公开(公告)号：US20090242544A1

公开(公告)日：2009-10-01

申请号：US12064338

申请日：2006-10-10

申请人： Shoji Kano

发明人： Shoji Kano

IPC分类号： H05B3/68

CPC分类号： H01L21/6831 ,  H01L21/67103

摘要： In a wafer heating apparatus having an electrostatic attraction function, a conductive heat generating layer is formed on one plane of a supporting substrate, and a conductive electrode for electrostatic attraction is formed on the other plane, and furthermore, an insulating layer is formed to cover the heat generating layer and the electrode for electrostatic attraction. The wafer heating apparatus has the electrostatic attraction function characterized in that the insulating layer covering the electrode for electrostatic attraction has a lower surface resistivity (ρsE) in a portion on the side of an object to be attracted compared with a surface resistivity (ρsE) in a portion on the side of the electrostatic attraction electrode.

摘要翻译： 在具有静电吸引功能的晶片加热装置中，在支撑基板的一个平面上形成导电发热层，在另一平面上形成静电吸引用导电电极，此外，形成绝缘层以覆盖 发热层和静电吸引用电极。 晶片加热装置具有静电吸引功能，其特征在于，覆盖静电吸引用电极的绝缘层的表面电阻率（rhosE）与表面电阻率（rhosE）相比具有较低的待吸附物体侧部分的表面电阻率（rhosE） 静电吸引电极一侧的一部分。

公开(公告)号：US08440566B2

公开(公告)日：2013-05-14

申请号：US13189006

申请日：2011-07-22

申请人： Koji Kato ,  Shoji Kano ,  Waichi Yamamura

发明人： Koji Kato ,  Shoji Kano ,  Waichi Yamamura

IPC分类号： H01L21/44

CPC分类号： C23C16/4404 ,  C23C16/34 ,  C23C16/45576

摘要： The method is adapted for forming an aluminum nitride thin film having a high density and a high resistance to thermal shock by a chemical vapor deposition process and includes steps of mixing a gas containing aluminum atoms (Al) and a gas containing nitrogen atoms (N) with a gas containing oxygen atoms (O) and feeding the mixture to a member to be covered by an aluminum nitride thin film.

摘要翻译： 该方法适用于通过化学气相沉积工艺形成具有高密度和高耐热冲击性的氮化铝薄膜，并且包括将含有铝原子（Al）的气体和含有氮原子（N）的气体混合的步骤， 含有含有氧原子（O）的气体，并将混合物供给要被氮化铝薄膜覆盖的构件。

公开(公告)号：US20070241095A1

公开(公告)日：2007-10-18

申请号：US11783580

申请日：2007-04-10

申请人： Noboru Kimura ,  Yoshihiro Kubota ,  Waichi Yamamura ,  Shoji Kano

发明人： Noboru Kimura ,  Yoshihiro Kubota ,  Waichi Yamamura ,  Shoji Kano

IPC分类号： F27D11/00

CPC分类号： H01L21/67103 ,  H01L21/67098 ,  H05B3/143 ,  H05B2203/003

摘要： There is disclosed a heating element 10 comprising: at least a heat-resistant base member 1; a conductive layer 3 having a heater pattern 3a formed on the heat-resistant base member; a protection layer 4 with an insulating property formed on the conductive layer; and a corrosion-resistant layer 4p having a nitrogen gas permeability of 1×10−2 cm2/sec or less or being made of a compound containing a dopant formed on the protection layer 4. There can be provided a heating element in which a corrosion-resistant layer whose nitrogen gas permeability, resistivity, or hardness are controlled is formed on a protection layer and through which the corrosive gas is difficult to be transmitted even under an environment of a high temperature and a corrosive gas and by which degradation due to corrosion of a conductive layer, particularly, a power-supply-terminal portion can be avoided and additionally which can fulfill a high function as an electrostatic chuck even when having a chuck pattern and which has a long operation life and is capable of being produced at a low cost.

摘要翻译： 公开了一种加热元件10，其包括：至少一个耐热底座件1; 具有形成在耐热基体上的加热器图案3a的导电层3; 在导电层上形成具有绝缘性的保护层4; 以及氮气渗透率为1×10 -2 cm 2 / sec以下的耐腐蚀层4p，或者由在保护层上形成的含有掺杂剂的化合物构成 第4层。 可以提供一种加热元件，其中在保护层上形成氮气渗透性，电阻率或硬度的耐腐蚀层，即使在高温环境下也难以将腐蚀性气体透过 并且可以避免腐蚀性气体，并且可以避免由于导电层，特别是电源端子部分的腐蚀而导致的劣化，并且另外，即使当具有卡盘图案也能够实现作为静电卡盘的高功能，并且具有 使用寿命长，能够以低成本生产。

公开(公告)号：US06384383B2

公开(公告)日：2002-05-07

申请号：US09728082

申请日：2000-12-04

申请人： Shoji Kano ,  Kenji Ito ,  Akira Sato

发明人： Shoji Kano ,  Kenji Ito ,  Akira Sato

IPC分类号： H05B368

CPC分类号： H01L21/67103

摘要： There is disclosed a ceramic heating jig consisting of a susceptor 2 on which a work to be heated is placed, a ceramic heater 3 for heating the susceptor and at least one heat shielding plate 4 for shielding heat of the ceramic heater wherein the susceptor and the heat shielding plate are located so that each of them is located across the ceramic heater each leaving a certain space therefrom, a thickness of the susceptor is 0.5 m to 5 mm, a thickness of the ceramic heater is 0.5 mm to 3 mm, a thickness of the heat shielding plate is 0.5 mm to 3 mm. Preferably, an interval between the members is 0.5 mm to 10 mm, and the members are elastically held as an integration by the elastic means 6 and the restraint means 7. There can be provided a ceramic heating jig wherein defects such as thermal deformation, breakage or the like of the susceptor or the like are hardly caused, temperature can be raised or lowered rapidly, and flatness of a susceptor can be kept even at high temperature.

摘要翻译： 公开了一种陶瓷加热夹具，其由待加热的工件的基座2，用于加热基座的陶瓷加热器3和用于屏蔽陶瓷加热器的热量的至少一个热屏蔽板4组成，其中基座和 隔热板的位置使得它们各自位于陶瓷加热器两侧，留下一定的空间，基座的厚度为0.5μm至5mm，陶瓷加热器的厚度为0.5mm至3mm，厚度为 的隔热板为0.5mm〜3mm。 优选地，构件之间的间隔为0.5mm至10mm，并且通过弹性装置6和约束装置7将构件弹性保持为一体。可以提供陶瓷加热夹具，其中诸如热变形，断裂的缺陷 感受器等不易引起温度的升高或降低，即使在高温下也能保持基座的平坦度。

公开(公告)号：US20120107613A1

公开(公告)日：2012-05-03

申请号：US13137837

申请日：2011-09-16

申请人： Shoji Kano ,  Mitsumasa Kubota ,  Mitsuo Tanaka ,  Koji Kato ,  Waichi Yamamura

发明人： Shoji Kano ,  Mitsumasa Kubota ,  Mitsuo Tanaka ,  Koji Kato ,  Waichi Yamamura

IPC分类号： B32B33/00 ,  C23C16/56 ,  C23C16/34 ,  C23C16/44 ,  B32B9/00 ,  B32B15/04

CPC分类号： C23C16/34 ,  C23C16/56 ,  Y10T428/30

摘要： A corrosion-resistant article is proposed which is coated with an aluminum nitride wherein the aluminum nitride grains contain oxygen by 0.1 mass % or greater but not greater than 20 mass % so that the thermal expansion coefficient of the coating layer is made even with that of the base body; the relative density of the coating layer is preferably 50% or higher but lower than 98%. It is preferred that the coating layer is first made by chemical vapor deposition and then subjected to an oxidizing atmosphere of a temperature of 700 degrees centigrade or higher but 1150 degrees centigrade or lower; or it is preferable that after the chemical vapor deposition step the coating layer is exposed to the natural atmosphere to adsorb hydrate and then subjected to a heat treatment in an inert atmosphere of a temperature of 900 degrees centigrade but 1300 degrees centigrade or lower.

摘要翻译： 提出了一种耐蚀制品，其涂覆有氮化铝，其中氮化铝颗粒含有0.1质量％以上但不大于20质量％的氧，使得涂层的热膨胀系数甚至与 基体; 涂层的相对密度优选为50％以上且低于98％。 优选首先通过化学气相沉积制造涂层，然后经受700摄氏度或更高但1150摄氏度或更低的氧化气氛; 或者优选在化学气相沉积步骤之后，将涂层暴露于天然气氛中以吸附水合物，然后在900摄氏度至1300摄氏度或更低的惰性气氛中进行热处理。

公开(公告)号：US08115141B2

公开(公告)日：2012-02-14

申请号：US11783580

申请日：2007-04-10

申请人： Noboru Kimura ,  Yoshihiro Kubota ,  Waichi Yamamura ,  Shoji Kano

发明人： Noboru Kimura ,  Yoshihiro Kubota ,  Waichi Yamamura ,  Shoji Kano

IPC分类号： F27D11/00 ,  C23C16/00

CPC分类号： H01L21/67103 ,  H01L21/67098 ,  H05B3/143 ,  H05B2203/003

摘要： There is disclosed a heating element 10 comprising: at least a heat-resistant base member 1; a conductive layer 3 having a heater pattern 3a formed on the heat-resistant base member; a protection layer 4 with an insulating property formed on the conductive layer; and a corrosion-resistant layer 4p having a nitrogen gas permeability of 1×10−2 cm2/sec or less or being made of a compound containing a dopant formed on the protection layer 4. There can be provided a heating element in which a corrosion-resistant layer whose nitrogen gas permeability, resistivity, or hardness are controlled is formed on a protection layer and through which the corrosive gas is difficult to be transmitted even under an environment of a high temperature and a corrosive gas and by which degradation due to corrosion of a conductive layer, particularly, a power-supply-terminal portion can be avoided and additionally which can fulfill a high function as an electrostatic chuck even when having a chuck pattern and which has a long operation life and is capable of being produced at a low cost.

摘要翻译： 公开了一种加热元件10，其包括：至少一个耐热底座件1; 导电层3，其具有形成在耐热基底构件上的加热器图案3a; 在导电层上形成具有绝缘性的保护层4; 以及氮气渗透率为1×10 -2 cm 2 / sec以下的耐腐蚀层4p，或由保护层4上形成的含有掺杂剂的化合物构成。可以提供一种加热元件，其中腐蚀 氮气渗透性，电阻率或硬度被控制的耐热层形成在保护层上，即使在高温环境和腐蚀性气体环境下腐蚀性气体也难以透过，腐蚀性降低 导电层，特别是电源端子部分，可以避免和附加地，即使当具有卡盘图案并且具有长的使用寿命并且能够在 低成本。

公开(公告)号：US5759646A

公开(公告)日：1998-06-02

申请号：US699148

申请日：1996-08-16

申请人： Shoji Kano ,  Nobuo Kawada ,  Ryoji Nakajima ,  Yukio Kurosawa

发明人： Shoji Kano ,  Nobuo Kawada ,  Ryoji Nakajima ,  Yukio Kurosawa

IPC分类号： C04B41/87 ,  C04B35/583 ,  C04B41/50 ,  C04B41/51 ,  C04B41/85 ,  C04B41/88 ,  C30B15/10 ,  C30B23/06 ,  C30B35/00 ,  H01L21/203 ,  B01L3/04

CPC分类号： C04B41/009 ,  C04B41/5001 ,  C04B41/5133 ,  C04B41/85 ,  C04B41/88 ,  C30B15/10 ,  C30B23/06 ,  C30B35/002 ,  Y10T428/131 ,  Y10T428/1317

摘要： Proposed is an improvement in a vessel, e.g., crucible, of pyrolytic boron nitride (PBN) used, for example, in the process of molecular beam epitaxy for melting silicon and the like at a high temperature. Different from conventional PBN crucibles used for such a process, in which contamination of high-purity silicon is unavoidable by the reaction of molten silicon with PBN or a thermal decomposition products of boron nitride, the inventive PBN vessel is provided on the surface with a protective coating layer of pyrolytic graphite or a refractory metal such as platinum so as not to cause troubles due to contamination of high-purity silicon melted therein with the crucible materials.

摘要翻译： 提出了在例如用于在高温下熔化硅等的分子束外延过程中使用的热解氮化硼（PBN）的容器（例如坩埚）的改进。 与用于这种工艺的常规PBN坩埚不同，其中高纯度硅的污染是熔融硅与PBN或氮化硼的热分解产物的反应所不可避免的，本发明的PBN容器在表面上提供有保护 热解石墨或难熔金属如铂的涂层，以免由于用坩埚材料熔化的高纯度硅的污染而引起麻烦。

公开(公告)号：US08829397B2

公开(公告)日：2014-09-09

申请号：US12285108

申请日：2008-09-29

申请人： Shoji Kano ,  Waichi Yamamura ,  Yoshihiro Kubota

发明人： Shoji Kano ,  Waichi Yamamura ,  Yoshihiro Kubota

IPC分类号： H05B3/68 ,  C23C16/00 ,  H01L21/683 ,  H02N13/00 ,  H01L21/687 ,  H05B3/14 ,  H01L21/67

CPC分类号： H01L21/6831 ,  H01L21/67103 ,  H01L21/6833 ,  H01L21/68757 ,  H02N13/00 ,  H05B3/143

摘要： The present invention relates to a corrosion-resistant multilayer ceramic member consisting at least of: a ceramic support substrate; an electrode layer formed on the ceramic support substrate; a power-supply member connected to the electrode layer; an insulating protection layer formed on the ceramic support substrate to cover the electrode layer; and a ceramic protection substrate of which at least a part is provided on the insulating protection layer. Thereby, there is provided a long-life corrosion-resistant multilayer ceramic member excellent in corrosion resistance even when exposed to a corrosive gas.

摘要翻译： 本发明涉及一种耐腐蚀多层陶瓷构件，其至少包括：陶瓷支撑基板; 形成在所述陶瓷支撑基板上的电极层; 连接到所述电极层的电源构件; 形成在所述陶瓷支撑基板上以覆盖所述电极层的绝缘保护层; 以及陶瓷保护基板，其至少一部分设置在绝缘保护层上。 由此，即使在暴露于腐蚀性气体的情况下，也能够提供耐腐蚀性优异的长寿命耐腐蚀性的多层陶瓷部件。

公开(公告)号：US20120100698A1

公开(公告)日：2012-04-26

申请号：US13189006

申请日：2011-07-22

申请人： Koji Kato ,  Shoji Kano ,  Waichi Yamamura

发明人： Koji Kato ,  Shoji Kano ,  Waichi Yamamura

IPC分类号： H01L21/205

CPC分类号： C23C16/4404 ,  C23C16/34 ,  C23C16/45576

摘要： The method is adapted for forming an aluminum nitride thin film having a high density and a high resistance to thermal shock by a chemical vapor deposition process and includes steps of mixing a gas containing aluminum atoms (Al) and a gas containing nitrogen atoms (N) with a gas containing oxygen atoms (O) and feeding the mixture to a member to be covered by an aluminum nitride thin film.

摘要翻译： 该方法适用于通过化学气相沉积工艺形成具有高密度和高耐热冲击性的氮化铝薄膜，并且包括将含有铝原子（Al）的气体和含有氮原子（N）的气体混合的步骤， 含有含有氧原子（O）的气体，并将混合物供给要被氮化铝薄膜覆盖的构件。

公开(公告)号：US20070274021A1

公开(公告)日：2007-11-29

申请号：US11797726

申请日：2007-05-07

申请人： Shoji Kano ,  Waichi Yamamura

发明人： Shoji Kano ,  Waichi Yamamura

IPC分类号： H01T23/00

CPC分类号： H01L21/6831

摘要： An electrostatic chuck apparatus for holding a workpiece such as a semiconductor wafer or glass substrate comprises a support substrate, an electrode formed on one surface of the support substrate, and an insulating layer covering the electrode and having a bearing surface for the workpiece. The insulating layer comprises pyrolytic boron nitride containing carbon and at least one element selected from silicon, aluminum, yttrium, and titanium, and has a Vickers hardness Hv of 50 to 1000.

摘要翻译： 用于保持诸如半导体晶片或玻璃基板的工件的静电卡盘装置包括支撑基板，形成在支撑基板的一个表面上的电极以及覆盖电极并具有用于工件的支承面的绝缘层。 绝缘层包含含碳的热解氮化硼和选自硅，铝，钇和钛的至少一种元素，维氏硬度Hv为50〜1000。