Heat treating furnace
    3.
    发明授权
    Heat treating furnace 失效
    热处理炉

    公开(公告)号:US08591824B2

    公开(公告)日:2013-11-26

    申请号:US13338378

    申请日:2011-12-28

    摘要: The heat treating furnace for the gas reaction includes an outer body, an inner body, a heating mechanism, gas supplying mechanism, and a controller. Using the controller to control the amount of gas supply effectively keeps the first pressure (P1) in the gas circulation chamber outside the inner body greater than the second pressure (P2) in the reaction chamber inside the inner body all the time. In this way, the flow rate of gas inlet, reaction rate, cooling rate can be facilitated, and the uniformity of the thin film and the operational safety can be improved.

    摘要翻译: 用于气体反应的热处理炉包括外体,内体,加热机构,供气机构和控制器。 使用控制器控制气体供给量有效地使内体内的气体循环室中的第一压力(P1)大于内体内的反应室中的第二压力(P2)。 这样,可以促进进气流量,反应速度,冷却速度,并且可以提高薄膜的均匀性和操作安全性。

    Vacuum oven, sysem incorporating the same and method of using the same
    4.
    发明申请
    Vacuum oven, sysem incorporating the same and method of using the same 失效
    真空烘箱,系统结合使用相同的方法

    公开(公告)号:US20030071029A1

    公开(公告)日:2003-04-17

    申请号:US10268469

    申请日:2002-10-10

    IPC分类号: F27D011/00 F27B005/14

    摘要: A vacuum oven for decontaminating items, a system incorporating multiple vacuum ovens and a method of operating such system are provided. The ovens are portable. They can have a vacuum drawn in them and can be heated by being coupled to a vacuum and a power source, respectively at a first location and then be decoupled from the vacuum and power sources and moved to a second location such as a glove box or clean room while still maintaining a vacuum.

    摘要翻译: 提供用于净化物品的真空烘箱,包括多个真空炉的系统和操作该系统的方法。 烤箱是便携式的。 它们可以在其中吸入真空并且可以通过分别在第一位置处耦合到真空和电源来加热,然后与真空和电源分离并移动到第二位置,例如手套箱或 洁净室,同时保持真空。

    High temperature furnace muffle
    5.
    发明授权
    High temperature furnace muffle 失效
    高温炉火

    公开(公告)号:US4032290A

    公开(公告)日:1977-06-28

    申请号:US689554

    申请日:1976-05-24

    IPC分类号: F27B5/02 F27B5/10 F27B5/06

    CPC分类号: F27B5/02 F27B5/10

    摘要: A muffle seal for a high temperature furnace in which a quartz or similar muffle is attached to an associated metal structure to provide substantial sealing of gas in the muffle even at extremely high operating temperatures. As employed in a multi-zone furnace having a high temperature quartz muffle section and a lower temperature metal muffle section joined thereto via a gas or gas and heat barrier, the quartz muffle is joined to the barrier by a peripheral chamber provided around the end of the quartz muffle confronting the barrier, the chamber being sealed to surfaces of the muffle and the barrier by porous gaskets. A sealing gas is introduced at above atmospheric pressure to the peripheral chamber, the gas being controllably transmitted through the porous gaskets to provide isolation against leakage of gas within the quartz muffle. The novel seal can also be employed to join quartz and metal muffle sections without a barrier therebetween.

    Retort with loading window
    6.
    发明授权

    公开(公告)号:US11971216B1

    公开(公告)日:2024-04-30

    申请号:US17561152

    申请日:2021-12-23

    IPC分类号: F27B5/02 F27B5/12 F27D5/00

    CPC分类号: F27B5/02 F27B5/12 F27D5/0006

    摘要: In some examples, a multilevel retort assembly. The assembly includes a base defining a base perimeter; and a plurality of shells. Each shell has a diffuser plate support and a perimeter with a substantially similar shape as the base perimeter. The plurality of shells are stacked on each other, mechanically supported by the base, and surround an inner retort volume. The at least one shell of the plurality of shells defines a removable window. The assembly also includes a plurality of diffuser plates, each diffuser plate supported by a corresponding diffuser plate support of the plurality of diffuser plate supports.

    APPARATUS FOR HEAT TREATING METALS AND HEAT TREATMENT METHOD

    公开(公告)号:US20100059507A1

    公开(公告)日:2010-03-11

    申请号:US12417797

    申请日:2009-04-03

    申请人: Ga-Lane Chen

    发明人: Ga-Lane Chen

    IPC分类号: H05B6/04 F27D11/00

    摘要: An apparatus for heat treating metals includes a container configured for receiving a metal therein for heat treatment, a first power supply configured for generating a first electric field and applying a first voltage U1 represented by a following formula: U 1 = { u 1  cos  ( 2   π   f   t )  ( ( 2  n + 1 / 2 )  π ≤ 2  π   f   t ≤ ( 2  n + 3 / 2 )  π ) - u 2  ( 2   n   π

    Slotted cantilever diffusion tube system and method and apparatus for
loading
    10.
    发明授权
    Slotted cantilever diffusion tube system and method and apparatus for loading 失效
    开槽悬臂扩散管系统及装载方法及装置

    公开(公告)号:US4543059A

    公开(公告)日:1985-09-24

    申请号:US631929

    申请日:1984-07-18

    摘要: A cantilever tube for carrying loaded wafer boats into a diffusion furnace and confining flow of gas through the wafers includes an elongated slot extending from an open end of the tube to a predetermined region in which the wafer boats are positioned, the wafer boats abutting each other and forming a sealing cover for the elongated slot. A narrow boat carrier supported on a carriage system extends through the elongated slot and carries a wafer boat loaded with wafers into the open end and to the predetermined region in the cantilever tube without allowing either the carrier, or the wafer boat, or the wafers to touch the cantilever tube. The carrier lowers the boat onto the bottom inner surface of the tube, causing the boat to cover a portion of the elongated slot. The procedure is repeated for subsequent wafer boats, each of which abuts the previous one, to effectively close and seal the elongated slot when all of the wafer boats are positioned inside the cantilever tube.

    摘要翻译: 用于将加载的晶片舟携带到扩散炉中并且限制气体流过晶片的悬臂管包括从管的开口端延伸到晶片舟定位的预定区域的细长槽,晶片舟彼此邻接 并形成用于细长槽的密封盖。 支撑在托架系统上的窄船架延伸穿过细长槽并将装载有晶片的晶片舟携带在开放端和悬臂管中的预定区域,而不允许载体或晶片舟或晶片 触摸悬臂管。 载体将船降低到管的底部内表面上,导致船覆盖细长槽的一部分。 当所有的晶片舟都位于悬臂管内时,对于后续的晶片舟重复该过程,每个晶片舟都与前一个相邻,以便有效地关闭和密封细槽。