Formation of Stacked Lateral Semiconductor Devices and the Resulting Structures

    公开(公告)号:US20210233767A1

    公开(公告)日:2021-07-29

    申请号:US17229655

    申请日:2021-04-13

    Applicant: TC Lab, Inc.

    Inventor: Harry Luan

    Abstract: A method of making stacked lateral semiconductor devices is disclosed. The method includes depositing a stack of alternating layers of different materials. Slots or holes are cut through the layers for subsequent formation of single crystal semiconductor fences or pillars. When each of the alternating layers of one material are removed space is provided for formation of single crystal semiconductor devices between the remaining layers. The devices are doped as the single crystal silicon is formed.

    Multi-Layer Horizontal Thyristor Random Access Memory and Peripheral Circuitry

    公开(公告)号:US20210217753A1

    公开(公告)日:2021-07-15

    申请号:US17218020

    申请日:2021-03-30

    Applicant: TC Lab, Inc.

    Inventor: Harry Luan

    Abstract: A semiconductor structure for a DRAM is described having multiple layers of arrays of thyristor memory cells and associated peripheral circuitry. Memory cells in a vertical string extending through the layers have an electrical connection to one terminal of the memory cells in that string. Word lines couple the strings together. Each layer of the array also includes bit line connections to memory cells on that layer. Methods of fabricating the array are described.

    Multi-Layer Random Access Memory and Methods of Manufacture

    公开(公告)号:US20200381434A1

    公开(公告)日:2020-12-03

    申请号:US16996838

    申请日:2020-08-18

    Applicant: TC Lab, Inc.

    Inventor: Harry Luan

    Abstract: A semiconductor structure for a DRAM is described having multiple layers of arrays of memory cells. Memory cells in a vertical string extending through the layers have an electrical connection to one terminal of the memory cells in that string. Word lines couple the strings together. Each layer of the array also includes bit line connections to memory cells on that layer. Select transistors enable the use of folded bit lines. The memory cells preferably are thyristors. Methods of fabricating the array are described.

    Formation of stacked lateral semiconductor devices and the resulting structures

    公开(公告)号:US12176209B2

    公开(公告)日:2024-12-24

    申请号:US17229655

    申请日:2021-04-13

    Applicant: TC Lab, Inc.

    Inventor: Harry Luan

    Abstract: A method of making stacked lateral semiconductor devices is disclosed. The method includes depositing a stack of alternating layers of different materials. Slots or holes are cut through the layers for subsequent formation of single crystal semiconductor fences or pillars. When each of the alternating layers of one material are removed space is provided for formation of single crystal semiconductor devices between the remaining layers. The devices are doped as the single crystal silicon is formed.

    Multi-layer thyristor random access memory with silicon-germanium bases

    公开(公告)号:US10978456B2

    公开(公告)日:2021-04-13

    申请号:US16914181

    申请日:2020-06-26

    Applicant: TC Lab, Inc.

    Inventor: Harry Luan

    Abstract: A semiconductor structure for a DRAM is described having multiple layers of arrays of thyristor memory cells with silicon-germanium base regions. Memory cells in a vertical string extending through the layers have an electrical connection to one terminal of the memory cells in that string. Word lines couple the strings together. Each layer of the array also includes bit line connections to memory cells on that layer. Select transistors enable the use of folded bit lines. Methods of fabricating the array are described.

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