造和对准变得越来越复杂,并且对于光学相关器的正确操作来说是关键的。 本发明在多重匹配滤波器存储器上设置特殊的对准目标以提供适当的对准,以实现有效的相关器操作。

    Image Processing Apparatus, Image Processing Method, and Image Processing Program
    3.
    发明申请
    Image Processing Apparatus, Image Processing Method, and Image Processing Program 审中-公开
    图像处理装置,图像处理方法和图像处理程序

    公开(公告)号:US20150186753A1

    公开(公告)日:2015-07-02

    申请号:US14419875

    申请日:2013-07-18

    Inventor: Shinichi Horita

    Abstract: An image processing apparatus for generating a template image used for template matching relying on a frequency component of an image is provided. The image processing apparatus includes a setting portion accepting setting of a region in an input image as a template candidate image and an effectiveness degree calculation portion calculating, by analyzing the template candidate image itself set in the input image, a degree of effectiveness indicating appropriateness as the template image of the template candidate image. The effectiveness degree calculation portion calculates the degree of effectiveness based on a value associated with frequency distribution of the template candidate image.

    Abstract translation: 提供一种用于根据图像的频率分量生成用于模板匹配的模板图像的图像处理装置。 图像处理装置包括设置部分,接受输入图像中的区域的设置作为模板候选图像,并且有效度计算部分通过分析输入图像中设置的模板候选图像本身来计算表示适当性的有效程度为 模板候选图像的模板图像。 有效度计算部分基于与模板候选图像的频率分布相关联的值来计算有效度。

    Extended source wavefront sensor through optical correlation with a change in centroid position of light corresponding to a magnitude of tip/tilt aberration of optical jitter
    4.
    发明授权
    Extended source wavefront sensor through optical correlation with a change in centroid position of light corresponding to a magnitude of tip/tilt aberration of optical jitter 有权
    扩展源波前传感器通过光学相关与光的重心位置的变化对应于光学抖动的尖端/倾斜像差的大小

    公开(公告)号:US08907260B2

    公开(公告)日:2014-12-09

    申请号:US13482304

    申请日:2012-05-29

    CPC classification number: G06K9/741 G01J9/00 G02B26/06

    Abstract: An atmospheric aberration sensor that uses two optically correlated images of a scene and the Fourier transform capabilities of a lens or other focusing element. The sensor receives light via an f-number matching element from a scene or from an external optical system and transmits it through a focusing optical element to an updateable display element such as a spatial light modulator or micro mirror array, which modulates the real time image from the focusing element with previous template image of the same extended scene. The modulated image is focused onto an autocorrelation detection sensor, which detects a change in centroid position corresponding to a change of the tip/tilt in the optical path. This peak shift is detected by centroid detection and corresponds to the magnitude of global wavefront tip/tilt. With a lenslet array and detector array, the system can also measure local tip/tilt and higher order aberrations.

    Abstract translation: 使用场景的两个光学相关图像和透镜或其他聚焦元件的傅里叶变换能力的大气像差传感器。 该传感器通过来自场景或外部光学系统的f数匹配元件接收光,并将其通过聚焦光学元件发送到诸如空间光调制器或微镜阵列的可更新显示元件,其调制实时图像 从聚焦元素与以前的模板图像相同的扩展场景。 调制图像被聚焦到自相关检测传感器上,该传感器检测对应于光路中的尖端/倾斜的变化的质心位置的变化。 该峰值偏移通过质心检测来检测,并对应于全局波前尖端/倾斜的幅度。 使用小透镜阵列和检测器阵列,系统还可以测量局部尖端/倾斜和高阶像差。

    Real time correlator system and method
    5.
    发明授权
    Real time correlator system and method 有权
    实时相关系统和方法

    公开(公告)号:US08144931B1

    公开(公告)日:2012-03-27

    申请号:US12431727

    申请日:2009-04-28

    CPC classification number: G06K9/3241 G06K9/741

    Abstract: A real time digital correlation system is disclosed. Reference filters are constructed to define a region of filter space, and filters may be predictively selected based on a trajectory of selected filters through the filter space. In some instances, selected features of a spacecraft are selected for correlation to produce full 6DoF information. In other instances, portions of a correlation target are selected for correlation to produce 6DoF information. Digital filters of the invention are preferably 4-bit filters, and use unique mapping algorithms to map phase and intensity information from larger images, such as 12, 16, 32 and 64 bit images, to the 4-bit format.

    Abstract translation: 公开了一种实时数字相关系统。 参考滤波器被构造为定义滤波器空间的区域,并且可以基于通过滤波器空间的所选滤波器的轨迹来预测地选择滤波器。 在某些情况下,选择航天器的所选特征进行相关以产生完整的6DoF信息。 在其他情况下,选择相关目标的部分进行相关以产生6DoF信息。 本发明的数字滤波器优选地是4位滤波器,并且使用独特的映射算法将来自较大图像(诸如12,16,32和64位图像)的相位和强度信息映射到4位格式。

    IMAGE REGISTRATION USING ROTATION TOLERANT CORRELATION METHOD
    6.
    发明申请
    IMAGE REGISTRATION USING ROTATION TOLERANT CORRELATION METHOD 有权
    使用旋转稳定相关方法的图像注册

    公开(公告)号:US20100086220A1

    公开(公告)日:2010-04-08

    申请号:US12247603

    申请日:2008-10-08

    Inventor: Kathleen Minear

    CPC classification number: G06K9/741 G06T7/32

    Abstract: A method for correlating or finding similarity between two data sets. The method can be used for correlating two images with common scene content in order to find correspondence points between the data sets. These correspondence points then can be used to find the transformation parameters which when applied to image 2 brings it into alignment with image 1. The correlation metric has been found to be invariant under image rotation and when applied to corresponding areas of a reference and target image, creates a correlation surface superior to phase and norm cross correlation with respect to the correlation peak to correlation surface ratio. The correlation metric was also found to be superior when correlating data from different sensor types such as from SAR and EO sensors. This correlation method can also be applied to data sets other than image data including signal data.

    Abstract translation: 一种用于相关或发现两个数据集之间的相似性的方法。 该方法可以用于将两个图像与公共场景内容相关联,以便找到数据集之间的对应点。 然后,这些对应点可以用于找到当应用于图像2使其与图像1对准时的变换参数。已经发现相关度量在图像旋转下是不变的,并且当应用于参考和目标图像的相应区域时 ,产生相对于相关峰值与相关面积比优于相位和标准互相关的相关表面。 当将来自不同传感器类型的数据(如SAR和EO传感器)相关时,相关性度量也被认为是优越的。 该相关方法也可以应用于包括信号数据的图像数据以外的数据集。

    Method for distinguishing between objects using mace filters
    7.
    发明授权
    Method for distinguishing between objects using mace filters 失效
    使用mace过滤器区分对象的方法

    公开(公告)号:US5862258A

    公开(公告)日:1999-01-19

    申请号:US744703

    申请日:1996-11-04

    Inventor: Travis S. Taylor

    CPC classification number: G06K9/741 G02B27/46

    Abstract: A pair of matched filters describing a pre-selected category of objects isade, each of the filters having a center located at a unique place in the filter. When incorporated into a MACE filter and used in an optical correlator, a line drawn through the correlation peaks caused by the centers of the matched filter pair and a pre-selected axis together produce an angle that is indigenous to that particular category of objects, thus identifying the category of objects.

    Abstract translation: 描述了一对预定类别的对象的匹配滤波器,每个滤波器具有位于滤波器中唯一位置的中心。 当结合到MACE滤波器并用于光学相关器中时,通过匹配滤波器对和预选轴线的中心引起的相关峰值绘制的线一起产生对该特定类别的对象是土着的角度,因此 识别物体的类别。

    Optical detector
    9.
    发明授权
    Optical detector 有权
    光学探测器

    公开(公告)号:US09557856B2

    公开(公告)日:2017-01-31

    申请号:US14460540

    申请日:2014-08-15

    Applicant: BASF SE

    Abstract: An optical detector (110) is disclosed, the optical detector (110) comprising: at least one spatial light modulator (114) being adapted to modify at least one property of a light beam (136) in a spatially resolved fashion, having a matrix (132) of pixels (134), each pixel (134) being controllable to individually modify the at least one optical property of a portion of the light beam (136) passing the pixel (134); at least one optical sensor (116) adapted to detect the light beam (136) after passing the matrix (132) of pixels (134) of the spatial light modulator (114) and to generate at least one sensor signal; at least one modulator device (118) adapted for periodically controlling at least two of the pixels (134) with different modulation frequencies; and at least one evaluation device (120) adapted for performing a frequency analysis in order to determine signal components of the sensor signal for the modulation frequencies.

    Abstract translation: 公开了一种光检测器(110),所述光检测器(110)包括:至少一个空间光调制器(114),其适于以空间分辨的方式修改光束(136)的至少一个属性,具有矩阵 (132)的每个像素(134),每个像素(134)可被控制以分别修改通过像素(134)的光束(136)的一部分的至少一个光学特性; 至少一个光学传感器(116)适于在通过空间光调制器(114)的像素(134)的矩阵(132)之后检测光束(136)并且产生至少一个传感器信号; 至少一个调制器装置(118)适于周期性地控制具有不同调制频率的至少两个像素(134); 以及适于执行频率分析以便确定调制频率的传感器信号的信号分量的至少一个评估装置(120)。

    OPTICAL DETECTOR
    10.
    发明申请
    OPTICAL DETECTOR 有权
    光学检测器

    公开(公告)号:US20150286340A1

    公开(公告)日:2015-10-08

    申请号:US14460540

    申请日:2014-08-15

    Applicant: BASF SE

    Abstract: An optical detector (110) is disclosed, the optical detector (110) comprising: at least one spatial light modulator (114) being adapted to modify at least one property of a light beam (136) in a spatially resolved fashion, having a matrix (132) of pixels (134), each pixel (134) being controllable to individually modify the at least one optical property of a portion of the light beam (136) passing the pixel (134); at least one optical sensor (116) adapted to detect the light beam (136) after passing the matrix (132) of pixels (134) of the spatial light modulator (114) and to generate at least one sensor signal; at least one modulator device (118) adapted for periodically controlling at least two of the pixels (134) with different modulation frequencies; and at least one evaluation device (120) adapted for performing a frequency analysis in order to determine signal components of the sensor signal for the modulation frequencies.

    Abstract translation: 公开了一种光检测器(110),所述光检测器(110)包括:至少一个空间光调制器(114),其适于以空间分辨的方式修改光束(136)的至少一个属性,具有矩阵 (132)的每个像素(134),每个像素(134)可被控制以分别修改通过像素(134)的光束(136)的一部分的至少一个光学特性; 至少一个光学传感器(116)适于在通过空间光调制器(114)的像素(134)的矩阵(132)之后检测光束(136)并且产生至少一个传感器信号; 至少一个调制器装置(118)适于周期性地控制具有不同调制频率的至少两个像素(134); 以及适于执行频率分析以便确定调制频率的传感器信号的信号分量的至少一个评估装置(120)。

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