MICROFABRICATED ATOMIC CLOCKS AND MAGNETOMETERS UTILIZING SIDE RECESSES

    公开(公告)号:US20180259600A1

    公开(公告)日:2018-09-13

    申请号:US15457608

    申请日:2017-03-13

    CPC classification number: G04F5/14 H03L7/26

    Abstract: An integrated microfabricated sensor includes a sensor cell having a cell body, a first window attached to a first surface, and a second window attached to a second surface, opposite to the first window. The cell body laterally surrounds a cavity, so that the first window and the second window are exposed to the cavity. The sensor cell contains a sensor fluid material in the cavity. The cell body has recesses on opposing exterior sides of the cell body; each recess extends from the first surface to the second surface. Exterior portions of the cell body wall in the recesses are recessed from singulation surfaces on the cell body exterior. The cell body is formed by etching the cavity and the recesses concurrently through a body substrate. After the windows are attached, the sensor cell is singulated from the body substrate through the recesses.

    Multiple-cavity vapor cell structure for micro-fabricated atomic clocks, magnetometers, and other devices
    10.
    发明授权
    Multiple-cavity vapor cell structure for micro-fabricated atomic clocks, magnetometers, and other devices 有权
    用于微制造原子钟,磁力计和其他装置的多腔蒸汽池结构

    公开(公告)号:US09169974B2

    公开(公告)日:2015-10-27

    申请号:US13949018

    申请日:2013-07-23

    Abstract: An apparatus includes a vapor cell having multiple cavities fluidly connected by one or more channels. At least one of the cavities is configured to receive a first material able to dissociate into one or more gases that are contained within the vapor cell. At least one of the cavities is configured to receive a second material able to absorb at least a portion of the one or more gases. The vapor cell could include a first cavity configured to receive the first material and a second cavity fluidly connected to the first cavity by at least one first channel, where the second cavity is configured to receive the gas(es). The vapor cell could also include a third cavity fluidly connected to at least one of the first and second cavities by at least one second channel, where the third cavity is configured to receive the second material.

    Abstract translation: 一种装置包括具有通过一个或多个通道流体连接的多个腔的蒸汽池。 空腔中的至少一个被配置成接收能够解离成包含在蒸气室内的一种或多种气体的第一材料。 空腔中的至少一个构造成接收能够吸收一种或多种气体的至少一部分的第二材料。 蒸汽池可以包括被配置为接收第一材料的第一空腔和通过至少一个第一通道流体地连接到第一空腔的第二腔,其中第二腔配置成接收气体。 蒸气室还可以包括通过至少一个第二通道流体地连接到第一和第二空腔中的至少一个的第三空腔,其中第三腔被配置为容纳第二材料。

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