Three-dimensional memory array with local line selector

    公开(公告)号:US12035534B2

    公开(公告)日:2024-07-09

    申请号:US18308031

    申请日:2023-04-27

    CPC classification number: H10B43/35 H01L23/5226 H10B41/27 H10B41/35 H10B43/27

    Abstract: The present disclosure relates to an integrated chip including a three-dimensional memory array. The three-dimensional memory array includes a first local line and a second local line that are elongated vertically, a first memory cell extending between the first local line and the second local line, and a second memory cell directly under the first memory cell, extending between the first local line and the second local line, and coupled in parallel with the first memory cell. The first memory cell is coupled to a first word line and the second memory cell is coupled to a second word line. The first word line and the second word line are elongated horizontally. A first global line is disposed at a first height and is elongated horizontally. A first selector extends vertically from the first local line to the first global line.

    HIGH SELECTIVITY ISOLATION STRUCTURE FOR IMPROVING EFFECTIVENESS OF 3D MEMORY FABRICATION

    公开(公告)号:US20230328996A1

    公开(公告)日:2023-10-12

    申请号:US18334590

    申请日:2023-06-14

    CPC classification number: H10B51/20 H10B51/30

    Abstract: In some embodiments, the present disclosure relates to a method for forming a memory device, including forming a plurality of word line stacks respectively including a plurality of word lines alternatingly stacked with a plurality of insulating layers over a semiconductor substrate, forming a data storage layer along opposing sidewalls of the word line stacks, forming a channel layer along opposing sidewalls of the data storage layer, forming an inner insulating layer between inner sidewalls of the channel layer and including a first dielectric material, performing an isolation cut process including a first etching process through the inner insulating layer and the channel layer to form an isolation opening, forming an isolation structure filling the isolation opening and including a second dielectric material, performing a second etching process through the inner insulating layer on opposing sides of the isolation structure to form source/drain openings, and forming source/drain contacts in the source/drain openings.

    THREE-DIMENSIONAL MEMORY ARRAY WITH LOCAL LINE SELECTOR

    公开(公告)号:US20230262985A1

    公开(公告)日:2023-08-17

    申请号:US18308031

    申请日:2023-04-27

    CPC classification number: H10B43/35 H01L23/5226 H10B41/27 H10B41/35 H10B43/27

    Abstract: The present disclosure relates to an integrated chip including a three-dimensional memory array. The three-dimensional memory array includes a first local line and a second local line that are elongated vertically, a first memory cell extending between the first local line and the second local line, and a second memory cell directly under the first memory cell, extending between the first local line and the second local line, and coupled in parallel with the first memory cell. The first memory cell is coupled to a first word line and the second memory cell is coupled to a second word line. The first word line and the second word line are elongated horizontally. A first global line is disposed at a first height and is elongated horizontally. A first selector extends vertically from the first local line to the first global line.

    Memory array and operation method thereof

    公开(公告)号:US12048164B2

    公开(公告)日:2024-07-23

    申请号:US18151483

    申请日:2023-01-09

    CPC classification number: H10B51/30 G11C11/223 G11C11/2275 H10B51/20

    Abstract: A memory array and an operation method of the memory array are provided. The memory array includes first and second ferroelectric memory devices formed along a gate electrode, a channel layer and a ferroelectric layer between the gate electrode and the channel layer. The ferroelectric memory devices include: a common source/drain electrode and two respective source/drain electrodes, separately in contact with a side of the channel layer opposite to the ferroelectric layer, wherein the common source/drain electrode is disposed between the respective source/drain electrodes; and first and second auxiliary gates, capacitively coupled to the channel layer, wherein the first auxiliary gate is located between the common source/drain electrode and one of the respective source/drain electrodes, and the second auxiliary gate is located between the common source/drain electrode and the other respective source/drain electrode.

    MEMORY ARRAY AND OPERATION METHOD THEREOF
    6.
    发明公开

    公开(公告)号:US20240090230A1

    公开(公告)日:2024-03-14

    申请号:US18151483

    申请日:2023-01-09

    CPC classification number: H10B51/30 G11C11/223 G11C11/2275 H10B51/20

    Abstract: A memory array and an operation method of the memory array are provided. The memory array includes first and second ferroelectric memory devices formed along a gate electrode, a channel layer and a ferroelectric layer between the gate electrode and the channel layer. The ferroelectric memory devices include: a common source/drain electrode and two respective source/drain electrodes, separately in contact with a side of the channel layer opposite to the ferroelectric layer, wherein the common source/drain electrode is disposed between the respective source/drain electrodes; and first and second auxiliary gates, capacitively coupled to the channel layer, wherein the first auxiliary gate is located between the common source/drain electrode and one of the respective source/drain electrodes, and the second auxiliary gate is located between the common source/drain electrode and the other respective source/drain electrode.

    PROGRAMMING AND READING CIRCUIT FOR DYNAMIC RANDOM ACCESS MEMORY

    公开(公告)号:US20250069648A1

    公开(公告)日:2025-02-27

    申请号:US18947545

    申请日:2024-11-14

    Abstract: Disclosed herein are related to a memory device. In one aspect, the memory device includes a memory array including a set of memory cells. In one aspect, each of the set of memory cells includes a corresponding transistor and a corresponding capacitor connected in series between a bit line and a select line. In one aspect, the memory device includes a first transistor including a source/drain electrode coupled to a controller and another source/drain electrode coupled to the bit line. In one aspect, the memory device includes a second transistor including a gate electrode coupled to the bit line. In one aspect, the second transistor is configured to conduct current corresponding to data stored by a memory cell of the set of memory cells.

    PROGRAMMING AND READING CIRCUIT FOR DYNAMIC RANDOM ACCESS MEMORY

    公开(公告)号:US20240038294A1

    公开(公告)日:2024-02-01

    申请号:US17878200

    申请日:2022-08-01

    CPC classification number: G11C11/4096

    Abstract: Disclosed herein are related to a memory device. In one aspect, the memory device includes a memory array including a set of memory cells. In one aspect, each of the set of memory cells includes a corresponding transistor and a corresponding capacitor connected in series between a bit line and a select line. In one aspect, the memory device includes a first transistor including a source/drain electrode coupled to a controller and another source/drain electrode coupled to the bit line. In one aspect, the memory device includes a second transistor including a gate electrode coupled to the bit line. In one aspect, the second transistor is configured to conduct current corresponding to data stored by a memory cell of the set of memory cells.

    Programming and reading circuit for dynamic random access memory

    公开(公告)号:US12176022B2

    公开(公告)日:2024-12-24

    申请号:US17878200

    申请日:2022-08-01

    Abstract: Disclosed herein are related to a memory device. In one aspect, the memory device includes a memory array including a set of memory cells. In one aspect, each of the set of memory cells includes a corresponding transistor and a corresponding capacitor connected in series between a bit line and a select line. In one aspect, the memory device includes a first transistor including a source/drain electrode coupled to a controller and another source/drain electrode coupled to the bit line. In one aspect, the memory device includes a second transistor including a gate electrode coupled to the bit line. In one aspect, the second transistor is configured to conduct current corresponding to data stored by a memory cell of the set of memory cells.

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