METHOD FOR PRODUCING A DIFFERENTIAL PRESSURE SENSOR AND CORRESPONDING DIFFERENTIAL PRESSURE SENSOR

    公开(公告)号:US20240035913A1

    公开(公告)日:2024-02-01

    申请号:US18256678

    申请日:2021-11-26

    发明人: Patrick Doria

    IPC分类号: G01L19/14 G01L19/06

    摘要: A method for producing a differential pressure sensor includes steps of: introducing a rotationally-symmetrical electronics module into a cavity of a mechanical module until a contact face of the electronics module hits a stop face of the mechanical module; welding and/or gluing at least the contact face to the stop face; axial welding in an opening region of the cavity, such that the mechanical module is welded to the electronics module all around by means of the weld; filling at least two pressure transmission lines with a pressure transmission liquid, wherein the at least two pressure transmission lines are provided for the transmission of the first pressure and the second pressure from the first separating membrane and the second separating membrane, respectively, to two opposing faces of the differential pressure sensor element; and placing the housing onto the housing adapter.

    PIPELINE PRESSURE MONITORING DEVICE
    3.
    发明公开

    公开(公告)号:US20240011860A1

    公开(公告)日:2024-01-11

    申请号:US18037485

    申请日:2020-12-31

    发明人: Yadong DONG

    IPC分类号: G01L19/00 G01L19/14 A61M5/168

    摘要: A pipeline pressure monitoring device includes a housing, a vent nozzle, a first circuit board, a pressure sensor, a sliding sleeve, an elastic member sleeved on the vent nozzle and sandwiched between the first stop block and the sliding sleeve, a magnetic block on the sliding sleeve, a second circuit board connected to the first circuit board, and a position sensor on the second circuit board and cooperating with the magnetic block. A first stop block is arranged on the vent nozzle. One end of the vent nozzle protrudes from the housing through a mounting hole of the housing. The pressure sensor is installed at the other end of the vent nozzle and on the first circuit board. The pressure sensor blocks the other end of the vent nozzle. The sliding sleeve is installed in the mounting hole in a sliding manner and sleeved on the vent nozzle.

    Differential pressure sensor
    4.
    发明授权

    公开(公告)号:US11692895B2

    公开(公告)日:2023-07-04

    申请号:US17217234

    申请日:2021-03-30

    摘要: A differential MEMS pressure sensor includes a topping wafer with a top side and a bottom side, a diaphragm wafer having a top side connected to the bottom side of the topping wafer and a bottom side, and a backing wafer having a top side connected to the bottom side of the diaphragm wafer and a bottom side. The topping wafer includes a first cavity formed in the bottom side of the topping wafer. The diaphragm wafer includes a diaphragm, a second cavity formed in the bottom side of the diaphragm wafer underneath the diaphragm, an outer portion surrounding the diaphragm, and a trench formed in the top side of the diaphragm wafer and positioned in the outer portion surrounding the diaphragm.

    PRESSURE DETECTION UNIT, PRESSURE SENSOR USING THE SAME, AND METHOD OF MANUFACTURING PRESSURE DETECTION UNIT

    公开(公告)号:US20170234750A1

    公开(公告)日:2017-08-17

    申请号:US15429504

    申请日:2017-02-10

    IPC分类号: G01L19/00 G01L19/06 G01L9/00

    摘要: [Object] Provided are a pressure detection unit and a pressure sensor using the same capable of performing a trimming operation using a simple structure during an assembly operation, and reducing a decrease in detection accuracy of a semiconductor type pressure detection device.[Solving Means] A pressure detection unit includes a base formed in a lid shape and made of ceramic, a receiving member formed in a plate shape, a diaphragm interposed between the base and the receiving member, a semiconductor type pressure detection device installed on a side of a pressure receiving space formed between the base and the diaphragm in the base, and three terminal pins electrically connected to the semiconductor type pressure detection device, the terminal pins penetrating the base, wherein the three terminal pins include an earth terminal pin, a power input terminal pin, and a signal output terminal pin.