Vacuum Pump
    1.
    发明申请

    公开(公告)号:US20220205449A1

    公开(公告)日:2022-06-30

    申请号:US17604230

    申请日:2019-04-25

    IPC分类号: F04D19/04 F16C32/04

    摘要: A rotation mechanism (20) of a vacuum pump (100) includes a magnetic bearing unit (21) having a first outer diameter (91), the magnetic bearing unit (21) being operable as a first radial magnetic bearing (40), and a motor unit (22) provided on a side of a second end (11b) of a rotary shaft (11) relative to the magnetic bearing unit, the motor unit (22) having a second outer diameter (92) larger than the first outer diameter, the motor unit (22) being operable as both a motor (30) and a second radial magnetic bearing (50).

    FEEDBACK CONTROL DEVICE
    5.
    发明申请
    FEEDBACK CONTROL DEVICE 审中-公开
    反馈控制装置

    公开(公告)号:US20170045482A1

    公开(公告)日:2017-02-16

    申请号:US15118517

    申请日:2014-12-11

    IPC分类号: G01N30/32 G05D16/20 G05B11/42

    摘要: A feedback control apparatus includes: a detector configured to detect an output value based on a controlled object; a P control circuit including a differential amplifier circuit and an analog circuit, the differential amplifier circuit being configured to receive a detection value of the detector and a target value, the analog circuit being configured to output a P control component VP to an output of the differential amplifier circuit; an I control unit configured to output an I control component VI by integrating a deviation of the detection value from the target value by digital processing; and a driver element configured to be driven based on the P control component VP from the P control circuit and the I control component VI from the I control unit to control the controlled object.

    摘要翻译: 反馈控制装置包括:检测器,被配置为基于受控对象检测输出值; 包括差分放大器电路和模拟电路的P控制电路,所述差分放大器电路被配置为接收检测器的检测值和目标值,所述模拟电路被配置为将P控制部件VP输出到所述检测器的输出 差分放大电路; I控制单元,被配置为通过数字处理将检测值与目标值的偏差相加来输出I控制分量VI; 以及驱动元件,其被配置为基于来自P控制电路的P控制部件VP和来自I控制单元的I控制部件VI来驱动,以控制受控对象。