MEMS modeling system and method
    1.
    发明授权
    MEMS modeling system and method 有权
    MEMS建模系统及方法

    公开(公告)号:US08762925B2

    公开(公告)日:2014-06-24

    申请号:US13029942

    申请日:2011-02-17

    IPC分类号: G06F17/50

    摘要: A system and method for modeling microelectromechanical devices is disclosed. An embodiment includes separating the microelectromechanical design into separate regions and modeling the separate regions separately. Parametric parameters or parametric equations may be utilized in the separate models. The separate models may be integrated into a MEMS device model. The MEMS device model may be tested and calibrated, and then may be used to model new designs for microelectromechanical devices.

    摘要翻译: 公开了一种用于对微机电装置进行建模的系统和方法。 一个实施例包括将微机电设计分离成单独的区域并分别对分开的区域进行建模。 参数化参数或参数方程可用于分开的模型。 单独的模型可以集成到MEMS器件模型中。 可以对MEMS器件模型进行测试和校准,然后可以用于为微机电器件的新设计建模。

    MEMS Modeling System and Method
    2.
    发明申请
    MEMS Modeling System and Method 有权
    MEMS建模系统与方法

    公开(公告)号:US20120215497A1

    公开(公告)日:2012-08-23

    申请号:US13029942

    申请日:2011-02-17

    IPC分类号: G06F17/50 G06F17/10 G06G7/62

    摘要: A system and method for modeling microelectromechanical devices is disclosed. An embodiment includes separating the microelectromechanical design into separate regions and modeling the separate regions separately. Parametric parameters or parametric equations may be utilized in the separate models. The separate models may be integrated into a MEMS device model. The MEMS device model may be tested and calibrated, and then may be used to model new designs for microelectromechanical devices.

    摘要翻译: 公开了一种用于对微机电装置进行建模的系统和方法。 一个实施例包括将微机电设计分离成单独的区域并分别对分开的区域进行建模。 参数化参数或参数方程可用于分开的模型。 单独的模型可以集成到MEMS器件模型中。 可以对MEMS器件模型进行测试和校准,然后可以用于为微机电器件的新设计建模。

    Thermal Sensor with Second-Order Temperature Curvature Correction
    4.
    发明申请
    Thermal Sensor with Second-Order Temperature Curvature Correction 有权
    具有二阶温度曲率校正的热传感器

    公开(公告)号:US20140092939A1

    公开(公告)日:2014-04-03

    申请号:US13632498

    申请日:2012-10-01

    IPC分类号: G01K7/01 H01L23/544

    CPC分类号: G01K7/01 G01K15/005

    摘要: Some embodiments of the present disclosure relate to a stacked integrated chip structure having a thermal sensor that detects a temperature of one or a plurality of integrated chips. In some embodiments, the stacked integrated chip structure has a main integrated chip and a secondary integrated chip located on an interposer wafer. The main integrated chip has a reference voltage source that generates a bias current. The secondary integrated chip has a second thermal diode that receives the bias current and based thereupon generates a second thermal sensed voltage and a second reference voltage that is proportional to a temperature of the secondary integrated chip. A digital thermal sensor within the main integrated chip determines a temperature of the secondary integrated chip based upon as comparison of the second thermal sensed voltage and the reference voltage.

    摘要翻译: 本公开的一些实施例涉及具有检测一个或多个集成芯片的温度的热传感器的堆叠集成芯片结构。 在一些实施例中,堆叠集成芯片结构具有位于插入器晶片上的主集成芯片和次集成芯片。 主集成芯片具有产生偏置电流的参考电压源。 次级集成芯片具有接收偏置电流的第二热二极管,并且基于此产生第二热感测电压和与次级集成芯片的温度成比例的第二参考电压。 基于与第二热感测电压和参考电压的比较,主集成芯片内的数字热传感器确定二次集成芯片的温度。

    Small area high performance cell-based thermal diode
    5.
    发明授权
    Small area high performance cell-based thermal diode 有权
    小面积高性能基于电池的热二极管

    公开(公告)号:US09383264B2

    公开(公告)日:2016-07-05

    申请号:US13428549

    申请日:2012-03-23

    IPC分类号: G01K7/00 G01K7/01

    CPC分类号: G01K7/01 Y10T307/76

    摘要: A thermal sensing system includes a circuit having a layout including standard cells arranged in rows and columns. First and second current sources provide first and second currents, respectively. The thermal sensing system includes thermal sensing units, first and second switching modules, and an analog to digital converter (ADC). Each thermal sensing unit is configured to provide a voltage drop dependent on a temperature at that thermal sensing unit. The first switching module is configured to select one of the thermal sensing units. The second switching module includes at least one switch controllable by a control signal. The at least one switch is configured to selectively couple the thermal sensing units, based on the control signal, to one of the first and second current sources, via the first switching module. The ADC is configured to convert an analog voltage, provided by the selected thermal sensing unit, to a digital value.

    摘要翻译: 热感测系统包括具有布置成行和列的标准单元的布局的电路。 第一和第二电流源分别提供第一和第二电流。 热感测系统包括热敏单元,第一和第二开关模块以及模数转换器(ADC)。 每个热敏单元被配置成提供取决于该热感测单元处的温度的电压降。 第一开关模块被配置为选择一个热感测单元。 第二开关模块包括可由控制信号控制的至少一个开关。 所述至少一个开关被配置为经由所述第一开关模块将所述热感测单元基于所述控制信号选择性地耦合到所述第一和第二电流源之一。 ADC配置为将所选热敏单元提供的模拟电压转换为数字值。

    Thermal sensor with second-order temperature curvature correction
    6.
    发明授权
    Thermal sensor with second-order temperature curvature correction 有权
    具有二阶温度曲率校正的热传感器

    公开(公告)号:US09016939B2

    公开(公告)日:2015-04-28

    申请号:US13632498

    申请日:2012-10-01

    IPC分类号: G01K7/00 G01K7/01

    CPC分类号: G01K7/01 G01K15/005

    摘要: Some embodiments of the present disclosure relate to a stacked integrated chip structure having a thermal sensor that detects a temperature of one or a plurality of integrated chips. In some embodiments, the stacked integrated chip structure has a main integrated chip and a secondary integrated chip located on an interposer wafer. The main integrated chip has a reference voltage source that generates a bias current. The secondary integrated chip has a second thermal diode that receives the bias current and based thereupon generates a second thermal sensed voltage and a second reference voltage that is proportional to a temperature of the secondary integrated chip. A digital thermal sensor within the main integrated chip determines a temperature of the secondary integrated chip based upon as comparison of the second thermal sensed voltage and the reference voltage.

    摘要翻译: 本公开的一些实施例涉及具有检测一个或多个集成芯片的温度的热传感器的堆叠集成芯片结构。 在一些实施例中,堆叠集成芯片结构具有位于插入器晶片上的主集成芯片和次集成芯片。 主集成芯片具有产生偏置电流的参考电压源。 次级集成芯片具有接收偏置电流的第二热二极管,并且基于此产生第二热感测电压和与次级集成芯片的温度成比例的第二参考电压。 基于与第二热感测电压和参考电压的比较,主集成芯片内的数字热传感器确定二次集成芯片的温度。

    Built-in self-test circuit for liquid crystal display source driver
    8.
    发明授权
    Built-in self-test circuit for liquid crystal display source driver 有权
    内置自检电路,用于液晶显示源驱动

    公开(公告)号:US08810268B2

    公开(公告)日:2014-08-19

    申请号:US12764346

    申请日:2010-04-21

    IPC分类号: G01R31/3187

    摘要: A built-in self-test (BIST) circuit for a liquid crystal display (LCD) source driver includes at least one digital-to-analog converter (DAC) and at least one buffer coupled to the respective DAC, wherein the buffer is reconfigurable as a comparator. A first input signal and a second input signal are coupled to the comparator. The first input signal is a predetermined reference voltage level. The second input signal is a test offset voltage in a test range.

    摘要翻译: 用于液晶显示器(LCD)源驱动器的内置自检(BIST)电路包括至少一个数模转换器(DAC)和耦合到相应DAC的至少一个缓冲器,其中缓冲器可重新配置 作为比较。 第一输入信号和第二输入信号耦合到比较器。 第一输入信号是预定的参考电压电平。 第二输入信号是测试范围内的测试偏移电压。

    Temperature stabilitized MEMS
    9.
    发明授权
    Temperature stabilitized MEMS 有权
    温度稳定的MEMS

    公开(公告)号:US08569808B1

    公开(公告)日:2013-10-29

    申请号:US13441134

    申请日:2012-04-06

    IPC分类号: H01L29/66

    摘要: A semiconductor device with temperature control system. Embodiments of the device may include a MEMS chip including a first heater with a dedicated first temperature control loop and a CMOS chip including a second heater with a dedicated second temperature control loop. Each control loop may have a dedicated temperature sensor for controlling the thermal output of each heater. The first heater and sensor are disposed proximate to a MEMS device in the MEMS chip for direct heating thereof. The temperature of the MEMS chip and CMOS chip are independently controllable of each other via the temperature control loops.

    摘要翻译: 具有温度控制系统的半导体器件。 该装置的实施例可以包括包括具有专用第一温度控制回路的第一加热器和包括具有专用第二温度控制回路的第二加热器的CMOS芯片的MEMS芯片。 每个控制回路可以具有用于控制每个加热器的热输出的专用温度传感器。 第一加热器和传感器靠近MEMS芯片中的MEMS器件设置,用于直接加热MEMS芯片。 MEMS芯片和CMOS芯片的温度可以通过温度控制回路彼此独立控制。

    MEMS vacuum level monitor in sealed package
    10.
    发明授权
    MEMS vacuum level monitor in sealed package 有权
    MEMS真空度监测仪在密封包装中

    公开(公告)号:US08887573B2

    公开(公告)日:2014-11-18

    申请号:US13401134

    申请日:2012-02-21

    IPC分类号: G01L11/00 G01L13/02

    摘要: A vacuum sensor for sensing vacuum in a sealed enclosure is provided. The sealed enclosure includes active MEMS devices desired to be maintained in vacuum conditions. The vacuum sensor includes a motion beam anchored to an internal surface in the sealed enclosure. A driving electrode is disposed beneath the motion beam and a bias is supplied to cause the motion beam to deflect through electromotive force. A sensing electrode is also provided and detects capacitance between the sensing electrode disposed on the internal surface, and the motion beam. Capacitance changes as the gap between the motion beam and the sensing electrode changes. The amount of deflection is determined by the vacuum level in the sealed enclosure. The vacuum level in the sealed enclosure is thereby sensed by the sensing electrode.

    摘要翻译: 提供了用于感测密封外壳中的真空的真空传感器。 密封的外壳包括希望保持在真空条件下的有源MEMS器件。 真空传感器包括锚定在密封外壳中的内表面的运动梁。 驱动电极设置在运动光束下方,并且提供偏压以使运动光束通过电动势偏转。 还提供感测电极并且检测设置在内表面上的感测电极与运动光束之间的电容。 电容随着运动光束与感应电极之间的间隙而变化。 偏转量由密封外壳中的真空度决定。 因此,密封外壳中的真空度由感测电极感测。