公开(公告)号：US20170022610A1

公开(公告)日：2017-01-26

申请号：US15066318

申请日：2016-03-10

Applicant: Samsung Electronics Co., Ltd.

Inventor： Eun-Sung Seo ,  Yong-Kwon Kim ,  Young-Jin Noh ,  Young-Chang Song ,  Jae-Myung Choe ,  Ji-Hoon Choi ,  Sang-Cheol HA

IPC: C23C16/455 ,  C23C16/44 ,  C23C16/24

CPC classification number: C23C16/4412 ,  C23C16/045 ,  C23C16/45502 ,  C23C16/45546 ,  C23C16/45578 ,  C23C16/4584 ,  H01L28/00

Abstract: A wafer processing apparatus may include a reaction tube extending in a vertical direction and defining a process chamber for receiving a boat that holds a plurality of wafers. A gas injector may be configured to supply a reaction gas into the process chamber and may include a gas distributor extending in the vertical direction in the reaction tube. The gas injector may have a plurality of ejection holes for spraying the reaction gas. An inner diameter of the gas distributor may be at least 10 mm, and a sectional area ratio of the total sectional area of the ejection holes to a sectional area of the gas distributor is about 0.3 or less.

Abstract translation: 晶片处理装置可以包括在垂直方向上延伸的反应管并且限定用于接纳保持多个晶片的船的处理室。 气体注射器可以被配置为将反应气体供应到处理室中，并且可以包括在反应管中沿垂直方向延伸的气体分布器。 气体喷射器可以具有用于喷射反应气体的多个喷射孔。 气体分配器的内径可以为至少10mm，并且喷射孔的总截面积与气体分配器的截面面积的截面积比为约0.3以下。

公开(公告)号：US20170053791A1

公开(公告)日：2017-02-23

申请号：US15094358

申请日：2016-04-08

Applicant: Samsung Electronics Co., Ltd.

Inventor： Gon-Su Kang ,  Sung-Ho KANG ,  Min-Chul KIM ,  Sun-Ho RYU ,  Kwang-jun LEE ,  Yong-Hun LEE ,  Ju-Hong LEE ,  Sun-Hong CHOI ,  Sang-Cheol HA

IPC: H01J61/52 ,  H01L21/67 ,  H01J61/06

CPC classification number: H01J61/526 ,  H01J61/06 ,  H01J61/0732 ,  H01J61/523 ,  H01J61/82 ,  H01J61/90 ,  H01L21/67115 ,  H05B7/18

Abstract: An arc lamp includes an arc tube configured to receive a reaction gas therein, and an anode and a cathode disposed opposite one another within the arc tube and configured to generate an electrical arc. The anode includes an anode head portion extending inwardly from an end portion of the arc tube, and an anode tip portion bonded to the anode head portion and comprising a trench extending in a top surface along a peripheral region of the anode tip portion.

Abstract translation: 弧光灯包括构造成在其中接收反应气体的电弧管，以及在电弧管内彼此相对设置的阳极和阴极，并且被配置为产生电弧。 阳极包括从电弧管的端部向内延伸的阳极头部分，以及阳极顶端部分，其结合到阳极头部分并且包括沿着阳极尖端部分的周边区域在顶表面中延伸的沟槽。

公开(公告)号：US20130213910A1

公开(公告)日：2013-08-22

申请号：US13671989

申请日：2012-11-08

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sung-Ho KANG ,  Bong-Jin KUH ,  Ki-Seok KIM ,  Ki-Chul KIM ,  Ik-Soo KIM ,  Yong-Kyu JOO ,  Sang-Cheol HA

IPC: H01L21/683

CPC classification number: H01L21/683 ,  H01L21/67303 ,  H01L21/67309

Abstract: Provided is a boat for loading semiconductor substrates that includes a top plate and a bottom plate separated from each other, a rod extending from the bottom plate to the top plate and disposed between the top plate and the bottom plate, a plurality of buffer plates disposed between the top plate and the bottom plate and separated from each other by a first distance along a lengthwise direction of the rod, and a support provided between a first buffer plate and a second buffer plate which neighbor each other and supporting a loaded semiconductor substrate.

Abstract translation: 提供一种用于装载半导体基板的船，其包括彼此分离的顶板和底板，从底板延伸到顶板并设置在顶板和底板之间的杆，设置有多个缓冲板 在顶板和底板之间并且沿着杆的长度方向彼此分开第一距离，以及设置在彼此相邻并支撑加载的半导体衬底的第一缓冲板和第二缓冲板之间的支撑件。