- 专利标题: PIEZOELECTRIC LAMINATE, PRODUCTION METHOD FOR PIEZOELECTRIC LAMINATE, AND PIEZOELECTRIC ELEMENT
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申请号: US17917055申请日: 2021-02-24
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公开(公告)号: US20230276711A2公开(公告)日: 2023-08-31
- 发明人: Toshiaki KURODA , Kenji SHIBATA , Kazutoshi WATANABE , Takeshi KIMURA
- 申请人: SUMITOMO CHEMICAL COMPANY, LIMITED
- 申请人地址: JP Tokyo
- 专利权人: SUMITOMO CHEMICAL COMPANY, LIMITED
- 当前专利权人: SUMITOMO CHEMICAL COMPANY, LIMITED
- 当前专利权人地址: JP Tokyo
- 优先权: JP 20068252 2020.04.06
- 国际申请: PCT/JP2021/006769 2021.02.24
- 进入国家日期: 2022-10-05
- 主分类号: B06B1/06
- IPC分类号: B06B1/06 ; B06B1/02
摘要:
There is provided a piezoelectric stack, including: a substrate; an output-side bottom electrode film on the substrate; an output-side piezoelectric film, being an oxide film, on the output-side bottom electrode film; an output-side top electrode film on the output-side piezoelectric film; an input-side bottom electrode film on the substrate; an input-side piezoelectric film, being a nitride film, on the input-side bottom electrode film; an input-side top electrode film on the input-side piezoelectric film; and an ultrasonic output part and ultrasonic input part placed in such a manner as not overlapping each other when viewed from a top surface of the substrate, the ultrasonic output part comprising a stacked part of the output-side bottom electrode film, the output-side piezoelectric film, and the output-side top electrode film, the ultrasonic input part comprising a stacked part of the input-side bottom electrode film, the input-side piezoelectric film, and the input-side top electrode film.
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