ELECTROSTATIC CHUCK
    2.
    发明公开
    ELECTROSTATIC CHUCK 审中-公开

    公开(公告)号:US20240213071A1

    公开(公告)日:2024-06-27

    申请号:US18396553

    申请日:2023-12-26

    CPC classification number: H01L21/6833 H01J37/32715

    Abstract: An electrostatic chuck includes an electrostatic chuck body having a step portion protruding from a lower end, an adhesive layer disposed on an upper surface of the electrostatic chuck body, a ceramic puck adhered to the adhesive layer and having an edge protruding from the upper surface of the electrostatic chuck body, and a sealant disposed between the step portion and the edge of the ceramic puck and configured to block reaction gas from permeating into the adhesive layer. The sealant includes a coating layer disposed on an external surface thereof, and the coating layer includes a metal oxide including a single rare earth oxide and/or a multilayer heterogeneous metal oxide.

    GRID FOR SEMICONDUCTOR PROCESS
    3.
    发明申请

    公开(公告)号:US20250132133A1

    公开(公告)日:2025-04-24

    申请号:US18640999

    申请日:2024-04-19

    Abstract: A substrate processing apparatus comprises a process chamber, a stage in the process chamber, the stage supporting a substrate, and a grid in the process chamber and upwardly spaced apart from the stage. The grid includes a dielectric plate having a central axis that extends in a first direction, a first electrode plate embedded in the dielectric plate, a second electrode plate downwardly spaced apart from the first electrode plate and embedded in the dielectric plate, and a third electrode plate downwardly spaced apart from the second electrode plate and embedded in the dielectric plate.

    PLASMA SENSOR MODULE
    4.
    发明公开

    公开(公告)号:US20240071737A1

    公开(公告)日:2024-02-29

    申请号:US18188540

    申请日:2023-03-23

    CPC classification number: H01J37/32917 G01N9/00 H01J2237/24585

    Abstract: A plasma sensor module may include an upper substrate, a lower substrate, at least one probe and a printed circuit board (PCB). The upper substrate may be configured to be exposed to plasma. The lower substrate may contact a lower surface of the upper substrate. The lower substrate may have a thickness that is thicker than a thickness of the upper substrate. The probe may be in the lower substrate. The PCB may be in the lower substrate. The PCB may be configured to apply an alternating current to the probe to detect a density of the plasma. Thus, the structural strength of the plasma sensor module may have improved structural strength.

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