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公开(公告)号:US09773802B2
公开(公告)日:2017-09-26
申请号:US15209371
申请日:2016-07-13
Applicant: Samsung Electronics Co., Ltd.
Inventor: Xianyu Wenxu , Inkyeong Yoo , Hojung Kim , Seong ho Cho
IPC: H01L29/792 , H01L27/1157 , H01L21/28 , H01L21/02 , H01L21/762 , H01L21/308 , H01L29/08 , H01L29/06 , G11C11/54 , H01L29/68 , H01L45/00 , H01L29/66 , H01L27/105
CPC classification number: H01L27/1157 , G11C11/54 , G11C11/5685 , G11C13/0007 , G11C2213/53 , G11C2213/79 , H01L21/0217 , H01L21/02175 , H01L21/02183 , H01L21/02186 , H01L21/28282 , H01L21/308 , H01L21/762 , H01L21/76202 , H01L21/76224 , H01L27/1052 , H01L29/0649 , H01L29/0847 , H01L29/66833 , H01L29/685 , H01L45/00
Abstract: Example embodiments relate to a method of fabricating a synapse memory device capable of being driven at a low voltage and realizing a multi-level memory. The synapse memory device includes a two-transistor structure in which a drain region of a first transistor including a memory layer and a first source region of a second transistor share a source-drain shared area. The synapse memory device is controlled by applying a voltage through the source-drain shared area. The memory layer includes a charge trap layer and a threshold switching layer, and may realize a non-volatile multi-level memory function.