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1.发明公开公开(公告)号：US20230270013A1
公开(公告)日：2023-08-24
申请号：US18012920
申请日：2021-03-16
IPC分类号： H10N30/853 , H10N30/00 , H10N30/076 , H10N30/079 , C01G9/03 , C01G33/00 , C23C14/08 , C23C14/16 , C23C14/35 , C23C14/02
CPC分类号： H10N30/8542 , H10N30/10516 , H10N30/076 , H10N30/079 , C01G9/03 , C01G33/006 , C23C14/086 , C23C14/165 , C23C14/35 , C23C14/025 , C23C14/083 , C01P2002/34 , C01P2002/50 , C01P2006/40
摘要： There is provided a piezoelectric stack, including: a substrate; an oxide film on the substrate, containing zinc and oxygen as main elements; an electrode film on the oxide film; and a piezoelectric film on the electrode film, being an alkali niobium oxide film containing potassium, sodium, niobium, and oxygen and having a perovskite structure.
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公开(公告)号：US20210359195A1
公开(公告)日：2021-11-18
申请号：US17387523
申请日：2021-07-28
IPC分类号： H01L41/18 , C23C14/08 , H01L41/08 , H01L41/187 , C01G33/00 , B41J2/14 , H01L41/318 , H03H9/02
摘要： There is provided a laminated substrate with a piezoelectric thin film, comprising: a substrate; an electrode film formed on the substrate; and a piezoelectric thin film formed on the electrode film, wherein the piezoelectric thin film is made of an alkali niobium oxide represented by a composition formula of (K1-xNax)NbO3 (0
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3.发明申请公开(公告)号：US20210036214A1
公开(公告)日：2021-02-04
申请号：US16942815
申请日：2020-07-30
IPC分类号： H01L41/187 , H01L41/332 , H01L41/27 , H01L41/08 , H01L41/314
摘要： There is provided a piezoelectric stack, including: a substrate; an electrode film; and a piezoelectric film which is comprised of alkali niobium oxide of a perovskite structure represented by a composition formula of (K1-xNax)NbO3 (0
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公开(公告)号：US20200161533A1
公开(公告)日：2020-05-21
申请号：US16628524
申请日：2018-06-22
IPC分类号： H01L41/187 , H01L41/08 , H01L41/27
摘要： There is provided a laminated substrate having a piezoelectric film, including: a substrate; and a piezoelectric film provided on the substrate interposing a base film, wherein the piezoelectric film has an alkali niobium oxide based perovskite structure represented by a composition formula of (K1-xNax)NbO3 (0
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公开(公告)号：US20190115525A1
公开(公告)日：2019-04-18
申请号：US16217455
申请日：2018-12-12
发明人： Fumimasa HORIKIRI , Kenji SHIBATA , Kazutoshi WATANABE , Kazufumi SUENAGA , Masaki NOGUCHI , Kenji KUROIWA
IPC分类号： H01L41/316 , H01L41/187 , H01L41/332 , H01L21/308 , H01L41/113 , C23C14/08 , C23C14/34
摘要： This method for manufacturing a lead-free niobate-system ferroelectric thin film device includes: a lower electrode film formation step of forming a lower electrode film on a substrate; a ferroelectric thin film formation step of forming a niobate-system ferroelectric thin film on the lower electrode film; an etch mask pattern formation step of forming an etch mask in a desired pattern on the niobate-system ferroelectric thin film; and a ferroelectric thin film etching step of shaping the niobate-system ferroelectric thin film into a desired fine pattern by wet etching using an etchant comprising: a predetermined chelating agent including at least one selected from EDTMP, NTMP, CyDTA, HEDP, GBMP, DTPMP, and citric acid; an aqueous alkaline solution containing an aqueous ammonia solution; and an aqueous hydrogen peroxide solution.
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公开(公告)号：US20240183024A1
公开(公告)日：2024-06-06
申请号：US18287635
申请日：2022-03-03
IPC分类号： C23C14/34 , C01G33/00 , C23C14/08 , H10N30/076 , H10N30/853
CPC分类号： C23C14/3414 , C01G33/006 , C23C14/088 , H10N30/076 , H10N30/8542 , C01P2002/34 , C01P2002/52 , C01P2006/40
摘要： There is provided a piezoelectric stack including: a substrate having a main surface with a diameter of 3 inches or more; and a piezoelectric film on the substrate, comprising a perovskite-type alkali niobium oxide containing potassium, sodium, niobium, and oxygen, wherein, a half-value width of an X-ray rocking curve of (001) is within a range of 0.5° or more and 2.5° or less over an entire area of an inside of a main surface of the piezoelectric film excluding its periphery when performing X-ray diffraction measurement on the piezoelectric film.
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7.发明公开公开(公告)号：US20230276711A2
公开(公告)日：2023-08-31
申请号：US17917055
申请日：2021-02-24
CPC分类号： B06B1/0622 , B06B1/0261
摘要： There is provided a piezoelectric stack, including: a substrate; an output-side bottom electrode film on the substrate; an output-side piezoelectric film, being an oxide film, on the output-side bottom electrode film; an output-side top electrode film on the output-side piezoelectric film; an input-side bottom electrode film on the substrate; an input-side piezoelectric film, being a nitride film, on the input-side bottom electrode film; an input-side top electrode film on the input-side piezoelectric film; and an ultrasonic output part and ultrasonic input part placed in such a manner as not overlapping each other when viewed from a top surface of the substrate, the ultrasonic output part comprising a stacked part of the output-side bottom electrode film, the output-side piezoelectric film, and the output-side top electrode film, the ultrasonic input part comprising a stacked part of the input-side bottom electrode film, the input-side piezoelectric film, and the input-side top electrode film.
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8.发明申请公开(公告)号：US20210005805A1
公开(公告)日：2021-01-07
申请号：US16919219
申请日：2020-07-02
IPC分类号： H01L41/187 , H01L41/314 , H01L41/08
摘要： There is provided a piezoelectric laminate, including: a substrate; a base layer formed on the substrate; and a piezoelectric film containing alkali niobium oxide and having a perovskite structure, which is formed on the base layer, as a polycrystalline film, and represented by a composition formula of (K1-xNax)NbO3 (0
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9.发明申请公开(公告)号：US20230135208A1
公开(公告)日：2023-05-04
申请号：US17299951
申请日：2019-11-14
IPC分类号： H10N30/853 , H10N30/076 , C01G33/00
摘要： A piezoelectric stack, including: a substrate; an electrode film; and a piezoelectric film comprising an alkali niobium oxide of a perovskite structure represented by a composition formula of (K1-xNax)NbO3 (0
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10.发明申请公开(公告)号：US20210036213A1
公开(公告)日：2021-02-04
申请号：US16942813
申请日：2020-07-30
IPC分类号： H01L41/187 , H01L41/27 , H01L41/08 , H01L41/314
摘要： There is provided a piezoelectric stack, including: a substrate; an electrode film; and a piezoelectric film which is comprised of alkali niobium oxide of a perovskite structure represented by a composition formula of (K1-xNax)NbO3 (0
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