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    Pressure sensors and methods of making the same
    1.
    发明申请
    Pressure sensors and methods of making the same 失效
    压力传感器及其制作方法

    公开(公告)号：US20070052046A1

    公开(公告)日：2007-03-08

    申请号：US11210309

    申请日：2005-08-24

    Applicant: Stanley Chu ,  Sisira Gamage ,  Hyon-Jin Kwon

    Inventor： Stanley Chu ,  Sisira Gamage ,  Hyon-Jin Kwon

    IPC: H01L29/84

    CPC classification number: G01L9/0054 ,  B81B2201/0264 ,  B81C3/001 ,  B81C2203/0109 ,  B81C2203/036 ,  G01L9/0042 ,  Y10S257/909 ,  Y10S438/909

    Abstract: A pressure sensor includes a base substrate silicon fusion bonded to a cap substrate with a chamber disposed between the base substrate and the cap substrate. Each of the base substrate and the cap substrate include silicon. The base substrate includes walls defining a cavity and a diaphragm portion positioned over the cavity, wherein the cavity is open to an environment to be sensed. The chamber is hermetically sealed from the environment.

    Abstract translation: 一种压力传感器包括：基底基底硅融合到盖基底上，其中腔室设置在基底基底和盖基片之间。 基底基板和盖基板中的每一个包括硅。 底部基底包括限定空腔的壁和位于空腔上方的隔膜部分，其中空腔对待感测的环境开放。 该室与环境密封。

    Isolation of short-circuited sensor cells for high-reliability operation of sensor array
    2.
    发明申请
    Isolation of short-circuited sensor cells for high-reliability operation of sensor array 有权
    隔离传感器阵列的高可靠性操作的短路传感器单元

    公开(公告)号：US20060145059A1

    公开(公告)日：2006-07-06

    申请号：US11028789

    申请日：2005-01-04

    Applicant: Warren Lee ,  David Mills ,  Glenn Claydon ,  Kenneth Rigby ,  Wei-Cheng Tian ,  Ye-Ming Li ,  Jie Sun ,  Lowell Smith ,  Stanley Chu ,  Sam Wong ,  Hyon-Jin Kwon

    Inventor： Warren Lee ,  David Mills ,  Glenn Claydon ,  Kenneth Rigby ,  Wei-Cheng Tian ,  Ye-Ming Li ,  Jie Sun ,  Lowell Smith ,  Stanley Chu ,  Sam Wong ,  Hyon-Jin Kwon

    IPC: H01J40/14 ,  G01J1/42 ,  H03F3/08

    CPC classification number: H04R23/00 ,  B06B1/0292

    Abstract: A device comprising an array of sensors and a multiplicity of bus lines, each sensor being electrically connected to a respective bus line and comprising a respective multiplicity of groups of micromachined sensor cells, the sensor cell groups of a particular sensor being electrically coupled to each other via the bus line to which that sensor is connected, each sensor cell group comprising a respective multiplicity of micromachined sensor cells that are electrically interconnected to each other and not switchably disconnectable from each other, the device further comprising means for isolating any one of the sensor cell groups from its associated bus line and in response to any one of the micromachined sensor cells of that sensor cell group being short-circuited to ground. In one implementation, the isolating means comprise a multiplicity of fuses. In another implementation, the isolating means comprise a multiplicity of short circuit protection modules, each module comprising a current sensor circuit and an electrical isolation switch.

    Abstract translation: 一种包括传感器阵列和多条总线线路的设备，每个传感器电连接到相应的总线，并且包括相应多个微机械传感器单元组，特定传感器的传感器单元组彼此电耦合 通过连接该传感器的总线，每个传感器单元组包括彼此电互连并且不可切换地彼此分离的相应多个微机械传感器单元，该装置还包括用于隔离传感器 来自其相关联的总线线路的单元组以及响应于该传感器单元组的微机械传感器单元中的任一个被短路到地。 在一个实施方案中，隔离装置包括多个保险丝。 在另一实施方案中，隔离装置包括多个短路保护模块，每个模块包括电流传感器电路和电隔离开关。

    Isolation of short-circuited sensor cells for high-reliability operation of sensor array
    5.
    发明授权
    Isolation of short-circuited sensor cells for high-reliability operation of sensor array 有权
    隔离传感器阵列的高可靠性操作的短路传感器单元

    公开(公告)号：US07293462B2

    公开(公告)日：2007-11-13

    申请号：US11028789

    申请日：2005-01-04

    Applicant: Warren Lee ,  David Martin Mills ,  Glenn Scott Claydon ,  Kenneth Wayne Rigby ,  Wei-Cheng Tian ,  Ye-Ming Li ,  Jie Sun ,  Lowell Scott Smith ,  Stanley Chienwu Chu ,  Sam Yie-Sum Wong ,  Hyon-Jin Kwon

    Inventor： Warren Lee ,  David Martin Mills ,  Glenn Scott Claydon ,  Kenneth Wayne Rigby ,  Wei-Cheng Tian ,  Ye-Ming Li ,  Jie Sun ,  Lowell Scott Smith ,  Stanley Chienwu Chu ,  Sam Yie-Sum Wong ,  Hyon-Jin Kwon

    IPC: G01H11/00

    CPC classification number: H04R23/00 ,  B06B1/0292

    Abstract: A device comprising an array of sensors and a multiplicity of bus lines, each sensor being electrically connected to a respective bus line and comprising a respective multiplicity of groups of micromachined sensor cells, the sensor cell groups of a particular sensor being electrically coupled to each other via the bus line to which that sensor is connected, each sensor cell group comprising a respective multiplicity of micromachined sensor cells that are electrically interconnected to each other and not switchably disconnectable from each other, the device further comprising means for isolating any one of the sensor cell groups from its associated bus line and in response to any one of the micromachined sensor cells of that sensor cell group being short-circuited to ground. In one implementation, the isolating means comprise a multiplicity of fuses. In another implementation, the isolating means comprise a multiplicity of short circuit protection modules, each module comprising a current sensor circuit and an electrical isolation switch.

    Abstract translation: 一种包括传感器阵列和多条总线线路的设备，每个传感器电连接到相应的总线，并且包括相应多个微机械传感器单元组，特定传感器的传感器单元组彼此电耦合 通过连接该传感器的总线，每个传感器单元组包括彼此电互连并且不可切换地彼此分离的相应多个微机械传感器单元，该装置还包括用于隔离传感器 来自其相关联的总线线路的单元组以及响应于该传感器单元组的微机械传感器单元中的任一个被短路到地。 在一个实施方案中，隔离装置包括多个保险丝。 在另一实施方案中，隔离装置包括多个短路保护模块，每个模块包括电流传感器电路和电隔离开关。

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