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公开(公告)号：US20240288265A1
公开(公告)日：2024-08-29
申请号：US18372391
申请日：2023-09-25
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Jinyong Kim , Yasuhiro Hidaka , Wookrae Kim , Ingi Kim , Jinseob Kim
IPC: G01B11/02
CPC classification number: G01B11/02 , G01B2210/56
Abstract: Provided is a semiconductor measurement apparatus that includes: a lighting unit comprising a light source, and a light modulator configured to decompose a light output by the light source into a plurality of wavelength bands and generate an output light of at least two selected wavelength bands; a first optical unit comprising an illumination polarizing element disposed in a path of the output light; a second optical unit comprising a beam splitter, an objective lens configured to allow light having passed through the first optical unit to be incident onto a sample, and a self-interference generator disposed on a path of a reflected light; a sensor configured to output an original image representing an interference pattern of light having passed through the self-interference generator; and a controller configured to process the original image and determine a selected critical dimension of a structure included in the sample.
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公开(公告)号：US10724899B2
公开(公告)日：2020-07-28
申请号：US16541405
申请日：2019-08-15
Applicant: Samsung Electronics Co., Ltd.
Inventor： Yasuhiro Hidaka
Abstract: Provided are a spectrometer optical system and a semiconductor inspection apparatus, for reducing cost by allowing a wide field of view, high spatial resolution, and high wavelength resolution to be compatible with one another. The spectrometer optical system includes a masking having a slit, a first spherical mirror positioned to reflect light received from the slit, a second spherical mirror positioned to reflect the light reflected from the first spherical mirror, a dispersion element positioned to receive the light reflected from the second spherical mirror, and an image sensor configured to detect the light dispersed by the dispersion element according to wavelengths of the light.
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公开(公告)号：US11761906B2
公开(公告)日：2023-09-19
申请号：US17570763
申请日：2022-01-07
Applicant: Samsung Electronics Co., Ltd.
Inventor： Yasuhiro Hidaka , Mitsunori Numata
CPC classification number: G01N21/9501 , G01B11/24 , G01N21/8806 , G01N21/8851
Abstract: An optical device is provided. The optical device includes: a light source; a pinhole plate arranged on a path of input light between the light source and an objective lens; an image sensor configured to detect a reflected light generated by the input light being reflected by a sample; and a noise filter arranged on the path of the reflected light between the image sensor and the objective lens, and the noise filter may remove a part of the reflected light generated by underlying layers below a measurement target layer of the sample.
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公开(公告)号：US11314073B2
公开(公告)日：2022-04-26
申请号：US16547492
申请日：2019-08-21
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Yasuhiro Hidaka , Masato Kajinami , Takayuki Sasaoka
Abstract: A lighting device includes a light source generating a beam of illumination light, a ring-shaped aperture shielding a central portion of the illumination light and transforming the beam of illumination light into ring-shaped illumination light, and an object lens focusing the ring-shaped illumination light such that a specimen can be illuminated with the ring-shaped illumination light. An inspection apparatus including the light device also has a beam splitter and an image sensor picking up light reflected and/or diffracted from the specimen through the beam splitter. Because a central portion of the illumination light is shielded, lens flare of light transmitted by the beam splitter and the object lens is prevented thereby preventing speckles in the image produced by the image sensor.
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公开(公告)号：US11885608B2
公开(公告)日：2024-01-30
申请号：US17366936
申请日：2021-07-02
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Yasuhiro Hidaka
CPC classification number: G01B11/06 , G02B3/06 , G02B5/04 , G02B5/3025 , G02B27/141 , G02B27/283 , G02B27/286 , G02B27/30 , G01B2210/56
Abstract: An ellipsometer is provided. The ellipsometer includes: a polarizing optical element, comprising a prism, that is configured to split reflected light into two linearly polarized components of light having polarization directions orthogonal to each other, the reflected light generated by reflecting illuminated light, including linearly polarized light that is polarized in one direction, from a measurement surface of a sample; an interference member, comprising at least one body, that is configured to form at least one interference fringe in which the two linearly polarized components of light interfere with each other in directions different from the polarization directions; an image detector configured to detect the at least one interference fringe; and an analysis device including at least one processor, the analysis device configured to calculate ellipsometry coefficients Ψ and Δ based on the at least one interference fringe that is detected.
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Patent Agency Ranking
公开(公告)号：US11493322B2
公开(公告)日：2022-11-08
申请号：US17350987
申请日：2021-06-17
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Yasuhiro Hidaka
Abstract: An ellipsometer includes a first separation unit configured to separate a first reflected light into two reflected lights, a first polarizing optical element configured to separate each of the two reflected lights into two linearly polarized lights, a first interference device configured to form an interference fringe by allowing components of the two linearly polarized lights to interfere with each other, a second separation unit configured to separate a second reflected light into two reflected lights, a second polarizing optical element configured to separate each of the two reflected lights into two linearly polarized lights, and a second interference device configured to form an interference fringe by allowing components of the two linearly polarized lights to interfere with each other.
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公开(公告)号：US11037283B2
公开(公告)日：2021-06-15
申请号：US16444719
申请日：2019-06-18
Applicant: Samsung Electronics Co., Ltd.
Inventor： Sung-Ho Jang , Yasuhiro Hidaka , Young-kyu Park , Ye-eun Park , Yu-Sin Yang
IPC: G06T7/00 , G02B27/09 , G02B5/30 , H04N13/239 , G02B26/12
Abstract: Provided is a hyperspectral imaging (HSI)-based inspection apparatus capable of quickly and stably performing two-dimensional (2D) HSI for an inspection object, and accordingly, capable of quickly and accurately inspecting the inspection object. The HSI-based inspection apparatus includes: a stage on which an inspection object is arranged; an optical system configured to allow light to be incident on the inspection object and emit the light reflected from the inspection object; a scan mirror configured to reflect the emitted light from the optical system while rotating; and a hyperspectral camera configured to obtain an image having a wavelength direction and a line direction as two axes for light reflected from the scan mirror, wherein, by using the rotation of the scan mirror, the hyperspectral camera is configured to perform the 2D HSI for the inspection object.
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公开(公告)号：US12228499B2
公开(公告)日：2025-02-18
申请号：US18111229
申请日：2023-02-17
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Jaehwang Jung , Yasuhiro Hidaka , Mitsunori Numata , Wookrae Kim , Jinseob Kim , Myungjun Lee
Abstract: Provided is a pupil ellipsometry measurement apparatus configured to measure an object, the pupil ellipsometry measurement apparatus including a stage configured to support the object to be measured, a light source unit configured to generate and output light, an irradiation optical system configured to focus the light from the light source unit on the object, a first detector configured to detect an image of reflected light from the object on an imaging plane, a self-interference generator (SIG) configured to generate self-interference with respect to the reflected light, a second detector configured to detect a hologram image of interference light of the SIG on a pupil plane, and a processor configured to reconstruct reflectance information based on the hologram image, and measure the object.
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公开(公告)号：US11604136B2
公开(公告)日：2023-03-14
申请号：US17204059
申请日：2021-03-17
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Jaehwang Jung , Yasuhiro Hidaka , Mitsunori Numata , Wookrae Kim , Jinseob Kim , Myungjun Lee
Abstract: Provided is a pupil ellipsometry measurement apparatus configured to measure an object, the pupil ellipsometry measurement apparatus including a stage configured to support the object to be measured, a light source unit configured to generate and output light, an irradiation optical system configured to focus the light from the light source unit on the object, a first detector configured to detect an image of reflected light from the object on an imaging plane, a self-interference generator (SIG) configured to generate self-interference with respect to the reflected light, a second detector configured to detect a hologram image of interference light of the SIG on a pupil plane, and a processor configured to reconstruct reflectance information based on the hologram image, and measure the object.
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公开(公告)号：US20220214288A1
公开(公告)日：2022-07-07
申请号：US17570763
申请日：2022-01-07
Applicant: Samsung Electronics Co., Ltd.
Inventor： Yasuhiro Hidaka , Mitsunori Numata
Abstract: An optical device is provided. The optical device includes: a light source; a pinhole plate arranged on a path of input light between the light source and an objective lens; an image sensor configured to detect a reflected light generated by the input light being reflected by a sample; and a noise filter arranged on the path of the reflected light between the image sensor and the objective lens, and the noise filter may remove a part of the reflected light generated by underlying layers below a measurement target layer of the sample.
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