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公开(公告)号:US20240155849A1
公开(公告)日:2024-05-09
申请号:US18372785
申请日:2023-09-26
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Moorym CHOI , Sunil SHIM , Jimin LEE , Yunsun JANG
CPC classification number: H10B80/00 , H01L24/08 , H01L24/80 , H01L25/0657 , H01L25/18 , H01L25/50 , H10B41/27 , H10B43/27 , H01L2224/08145 , H01L2224/80895 , H01L2224/80896 , H01L2924/1431 , H01L2924/14511
Abstract: A semiconductor device includes a first semiconductor structure including circuit devices on a first substrate, a lower interconnection structure connected to the circuit devices, and a lower bonding structure connected to the lower interconnection structure; and a second semiconductor structure including a second substrate on the first semiconductor structure, a stopper layer in contact with a lower surface of the second substrate, gate electrodes stacked and spaced apart from each other in a vertical direction, channel structures penetrating through the gate electrodes, and each including a channel layer, an upper interconnection structure below the gate electrodes, a peripheral contact plug spaced apart from the second substrate, and an upper bonding structure bonded to the lower bonding structure, wherein the channel structures penetrate at least a portion of the stopper layer, and wherein the peripheral contact plug penetrates at least a portion of the stopper layer.
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2.
公开(公告)号:US20230320096A1
公开(公告)日:2023-10-05
申请号:US18076090
申请日:2022-12-06
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Moorym CHOI , Jungtae SUNG , Yunsun JANG
IPC: H01L27/11582 , H01L27/11573
CPC classification number: H01L27/11582 , H01L27/11573
Abstract: A three-dimensional semiconductor memory device includes a substrate, a peripheral circuit structure provided on the substrate, and a cell array structure provided on the peripheral circuit structure. The cell array structure includes a stack including alternating interlayer insulating layers and conductive patterns, the conductive patterns including gate electrodes and a first source conductive pattern that is an uppermost pattern of the conductive patterns, a second source conductive pattern provided on the stack and in contact with a top surface of the first source conductive pattern, the second source conductive pattern including a material different from a material of the first source conductive pattern, and vertical channel structures provided to penetrate the stack and to be inserted into a lower portion of the second source conductive pattern. The vertical channel structures include vertical semiconductor patterns connected to the second source conductive pattern.
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公开(公告)号:US20220375888A1
公开(公告)日:2022-11-24
申请号:US17545117
申请日:2021-12-08
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Moorym CHOI , Yoonjo HWANG
IPC: H01L23/00 , H01L23/535 , H01L27/11556 , H01L27/11529 , H01L27/11582 , H01L27/11573 , H01L25/065 , H01L25/18
Abstract: A three-dimensional semiconductor memory device includes a first substrate, a peripheral circuit structure on the first substrate, a cell array structure on the peripheral circuit structure, the cell array structure including a stack structure having alternating interlayer dielectric layers and gate electrodes, a first insulating layer covering the stack structure, and a second substrate on the stack structure and the first insulating layer, the stack structure being between a bottom surface of the second substrate and the peripheral circuit structure, a second insulating layer on the cell array structure, a first penetration contact penetrating the first insulating layer, the second substrate, and the second insulating layer, and a second penetration contact penetrating the first insulating layer and the second insulating layer, the second penetration contact being spaced apart from the second substrate, and the first and second penetration contacts having widths decreasing with increasing distance from the first substrate.
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公开(公告)号:US20220285302A1
公开(公告)日:2022-09-08
申请号:US17543250
申请日:2021-12-06
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Moorym CHOI , Jungtae SUNG , Junyoung CHOI
IPC: H01L23/00 , H01L25/065 , H01L25/18 , H01L25/00
Abstract: A semiconductor device includes a first semiconductor structure including a first substrate, circuit devices on the first substrate, a lower interconnection structure on the circuit devices, and a lower bonding structure electrically connected to the lower interconnection structure, and a second semiconductor structure including a second substrate disposed on the first semiconductor structure, gate electrodes stacked and spaced apart from each other in a first direction perpendicular to a lower surface of the second substrate, channel structures that penetrate the gate electrodes and extend in the first direction, and an upper bonding structure electrically connected to the gate electrodes and the channel structures and bonded to the lower bonding structure. The second semiconductor structure further includes a first via connected to an upper portion of the second substrate, a second via spaced apart from the first via and the second substrate, and a contact plug.
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5.
公开(公告)号:US20230117267A1
公开(公告)日:2023-04-20
申请号:US17825076
申请日:2022-05-26
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Moorym CHOI , Yunsun JANG
IPC: H01L23/00 , H01L25/065 , H01L25/18 , H01L25/00
Abstract: Provided is a non-volatile memory device including a first structure including a first substrate; a peripheral circuit; a first insulation structure; a plurality of first bonding pads; and a first interconnect structure; a second structure, which includes a conductive etch stop layer; a common source line layer; a stacked structure including alternately stacked gate layers and interlayer insulation layers; a plurality of channel structures penetrating through a cell region of the stacked structure; a second insulation structure; a plurality of second bonding pads; and a second interconnect structure and bonded to the first structure; and a connection layer including a third insulation structure; an input/output via; and an input/output pad, wherein an interface between the second insulation structure and the third insulation structure is disposed at a vertical level between the top surface and the bottom surface of the conductive etch stop layer.
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公开(公告)号:US20220216226A1
公开(公告)日:2022-07-07
申请号:US17497200
申请日:2021-10-08
Applicant: Samsung Electronics Co., Ltd.
Inventor: Moorym CHOI , Taemok GWON , Junhyoung KIM , Hyunjae KIM , Youngbum WOO , Jongin YUN
IPC: H01L27/11556 , H01L23/538 , H01L27/11582 , G11C5/06 , H01L29/06
Abstract: A semiconductor device includes a first substrate including an impurity region including impurities of a first conductivity type, circuit devices on the first substrate, a lower interconnection structure electrically connected to the circuit devices, a second substrate on the lower interconnection structure and including semiconductor of the first conductivity type, gate electrodes on the second substrate and stacked and spaced apart from each other in a first direction perpendicular to an upper surface of the second substrate, channel structures penetrating the gate electrodes, and a connection structure. The channel structures may extend perpendicular to the second substrate. The channel structures may include a channel layer. The connection structure may connect the impurity region of the first substrate to the second substrate, and the connection structure may include a via including a semiconductor of a second conductivity type.
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公开(公告)号:US20220173119A1
公开(公告)日:2022-06-02
申请号:US17368029
申请日:2021-07-06
Applicant: Samsung Electronics Co., Ltd.
Inventor: Moorym CHOI , Jungtae SUNG , Sanghee YOON , Wooyong JEON , Junyoung CHOI , Yoonjo HWANG
IPC: H01L27/11582 , H01L27/11573 , H01L27/108
Abstract: A nonvolatile memory device includes a first structure and a second structure bonded to the first structure. The second structure includes a low-resistance conductive layer, a common source line layer on the low-resistance conductive layer, a stack structure above the common source line layer, a plurality of channel structures passing through a cell region of the stack structure and contacting the common source line layer, a dummy channel structure passing through a step region of the stack structure and contacting the common source line layer, a second insulating structure on the stack structure, a plurality of second bonding pads on the second insulating structure, and a second interconnect structure in the second insulating structure.
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8.
公开(公告)号:US20210351199A1
公开(公告)日:2021-11-11
申请号:US17381349
申请日:2021-07-21
Applicant: Samsung Electronics Co., Ltd.
Inventor: Taeyoung KIM , Moorym CHOI , Dongchan Kim
IPC: H01L27/11582 , H01L27/1157 , G11C16/34 , G11C16/04 , H01L23/532 , H01L27/108 , G11C29/50 , G11C29/04 , G11C11/56
Abstract: Disclosed are three-dimensional semiconductor memory devices and methods of detecting electrical failure thereof. The three-dimensional semiconductor memory device includes a substrate with a first conductivity including a cell array region and an extension region having different threshold voltages from each other, a stack structure on the substrate and including stacked electrodes, an electrical vertical channel penetrating the stack structure on the cell array region, and a dummy vertical channel penetrating the stack structure on the extension region. The substrate comprises a pocket well having the first conductivity and provided with the stack structure thereon, and a deep well surrounding the pocket well and having a second conductivity opposite to the first conductivity.
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公开(公告)号:US20240341100A1
公开(公告)日:2024-10-10
申请号:US18386429
申请日:2023-11-02
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jimin LEE , Jungtae SUNG , Sunil SHIM , Yunsun JANG , Wonseok CHO , Moorym CHOI , Chulmin CHOI
Abstract: A semiconductor device includes gate electrode structures, a first division pattern, a second division pattern, and a memory channel structure. Each gate electrode structure includes gate electrodes spaced apart from each other on a substrate in a first direction substantially perpendicular to an upper surface of the substrate. Each gate electrode extends in a second direction substantially parallel to the upper surface of the substrate. The gate electrode structures are spaced apart from each other in a third direction substantially parallel to the upper surface and crossing the second direction. The first division pattern extends in the second direction between the gate electrode structures on the substrate. The second division pattern extends in the third direction on the substrate, and is on sidewalls of end portions in the second direction of the gate electrode structures. The memory channel structure extends in the first direction through each gate electrode structure.
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公开(公告)号:US20240057333A1
公开(公告)日:2024-02-15
申请号:US18134344
申请日:2023-04-13
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Moorym CHOI , Jungtae SUNG , Sunil SHIM , Yunsun JANG
Abstract: A semiconductor memory device includes: a stack including interlayer insulating layers and conductive patterns, which are alternately stacked; a source conductive pattern on the stack; and vertical structures provided to penetrate the stack and connected to the source conductive pattern. Each of the vertical structures includes: a vertical channel pattern; a data storage pattern enclosing an outer side surface of the vertical channel pattern; a vertical insulating pillar in the vertical channel pattern; and a vertical conductive pillar disposed between the vertical insulating pillar and the source conductive pattern to connect the vertical channel pattern to the source conductive pattern.
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