公开(公告)号：US20170199083A1

公开(公告)日：2017-07-13

申请号：US15331036

申请日：2016-10-21

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Junji OKUMA ,  Yasunori IGASAKI ,  Yasunaga NARA

IPC: G01J9/02

CPC classification number: G01J9/0215 ,  G01J2009/0223 ,  G01J2009/0234

Abstract: A collimation evaluation device includes a first reflection member, a second reflection member, a screen, and a housing. A first reflection surface of the first reflection member and a first reflection surface of the second reflection member face each other and are parallel to each other. Further, interference fringes are formed on the screen by light L12 reflected on the first reflection surface of the first reflection member and a second reflection surface of the second reflection member and light L21 reflected on a second reflection surface of the first reflection member and the first reflection surface of the second reflection member, and collimation of incident light is evaluated on the basis of a direction of the interference fringes.

公开(公告)号：US20150076724A1

公开(公告)日：2015-03-19

申请号：US14482426

申请日：2014-09-10

Applicant: CANON KABUSHIKI KAISHA

Inventor： Hiroshi Sato

IPC: B29C59/00 ,  B29C59/02

CPC classification number: G03F7/0002 ,  G01J2009/0234 ,  G03F9/7042 ,  G03F9/7049 ,  G03F9/7065

Abstract: This disclosure provides an imprint apparatus configured to form a pattern with an imprint material by bringing the imprint material on a substrate and a pattern of the mold into contact with each other including a drive unit to bring part of the pattern of the mold into contact with the imprint material, and bring the pattern into contact with the imprint material so a contact surface area between the pattern of the mold and the imprint material increases, an interference fringe detecting unit to detect an interference fringe generated by reflected light from the pattern of the mold and reflected light from the substrate, and a state detecting unit to detect a contact state between the pattern of the mold and the imprint material on the basis of the interference fringe.

Abstract translation: 本公开提供了一种压印装置，其被配置为通过将压印材料通过将基板上的压印材料和模具的图案彼此接触而形成具有压印材料的图案，该驱动单元包括驱动单元，以使模具的图案的一部分与 压印材料，并且使图案与压印材料接触，使得模具图案与压印材料之间的接触表面积增加;干涉条纹检测单元，用于检测由来自图案的反射光产生的干涉条纹 来自基板的模具和反射光;以及状态检测单元，其基于干涉条纹来检测模具的图案和压印材料之间的接触状态。

公开(公告)号：US20100309482A1

公开(公告)日：2010-12-09

申请号：US12864760

申请日：2009-09-29

Applicant: Hirotoshi Oikaze ,  Takashi Urashima

Inventor： Hirotoshi Oikaze ,  Takashi Urashima

IPC: G01B11/30

CPC classification number: G01B11/2441 ,  G01B9/02007 ,  G01B9/02069 ,  G01B9/02083 ,  G01B9/0209 ,  G01J2009/0234

Abstract: The measurement accuracy of an apparatus for measuring the surface shape of an object utilizing a two-wavelength phase-shift interferometry is improved. A low-coherence light source, a plurality of wavelength filters with different transmission wavelengths, an angle control unit and an analysis unit are provided. When performing a two-wavelength phase shift method, the analysis unit detects the wavelength difference between two wavelengths, and corrects a calculated wavelength value and a calculated phase value of one of the wavelengths for preventing a fringe-order calculation error. Next, the angle of the wavelength filters is controlled for making the actual wavelength difference coincident with a designed value. Thus, the wavelength difference between the two wavelengths is continuously controlled to be constant, which enables measurements of surface shapes with high accuracy, even when there are wavelength fluctuations due to the temperature change or the time elapse.

Abstract translation: 提高了利用双波长相移干涉法测量物体的表面形状的装置的测量精度。 提供了低相干光源，具有不同透射波长的多个波长滤光器，角度控制单元和分析单元。 当执行双波长相移方法时，分析单元检测两个波长之间的波长差，并校正计算的波长值和计算出的波长之一的相位值，以防止边缘阶计算误差。 接下来，控制波长滤波器的角度，使实际波长差与设计值一致。 因此，即使当由于温度变化或时间经过而导致波长波动时，两个波长之间的波长差被连续地控制为恒定，这使得能够高精度地测量表面形状。

公开(公告)号：US20050206906A1

公开(公告)日：2005-09-22

申请号：US11073712

申请日：2005-03-08

Applicant: Kinpui Chan ,  Masahiro Akiba ,  Yasufumi Fukuma ,  Hiroyuki Otsuka ,  Hisashi Tsukada

Inventor： Kinpui Chan ,  Masahiro Akiba ,  Yasufumi Fukuma ,  Hiroyuki Otsuka ,  Hisashi Tsukada

IPC: A61B10/00 ,  G01B9/02 ,  G01B11/24 ,  G01J9/02 ,  G01J9/04 ,  G01N21/17

CPC classification number: G01B9/02007 ,  G01B9/02003 ,  G01B9/02041 ,  G01B9/02069 ,  G01B2290/45 ,  G01J2009/0234

Abstract: An optical image measuring apparatus capable of effectively obtaining a direct current component of a heterodyne signal which is composed of background light of interference light is provided. The optical image measuring apparatus includes: an optical interference system in which a light beam from a light source is divided into signal light and reference light by a beam splitter, a frequency of the reference light is shifted by a frequency shifter, and the signal light propagating through an object to be measured and the reference light reflected on a mirror are superimposed on each other by the beam splitter to produce interference light; beam splitters for dividing the interference light into interference light beams; shutters serving as an intensity modulating unit for modulating intensities of the respective interference light beams at predetermined intervals; CCDs for receiving the respective interference light beams whose intensities are modulated and outputting electrical signals; and a signal processing portion serving as a calculating unit for calculating an intensity of the direct current component corresponding to the background light of the interference light based on the outputted electrical signals.

Abstract translation: 提供一种能够有效地获得由干涉光的背景光组成的外差信号的直流分量的光学图像测量装置。 光学图像测量装置包括：光学干涉系统，其中来自光源的光束被分束器分成信号光和参考光，参考光的频率被移频器偏移，并且信号光 通过被测量物体传播并且通过分束器将反射在反射镜上的参考光彼此叠加以产生干涉光; 分束器，用于将干涉光分成干涉光束; 用作强度调制单元的快门，用于以预定间隔调制各个干涉光束的强度; 用于接收其强度被调制并输出电信号的各个干涉光束的CCD; 以及信号处理部分，用作计算单元，用于基于输出的电信号计算与干涉光的背景光相对应的直流分量的强度。

公开(公告)号：US4575247A

公开(公告)日：1986-03-11

申请号：US627363

申请日：1984-07-02

Applicant: Richard J. Tansey

Inventor： Richard J. Tansey

IPC: G01J1/42 ,  G01J9/02 ,  G01J9/04 ,  G01B9/02

CPC classification number: G01J9/04 ,  G01J1/4257 ,  G01J2009/0223 ,  G01J2009/0234 ,  G01J2009/0261

Abstract: A heterodyne phase-determining interferometer comprising a Smartt point diffraction interferometer (PDI) 10 in which the pinhole plate 22 is replaced by a half-wave, partially transmitting plate 22' with a pinhole 20 therein. The output beams 26 and 24 from the pinhole 20 are propagated through a frequency shifter 12 which includes a quarter-wave plate 28 whose axis is at 45.degree. to the polarization axes of the two beams 26 and 24 coming from the PDI 10, a half-wave plate 30 rotating at an angular frequency of .omega., and a linear polarizer which orients the polarization vectors of the two beams in the same direction along the propagation axis. The output of the frequency shifter 12 is a moving interference pattern consisting of alternate light and dark lines. This pattern is projected upon a phase-measuring means 14 comprising an array of photodetectors 34, 36 connected to a plurality of phase-to-voltage converters 38. There is one reference photodetector 34, the rest being test photodetectors. The reference photodetector 34 is connected to all phase-to-voltage converters 38, but each test photodetector 36 is connected to a different phase-to-voltage converter 38. The output of each converter 38 is the phase difference between the light at the point viewed by its associated test photodetector 36 and the light at the point viewed by the reference photodetector 34.

Abstract translation: 一种外差相位确定干涉仪，其包括Smartt点衍射干涉仪（PDI）10，其中针孔板22被其中具有针孔20的半波部分透射板22'代替。 来自针孔20的输出光束26和24通过一个变频器12传播，该变频器12包括一个四分之一波长的板28，该四分之一波片28的轴线相对于来自PDI 10的两个光束26和24的偏振轴为45度， 波片30以ω的角度频率旋转，以及线性偏振器，其沿着传播轴线沿相同方向定向两个光束的偏振矢量。 移频器12的输出是由交替的亮线和暗线组成的移动干涉图案。 该图案被投影在包括连接到多个相电压转换器38的光电检测器34,36的阵列的相位测量装置14上。存在一个参考光电检测器34，其余的是测试光电探测器。 参考光电检测器34连接到所有相电压转换器38，但是每个测试光电检测器36连接到不同的相电压转换器38.每个转换器38的输出是点处的光之间的相位差 通过其相关联的测试光电检测器36观察，以及由参考光电检测器34观察的点处的光。

公开(公告)号：US20110157599A1

公开(公告)日：2011-06-30

申请号：US13060033

申请日：2009-08-25

Applicant: Jonathan Mark Ralph Weaver ,  Phillip Stephen Dobson ,  David Paul Burt ,  Stephen Thoms ,  Kevin Edward Docherty ,  Yuan Zhang

Inventor： Jonathan Mark Ralph Weaver ,  Phillip Stephen Dobson ,  David Paul Burt ,  Stephen Thoms ,  Kevin Edward Docherty ,  Yuan Zhang

IPC: G01B11/02

CPC classification number: G01D5/266 ,  G01D5/38 ,  G01D11/00 ,  G01J9/0246 ,  G01J2009/0234 ,  G01N21/45 ,  G03H1/0005

Abstract: Various uses of visible light interference patterns are provided. Suitable interference patterns are those formed by diffraction from patterns of apertures. Typical uses disclosed herein relate to spatial metrology, such as a translational and/or angular position determination system. Further uses include the analysis of properties of the light itself (such as the determination of the wavelength of the electromagnetic radiation). Still further uses include the analysis of one or more properties (e.g. refractive index) of the matter through which the light passes. Part of the interference pattern is captured at a pixellated detector, such as a CCD chip, and the captured pattern compared with a calculated pattern. Very precise measurements of the spacing between maxima is possible, thus allowing very precise measurements of position of the detector in the interference pattern.

Abstract translation: 提供了可见光干涉图案的各种用途。 合适的干涉图案是由孔的图案衍射形成的。 本文公开的典型用途涉及空间计量学，例如平移和/或角位置确定系统。 另外的用途包括对光本身的性质的分析（例如确定电磁辐射的波长）。 另外的用途包括对光通过的物质的一个或多个性质（例如折射率）的分析。 干涉图案的一部分在诸如CCD芯片的像素化检测器处捕获，并且捕获的图案与计算的图案相比较。 可以非常精确地测量最大值之间的间距，从而允许在干涉图案中非常精确地测量检测器的位置。

公开(公告)号：US07561279B2

公开(公告)日：2009-07-14

申请号：US11770582

申请日：2007-06-28

Applicant: Raymond Castonguay ,  Piotr Szwaykowski

Inventor： Raymond Castonguay ,  Piotr Szwaykowski

IPC: G01B9/02

CPC classification number: G01B9/02081 ,  G01B2290/45 ,  G01B2290/70 ,  G01J9/02 ,  G01J2009/0234 ,  G01J2009/0261

Abstract: An optical measuring apparatus for comprising, in combination, a polarization type interferometer including a polarization type beam splitter in which a polarized beam of light is split into orthogonally polarized reference and test beams, an array of detectors arranged in a line for creating a plurality of phase shifting interferograms, and a scanning device for moving the object in a direction perpendicular to a long axis of the detectors.

Abstract translation: 一种光学测量装置，包括组合的偏振型干涉仪，其包括偏振光束分离器，其中偏振光束被分成垂直偏振的参考和测试光束，一组检测器布置成一行，用于创建多个 相移干涉图，以及用于沿与检测器的长轴垂直的方向移动物体的扫描装置。

公开(公告)号：US20090046293A1

公开(公告)日：2009-02-19

申请号：US11972586

申请日：2008-01-10

Applicant: John Cabaniss ,  Tom Chaffee

Inventor： John Cabaniss ,  Tom Chaffee

IPC: G01J3/45

CPC classification number: G01J9/02 ,  G01J9/04 ,  G01J2009/0207 ,  G01J2009/0234 ,  H04B10/676

Abstract: Optical communications can be performed using spectral interferometry. An incident transmission pulse or beam may be mixed with a locally generated beam or pulse to create an interference pattern that may be analyzed to extract the transmitted data. The incident transmission pulse or beam may also be split and mixed with itself to create an interference pattern.

Abstract translation: 可以使用光谱干涉测量来执行光通信。 入射传输脉冲或光束可以与本地生成的光束或脉冲混合，以产生可被分析以提取发射数据的干涉图案。 入射传输脉冲或光束也可以与其自身分离并混合以产生干涉图案。

公开(公告)号：US20080180659A1

公开(公告)日：2008-07-31

申请号：US11742800

申请日：2007-05-01

Applicant: Tomiji Tanaka ,  Kageyasu Sako ,  Ryo Kasegawa ,  Shinji Yamada ,  Katsuhiro Agatsuma

Inventor： Tomiji Tanaka ,  Kageyasu Sako ,  Ryo Kasegawa ,  Shinji Yamada ,  Katsuhiro Agatsuma

IPC: G01J3/00

CPC classification number: G01J9/00 ,  G01J9/0246 ,  G01J2009/0234 ,  H01S5/0014 ,  H01S5/0071 ,  H01S5/0612 ,  H01S5/0654 ,  H01S5/141 ,  H01S5/143

Abstract: A laser system includes a laser diode that oscillates in a multi-mode and has characteristics in which its oscillation wavelength varies with temperature, a grating that receives a light beam emitted from the laser diode and returns a diffracted beam to the laser diode, a mechanism that changes the wavelength of the diffracted beam returned to the laser diode, a wavelength detector that detects the wavelength of an output beam which is the same as that of the diffracted beam returned to the laser diode, a temperature regulator that maintains the laser diode at a predetermined temperature, and a control unit that controls the mechanism so that the output beam having a predetermined wavelength is output and controls the temperature regulator so that the laser diode oscillates at the predetermined wavelength.

Abstract translation: 激光系统包括以多模振荡并具有其振荡波长随温度变化的特性的激光二极管，接收从激光二极管发射的光束并将衍射光束返回到激光二极管的光栅，机构 其改变了返回到激光二极管的衍射光束的波长，检测与返回到激光二极管的衍射光束相同的输出光束的波长的波长检测器，将激光二极管保持在 以及控制单元，其控制机构，使得具有预定波长的输出光束被输出并控制温度调节器，使得激光二极管以预定波长振荡。

公开(公告)号：US07333210B2

公开(公告)日：2008-02-19

申请号：US11216548

申请日：2005-08-30

Applicant: James J. Snyder ,  Stephen L. Kwiatowski

Inventor： James J. Snyder ,  Stephen L. Kwiatowski

IPC: G01B9/02

CPC classification number: H01S3/13 ,  G01J9/0246 ,  G01J2009/0234

Abstract: A method and system for controlling the wavelength of light emitted by a tunable laser. The system includes a wavelength tuner that provides information of a desired wavelength; a coupler for tapping a portion of the light from the tunable laser; and an apparatus for measuring the actual wavelength of the light. The apparatus takes the portion of the light as an input signal and splits the input signal into two beams that are directed through two paths of different optical lengths. Then, the two beams are interfered with each other in order to form a fringe pattern at an observation plane, where the fringe pattern is detected and analyzed to determine the wavelength of the light. A processor compares the difference between the desired and determined wavelengths, and sends a tuning signal to the tunable laser forming a feedback control of the tunable laser.

Abstract translation: 一种用于控制由可调激光器发射的光的波长的方法和系统。 该系统包括提供期望波长的信息的波长调谐器; 用于对来自可调激光器的一部分光进行点击的耦合器; 以及用于测量光的实际波长的装置。 该装置将光的一部分作为输入信号，并将输入信号分成两束通过不同光学长度的两条路径的光束。 然后，两个光束彼此干涉，以在观察平面上形成条纹图案，其中检测和分析条纹图案以确定光的波长。 处理器比较期望波长和确定波长之间的差异，并将调谐信号发送到可调激光器，形成可调激光器的反馈控制。