摘要:
A Photoresist composition comprising a polymer comprising a structural unit derived from a compound represented by the formula (I): wherein R1 represents a hydrogen atom or a methyl group, R2 represents a C6-C12 aromatic hydrocarbon group which can have one or more substituents, R3 represents a cyano group or a C1-C12 hydrocarbon group which can have one or more substituents and which can contain one or more heteroatoms, A1 represents a single bond, —(CH2)g—CO—O—* or —(CH2)h—O—CO—(CH2)i—CO—O—* wherein g, h and i each independently represent an integer of −1 to 6 and * represents a binding position to the nitrogen atom, a resin having an acid-labile group and being insoluble or poorly soluble in an aqueous alkali solution but becoming soluble in an aqueous alkali solution by the action of an acid, and an acid generator.
摘要:
An oxime compound represented by the formula (I): wherein Y represents an unsubstituted or substituted n-valent C6-C14 aromatic hydrocarbon group, n represents an integer of 1 to 6, R1 represents a C1-C30 aliphatic hydrocarbon group etc., R2 represents a linear or branched chain C1-C20 aliphatic hydrocarbon group etc., W represents —CO—O— etc., Q1 and Q2 each independently represent a fluorine atom etc., Z represents a C1-C20 halogenated aliphatic hydrocarbon group etc, and the resist composition containing the same.
摘要:
The present invention provides a chemically amplified positive composition comprising: (A) a resin comprising a structural unit having an acid-labile group and being itself insoluble or poorly soluble in an alkali aqueous solution but becoming soluble in an alkali aqueous solution by the action of an acid, (B) a resin comprising a structural unit represented by the formula (I): wherein R1 represents a hydrogen atom, a halogen atom, a C1-C4 alkyl group or a C1-C4 perfluoroalkyl group, Z represents a single bond or —(CH2)k—CO—X4—, k represents an integer of 1 to 4, X1, X2, X3 and X4 each independently represents an oxygen atom or a sulfur atom, m represents an integer of 1 to 3 and n represents an integer of 0 to 3, and a structural unit having a fluorine atom in a side chain, and an acid generator.
摘要:
The present invention relates to a reflector for a light-emitting device consisting of (A) an polyamide composition comprising a polyamide polymerized from (a) a dicarboxylic acid comprising at least 50 mol % of an alicyclic dicarboxylic acid and (b) a diamine comprising at least 50 mol % of a diamine with a branched main chain.
摘要:
A monitoring system for preventing crime in a home, includes a plurality of terminals for monitoring whether predetermined monitoring points are in a stationary or nonstationary state. Further, the monitoring system includes a central processing device for controlling the setting/canceling of alarm operations of the terminals. The central processing device has a communication unit that receives stationary/nonstationary information from the terminals and transmits predetermined information including commands to the terminals. Each terminal has a communication unit that transmits stationary/nonstationary information to the central processing device and receives the predetermined information from the central processing device. Thus bidirectional communication can be achieved between the central processing device and the terminals. The terminals may include a terminal with an emergency call unit which, in an emergency, calls or notifies another, and a terminal having a notification unit which indicates that a nonstationary state has been accepted by a predetermined point of contact.
摘要:
An ultrasonic transducer according to the present invention includes: a piezoelectric body 4 to set up ultrasonic vibrations; an acoustic matching layer 3 made of a material with a density of 50 kg/m3 to 1,000 kg/m3 and an acoustic impedance of 2.5×103 kg/m2/s to 1.0×106 kg/m2/s; a lower acoustic matching layer 9 provided between the piezoelectric body 4 and the acoustic matching layer 3; and a structure supporting member 6 that supports the lower acoustic matching layer 9 and the piezoelectric body 4 thereon and shields the piezoelectric body 4 from a fluid that propagates the ultrasonic vibrations. The ultrasonic transducer includes a protective portion, which contacts with at least a portion of a side surface of the acoustic matching layer 4. This protective portion is defined by a portion of the lower acoustic matching layer 9 and forms an integral part of the lower acoustic matching layer 9.
摘要翻译:根据本发明的超声波换能器包括:压电体4,用于设置超声波振动; 由密度为50kg / m 3至1,000kg / m 3的材料制成的声匹配层3和2.5×10 3的声阻抗, / SUP> kg / m 2 / s至1.0×10 6 kg / m 2 / s; 设置在压电体4和声匹配层3之间的下声匹配层9; 以及在其上支撑下声匹配层9和压电体4的结构支撑构件6,其将压电体4与传播超声波振动的流体进行屏蔽。 超声波换能器包括与声匹配层4的侧表面的至少一部分接触的保护部分。 该保护部分由下声匹配层9的一部分限定,并形成下声匹配层9的整体部分。
摘要:
The present invention provides a chemically amplified positive resist composition comprising (A) a resin which comprises (i) at least one structural unit selected from the group consisting of structural units of the formulas (no and (V), (ii) a structural unit of the formula (I) and (iii) a structural unit of the formula (II), and (B) an acid generator. The present invention also provides a haloester derivative of the formula (XXI) and a process for producing the same.
摘要:
The present invention provides a chemical amplification type positive resist composition comprising (A) a resin which comprises (i) 5 to 50% by mol of a structural unit of the formula (I), (ii) 5 to 50% by mol of a structural unit of the formula (II) and (iii) 5 to 59% by mol of at least one selected from the group consisting of structural units of the formulas (III) and (IV), and (B) an acid generator. The present composition is suitable for excimer laser lithography using ArF, KrF and the like, and shows various outstanding resist abilities, specifically, gives better effective sensitivity and resolution to resist patterns obtained therefrom, and gives particularly excellent pattern shape and excellent line edge roughness.
摘要:
A thin film formation apparatus includes a vacuum chamber, a target holding mount held movably in the vacuum chamber, a target containing a film material, an ArF excimer laser for emitting high energy radiation to a surface of the target, an optical system for concentrating the radiation from the excimer laser to the surface of the target, a substrate holding mount holding the substrate, an oxidizing gas inlet for supplying an oxidizing gas into the vacuum chamber for oxidizing a substance deposited on the substrate, a heater placed inside the substrate holding mount for heating the substrate in the vacuum chamber, and a light for irradiating the substrate held on the substrate holding mount with light rays.
摘要:
A movement pattern recognizing apparatus has a movement signal detection device including a sensor for detecting a mobile body in a detection region and for providing a movement signal indicating the position of the mobile body. The signal changes as time elapses. The apparatus further has a movement pattern storage device for storing data about previous movement patterns which were realized when a mobile body moved in the detection region, and a movement pattern selection device for selecting data about the movement pattern from the movement pattern storage device based upon the movement signal detected by the movement signal detection device.