公开(公告)号：US11705358B2

公开(公告)日：2023-07-18

申请号：US16588182

申请日：2019-09-30

申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

发明人： Tsung-Sheng Kuo ,  Yi-Fam Shiu ,  Eason Chen ,  Yang-Ann Chu ,  Jiun-Rong Pai

IPC分类号： H01L21/67 ,  H01L21/687 ,  H01L21/677 ,  H01L23/433 ,  H01L21/60

CPC分类号： H01L21/68707 ,  H01L21/6773 ,  H01L21/67294 ,  H01L21/67706 ,  H01L23/433 ,  H01L2021/60105

摘要： In an embodiment, a system includes: a tool port of a semiconductor processing tool; a processing port with an internal processing port location and an external processing port location; a robot configured to move a die vessel between the internal processing port location and the tool port; and an actuator configured to move the die vessel between the internal processing port location and the external processing port location.

公开(公告)号：US11459190B2

公开(公告)日：2022-10-04

申请号：US17087216

申请日：2020-11-02

申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

发明人： Tsung-Sheng Kuo ,  Chih-Hung Huang ,  Yi-Fam Shiu ,  Chueng-Jen Wang ,  Hsuan Lee ,  Jiun-Rong Pai

IPC分类号： B65G47/86 ,  B65G15/28

摘要： In certain embodiments, a system includes: a source lane configured to move a first die container between a load port and a source lane staging area; an inspection sensor configured to produce a sensor result based on a die on the first die container; a pass target lane configured to move a second die container between a pass target lane out port and a pass target lane staging area; a fail target lane configured to move a third die container between a fail target lane out port and a fail target lane staging area; and a conveyor configured to move the die from the first die container at the source lane staging area to either the second die container at the pass target lane staging area or the fail target lane staging area based on the sensor result.

公开(公告)号：US10822181B2

公开(公告)日：2020-11-03

申请号：US16598109

申请日：2019-10-10

申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

发明人： Tsung-Sheng Kuo ,  Chih-Hung Huang ,  Yi-Fam Shiu ,  Chueng-Jen Wang ,  Hsuan Lee ,  Jiun-Rong Pai

IPC分类号： B65G47/86 ,  B65G15/28

摘要： In certain embodiments, a system includes: a source lane configured to move a first die container between a load port and a source lane staging area; an inspection sensor configured to produce a sensor result based on a die on the first die container; a pass target lane configured to move a second die container between a pass target lane out port and a pass target lane staging area; a fail target lane configured to move a third die container between a fail target lane out port and a fail target lane staging area; and a conveyor configured to move the die from the first die container at the source lane staging area to either the second die container at the pass target lane staging area or the fail target lane staging area based on the sensor result.

公开(公告)号：US11820607B2

公开(公告)日：2023-11-21

申请号：US17884065

申请日：2022-08-09

申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

发明人： Tsung-Sheng Kuo ,  Chih-Hung Huang ,  Yi-Fam Shiu ,  Chueng-Jen Wang ,  Hsuan Lee ,  Jiun-Rong Pai

IPC分类号： B65G47/36 ,  B65G15/28 ,  H01L21/67 ,  H01L21/677 ,  H01L21/683 ,  H01L21/66 ,  B65G47/86

CPC分类号： B65G47/842 ,  B65G15/28 ,  H01L21/67271 ,  H01L21/67294 ,  H01L21/67706 ,  H01L21/67736 ,  H01L21/6838 ,  H01L22/34

摘要： In certain embodiments, a system includes: a source lane configured to move a first die container between a load port and a source lane staging area; an inspection sensor configured to produce a sensor result based on a die on the first die container; a pass target lane configured to move a second die container between a pass target lane out port and a pass target lane staging area; a fail target lane configured to move a third die container between a fail target lane out port and a fail target lane staging area; and a conveyor configured to move the die from the first die container at the source lane staging area to either the second die container at the pass target lane staging area or the fail target lane staging area based on the sensor result.

公开(公告)号：US20200156884A1

公开(公告)日：2020-05-21

申请号：US16598109

申请日：2019-10-10

申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

发明人： Tsung-Sheng Kuo ,  Chih-Hung Huang ,  Yi-Fam Shiu ,  Chueng-Jen Wang ,  Hsuan Lee ,  Jiun-Rong Pai

IPC分类号： B65G47/86 ,  B65G15/28

摘要： In certain embodiments, a system includes: a source lane configured to move a first die container between a load port and a source lane staging area; an inspection sensor configured to produce a sensor result based on a die on the first die container; a pass target lane configured to move a second die container between a pass target lane out port and a pass target lane staging area; a fail target lane configured to move a third die container between a fail target lane out port and a fail target lane staging area; and a conveyor configured to move the die from the first die container at the source lane staging area to either the second die container at the pass target lane staging area or the fail target lane staging area based on the sensor result.