Filling processes
    4.
    发明授权

    公开(公告)号:US09847245B1

    公开(公告)日:2017-12-19

    申请号:US15343151

    申请日:2016-11-03

    CPC classification number: H01L21/76205 H01L21/30604 H01L21/324 H01L21/76224

    Abstract: A method of filling cavities in a semiconductor structure during fabrication. A layer of a first material, e.g., a polysilazane, is deposited on the semiconductor, and subjected to a first thermal process to change its chemical composition, e.g., to change it to silicon dioxide. It is then etched back, and the cycle of deposition, and thermal processing is repeated. The etch-back may also be repeated in one or more of the cycles after the first cycle, and a second thermal process, that may increase the density of one or more of the deposited layers, may be performed in one or more of the cycles.

    FILLING PROCESSES
    6.
    发明申请

    公开(公告)号:US20170365505A1

    公开(公告)日:2017-12-21

    申请号:US15343151

    申请日:2016-11-03

    CPC classification number: H01L21/76205 H01L21/30604 H01L21/324 H01L21/76224

    Abstract: A method of filling cavities in a semiconductor structure during fabrication. A layer of a first material, e.g., a polysilazane, is deposited on the semiconductor, and subjected to a first thermal process to change its chemical composition, e.g., to change it to silicon dioxide. It is then etched back, and the cycle of deposition, and thermal processing is repeated. The etch-back may also be repeated in one or more of the cycles after the first cycle, and a second thermal process, that may increase the density of one or more of the deposited layers, may be performed in one or more of the cycles.

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