Data processing of electron beam lithography system

    公开(公告)号:US10049851B2

    公开(公告)日:2018-08-14

    申请号:US15143246

    申请日:2016-04-29

    IPC分类号: H01J37/317 H01J37/00

    摘要: A system includes a digital pattern generator (DPG) having a plurality of pixels that are dynamically and individually controllable; a switching device that is coupled to the DPG, the switching device configured to route a packet to the DPG so as to control at least one of the pixels, the switching device further comprising: a plurality of input buffers configured to receive and store the packet through a transmission line; a plurality of output buffers; a plurality of memory devices, wherein each of the plurality of memory devices is associated with one of the plurality of output buffers; and a scheduling engine that is coupled to the plurality of input buffers, the plurality of output buffers, and the plurality of memory devices and is configured to determine a routing path for the packet stored in one of the input buffers based on an availability of the output buffers and a vacancy level the memory devices.

    Data processing of electron beam lithography system

    公开(公告)号:US10804066B2

    公开(公告)日:2020-10-13

    申请号:US16601417

    申请日:2019-10-14

    摘要: A method for routing data for an e-beam writer includes, with a switching device of the e-beam writer, receiving a packet. The method further includes, with a scheduling engine of the switching device, routing the packet to one of a plurality of output buffers, wherein the routing is based on availabilities of the plurality of output buffers and vacancy levels of memory devices associated with the plurality of output buffers. The method further includes, with the switching device, outputting the packet from an output port associated with a memory device to which the packet is routed.

    DATA PROCESSING OF ELECTRON BEAM LITHOGRAPHY SYSTEM

    公开(公告)号:US20190139733A1

    公开(公告)日:2019-05-09

    申请号:US16103616

    申请日:2018-08-14

    IPC分类号: H01J37/00 H01J37/317

    摘要: A method includes receiving, by an input buffer of a switching device, a packet, determining, by a scheduling engine of the switching device, a destination output buffer for the packet, receiving, by the scheduling engine of the switching device, an availability of the destination output buffer and a vacancy level of a memory device that is associated with the destination output buffer, and based on the availability of the destination output buffer and the vacancy level of the memory device, determining, by the scheduling engine of the switching device, a routing destination of the packet. The routing destination includes the input buffer, the destination output buffer, and the memory device.

    Phase-locked loop monitor circuit

    公开(公告)号:US11411571B2

    公开(公告)日:2022-08-09

    申请号:US17330818

    申请日:2021-05-26

    摘要: A clock distribution circuit configured to output a clock signal includes a first circuit configured to use a reference clock signal to provide first and second reference signals, wherein the second reference signal indicates whether the first reference signal is locked with the reference clock signal; a second circuit configured to use the reference clock signal to provide an output signal and an indication signal indicative whether the output signal is locked with the reference clock signal; and a monitor circuit, coupled to the first and second circuits, and configured to use at least one of the first reference signal, the second reference signal, the output signal, and the indication signal to determine whether the second circuit is functioning correctly.

    Phase-locked loop monitor circuit

    公开(公告)号:US10256828B2

    公开(公告)日:2019-04-09

    申请号:US15711201

    申请日:2017-09-21

    摘要: A clock distribution circuit configured to output a clock signal includes a first circuit configured to use a reference clock signal to provide first and second reference signals, wherein the second reference signal indicates whether the first reference signal is locked with the reference clock signal; a second circuit configured to use the reference clock signal to provide an output signal and an indication signal indicative whether the output signal is locked with the reference clock signal; and a monitor circuit, coupled to the first and second circuits, and configured to use at least one of the first reference signal, the second reference signal, the output signal, and the indication signal to determine whether the second circuit is functioning correctly.

    Phase-locked loop monitor circuit

    公开(公告)号:US10680627B2

    公开(公告)日:2020-06-09

    申请号:US16372706

    申请日:2019-04-02

    摘要: A clock distribution circuit configured to output a clock signal includes a first circuit configured to use a reference clock signal to provide first and second reference signals, wherein the second reference signal indicates whether the first reference signal is locked with the reference clock signal; a second circuit configured to use the reference clock signal to provide an output signal and an indication signal indicative whether the output signal is locked with the reference clock signal; and a monitor circuit, coupled to the first and second circuits, and configured to use at least one of the first reference signal, the second reference signal, the output signal, and the indication signal to determine whether the second circuit is functioning correctly.

    Data Processing of Electron Beam Lithography System

    公开(公告)号:US20200043692A1

    公开(公告)日:2020-02-06

    申请号:US16601417

    申请日:2019-10-14

    IPC分类号: H01J37/00 H01J37/317

    摘要: A method for routing data for an e-beam writer includes, with a switching device of the e-beam writer, receiving a packet. The method further includes, with a scheduling engine of the switching device, routing the packet to one of a plurality of output buffers, wherein the routing is based on availabilities of the plurality of output buffers and vacancy levels of memory devices associated with the plurality of output buffers. The method further includes, with the switching device, outputting the packet from an output port associated with a memory device to which the packet is routed.

    Phase-locked loop monitor circuit

    公开(公告)号:US11025261B2

    公开(公告)日:2021-06-01

    申请号:US16894607

    申请日:2020-06-05

    摘要: A clock distribution circuit configured to output a clock signal includes a first circuit configured to use a reference clock signal to provide first and second reference signals, wherein the second reference signal indicates whether the first reference signal is locked with the reference clock signal; a second circuit configured to use the reference clock signal to provide an output signal and an indication signal indicative whether the output signal is locked with the reference clock signal; and a monitor circuit, coupled to the first and second circuits, and configured to use at least one of the first reference signal, the second reference signal, the output signal, and the indication signal to determine whether the second circuit is functioning correctly.

    Data processing of electron beam lithography system

    公开(公告)号:US10446358B2

    公开(公告)日:2019-10-15

    申请号:US16103616

    申请日:2018-08-14

    IPC分类号: H01J37/00 H01J37/317

    摘要: A method includes receiving, by an input buffer of a switching device, a packet, determining, by a scheduling engine of the switching device, a destination output buffer for the packet, receiving, by the scheduling engine of the switching device, an availability of the destination output buffer and a vacancy level of a memory device that is associated with the destination output buffer, and based on the availability of the destination output buffer and the vacancy level of the memory device, determining, by the scheduling engine of the switching device, a routing destination of the packet. The routing destination includes the input buffer, the destination output buffer, and the memory device.

    PHASE-LOCKED LOOP MONITOR CIRCUIT
    10.
    发明申请

    公开(公告)号:US20190229737A1

    公开(公告)日:2019-07-25

    申请号:US16372706

    申请日:2019-04-02

    IPC分类号: H03L7/23 H03L7/095 H03L7/091

    摘要: A clock distribution circuit configured to output a clock signal includes a first circuit configured to use a reference clock signal to provide first and second reference signals, wherein the second reference signal indicates whether the first reference signal is locked with the reference clock signal; a second circuit configured to use the reference clock signal to provide an output signal and an indication signal indicative whether the output signal is locked with the reference clock signal; and a monitor circuit, coupled to the first and second circuits, and configured to use at least one of the first reference signal, the second reference signal, the output signal, and the indication signal to determine whether the second circuit is functioning correctly.