公开(公告)号：US20170233891A1

公开(公告)日：2017-08-17

申请号：US15519220

申请日：2015-10-15

Applicant: The University of Melbourne

Inventor： Afaq Habib Piracha ,  Steven Prawer ,  Kumaravelu Ganesan ,  Snjezana Tomljenovic-Hanic ,  Desmond Lau

IPC: C30B25/20 ,  B23K26/00 ,  C23C16/27 ,  C23C16/04 ,  C23C16/44 ,  B81C3/00 ,  C25F3/02 ,  C30B29/04 ,  C30B25/04 ,  C30B33/10 ,  C30B33/12 ,  B23K26/362 ,  C23C16/56

CPC classification number: C30B25/20 ,  B23K26/0006 ,  B23K26/362 ,  B23K2103/50 ,  B81C3/001 ,  B81C2201/0143 ,  B81C2201/0146 ,  B81C2201/0187 ,  B81C2201/0198 ,  C23C16/042 ,  C23C16/274 ,  C23C16/279 ,  C23C16/4408 ,  C23C16/56 ,  C25F3/02 ,  C30B25/04 ,  C30B25/18 ,  C30B29/04 ,  C30B33/10 ,  C30B33/12

Abstract: The present disclosure provides a method of fabricating a diamond membrane. The method comprises providing a substrate and a support structure. The substrate comprises a diamond material having a first surface and the substrate further comprises a sub-surface layer that is positioned below the first surface and has a crystallographic structure that is different to that of the diamond material. The sub-surface layer is positioned to divide the diamond material into first and second regions wherein the first region is positioned between the first surface and the sub-surface layer. The support structure also comprises a diamond material and is connected to, and covers a portion of, the first surface of the substrate. The method further comprises selectively removing the second region of the diamond material from the substrate by etching away at least a portion of the sub-surface layer of the substrate.

公开(公告)号：US10119201B2

公开(公告)日：2018-11-06

申请号：US15519220

申请日：2015-10-15

Applicant: The University of Melbourne

Inventor： Afaq Habib Piracha ,  Steven Prawer ,  Kumaravelu Ganesan ,  Snjezana Tomljenovic-Hanic ,  Desmond Lau

IPC: C03C15/00 ,  C03C25/68 ,  C03C25/00 ,  B23P15/00 ,  C23F1/00 ,  C30B25/20 ,  C30B25/04 ,  C30B29/04 ,  C30B25/18 ,  C23C16/04 ,  C23C16/27 ,  B23K26/00 ,  B23K26/362 ,  B81C3/00 ,  C23C16/44 ,  C23C16/56 ,  C25F3/02 ,  C30B33/10 ,  C30B33/12 ,  B23K103/00

Abstract: The present disclosure provides a method of fabricating a diamond membrane. The method comprises providing a substrate and a support structure. The substrate comprises a diamond material having a first surface and the substrate further comprises a sub-surface layer that is positioned below the first surface and has a crystallographic structure that is different to that of the diamond material. The sub-surface layer is positioned to divide the diamond material into first and second regions wherein the first region is positioned between the first surface and the sub-surface layer. The support structure also comprises a diamond material and is connected to, and covers a portion of, the first surface of the substrate. The method further comprises selectively removing the second region of the diamond material from the substrate by etching away at least a portion of the sub-surface layer of the substrate.