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33 条记录 (耗时 0.02 秒)

    Surface inspection apparatus and method
    1.
    发明授权
    Surface inspection apparatus and method 失效
    表面检查装置及方法

    公开(公告)号：US06313913B1

    公开(公告)日：2001-11-06

    申请号：US09447691

    申请日：1999-11-23

    申请人： Yumi Nakagawa ,  Koichiro Komatsu

    发明人： Yumi Nakagawa ,  Koichiro Komatsu

    IPC分类号： G01N2100

    CPC分类号： G01N21/94 ,  G01N2021/9513 ,  G01N2021/95676

    摘要： A surface inspection apparatus is provided which uses at least two sets of surface inspection systems each comprising with a paired surface illumination device (A1, B1) and detection device (A2, B2), with each set of illumination devices and detection devices creating their own irradiation regions (51A, 51B) and detection regions (23A,23B), in which the irradiation and detection regions of one pair of illumination and detection devices does not over lap the illumination and detection regions of the adjacent pair of illumination and detection devices. The surface illumination devices preferably project light at an angle of 80° or more with respect to a normal to the surface being inspected (21). The detection devices detect light scattered by dust or defects on the surface to be inspected. The surface to be inspected can be moved in a direction perpendicular to the direction of the illumination and detection regions on the surface being inspected. Thus, the entire surface can be inspected. The inspection device and method can also be adapted for use in a liquid crystal display manufacturing operation.

    摘要翻译： 提供一种表面检查装置，其使用至少两组表面检查系统，每个表面检查系统包括成对的照明装置（A1，B1）和检测装置（A2，B2），每组照明装置和检测装置产生自己的 照射区域（51A，51B）和检测区域（23A，23B），其中一对照明和检测装置的照射和检测区域没有超过相邻照明和检测装置对的照明和检测区域。 表面照明装置优选相对于被检查表面的法线（21）以80°或更大的角度投射光。 检测装置检测被检查表面上的灰尘或缺陷散射的光。 待检查的表面可以在垂直于被检查表面上的照明方向和检测区域的方向上移动。 因此，可以检查整个表面。 检查装置和方法也可以适用于液晶显示器制造操作。

    Foreign substance inspecting apparatus and method thereof
    9.
    发明授权
    Foreign substance inspecting apparatus and method thereof 失效
    异物检查装置及其方法

    公开(公告)号：US5856868A

    公开(公告)日：1999-01-05

    申请号：US889558

    申请日：1997-07-08

    申请人： Kinya Kato ,  Yumi Nakagawa

    发明人： Kinya Kato ,  Yumi Nakagawa

    IPC分类号： G01N21/94 ,  G01N21/88

    CPC分类号： G01N21/94

    摘要： A foreign substance inspecting apparatus and method for detecting a foreign substance on a surface, includes a light source for providing light; a plurality of condensing optical systems for collecting the light from the light source and for forming a plurality of light spots on the surface; a scanning system for scanning the surface using the light spots formed by the condensing optical systems; a detecting optical system for detecting light scattered from at least one of the light spots by the foreign substance on the surface; and a surface shape measuring system for measuring a shape of the surface, wherein a focus of each one of the condensing optical systems is individually adjusted according to the surface shape measured by the surface shape measuring system.

    摘要翻译： 用于检测表面上的异物的异物检查装置和方法包括：用于提供光的光源; 多个聚光系统，用于收集来自光源的光并在表面上形成多个光斑; 使用由聚光光学系统形成的光斑扫描表面的扫描系统; 检测光学系统，用于检测由表面上的异物从至少一个光斑散射的光; 以及用于测量表面形状的表面形状测量系统，其中根据由表面形状测量系统测量的表面形状单独地调整每个聚光光学系统的焦点。