Image acquisition device and method of controlling the same

    公开(公告)号:US11810279B2

    公开(公告)日:2023-11-07

    申请号:US17728535

    申请日:2022-04-25

    摘要: Provided is an artificial intelligence (AI) system that mimics functions, such as recognition and determination by human brains, by utilizing a machine learning algorithm, such as deep learning, and applications of the AI system. An image acquisition device is disclosed including a camera configured to acquire a first image, wherein a portion of a main object is hidden from the camera by a sub-object; at least one processor configured to input the first image to a first AI neural network; detect, by the first AI neural network from data corresponding to a plurality of objects included in the first image, first data corresponding to the main object and second data corresponding to the sub-object from the first image by inputting the first image to an AI neural network, remove the sub-object from the first image, and generate, using a second AI neural network, a second image by restoring third data corresponding to at least a portion of the main object hidden by the removed sub-object by using the AI neural network, wherein the third data replaces the second data; and a display configured to display at least one of the first image and the second image.

    Variable resistance memory device and method of manufacturing the same

    公开(公告)号:US11456414B2

    公开(公告)日:2022-09-27

    申请号:US16416472

    申请日:2019-05-20

    IPC分类号: H01L27/24 H01L45/00

    摘要: A method of manufacturing a variable resistance memory device may include: forming a memory cell including a variable resistance pattern on a substrate; performing a first process to deposit a first protective layer covering the memory cell; and performing a second process to deposit a second protective layer on the first protective layer. The first process and the second process may use the same source material and the same nitrogen reaction material, and a nitrogen content in the first protective layer may be less than a nitrogen content in the second protective layer.

    Image acquisition device and method of controlling the same

    公开(公告)号:US11328396B2

    公开(公告)日:2022-05-10

    申请号:US16232711

    申请日:2018-12-26

    摘要: Provided is an artificial intelligence (AI) system that mimics functions, such as recognition and determination by human brains, by utilizing a machine learning algorithm, such as deep learning, and applications of the AI system. An image acquisition device is disclosed including a camera configured to acquire a first image, wherein a portion of a main object is hidden from the camera by a sub-object; at least one processor configured to input the first image to a first AI neural network; detect, by the first AI neural network from data corresponding to a plurality of objects included in the first image, first data corresponding to the main object and second data corresponding to the sub-object from the first image by inputting the first image to an AI neural network, remove the sub-object from the first image, and generate, using a second AI neural network, a second image by restoring third data corresponding to at least a portion of the main object hidden by the removed sub-object by using the AI neural network, wherein the third data replaces the second data; and a display configured to display at least one of the first image and the second image.

    METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE INCLUDING A LOW-K DIELECTRIC MATERIAL LAYER

    公开(公告)号:US20210050520A1

    公开(公告)日:2021-02-18

    申请号:US16874781

    申请日:2020-05-15

    摘要: A method for manufacturing a semiconductor device includes forming a first pattern structure having a first opening on a lower structure comprising a semiconductor substrate. The first pattern structure includes a stacked pattern and a first spacer layer covering at least a side surface of the stacked pattern. A first flowable material layer including a SiOCH material is formed on the first spacer layer to fill the first opening and cover an upper portion of the first pattern structure. A first curing process including supplying a gaseous ammonia catalyst into the first flowable material layer is performed on the first flowable material layer to form a first cured material layer that includes water. A second curing process is performed on the first cured material layer to form a first low-k dielectric material layer. The first low-k dielectric material layer is planarized to form a planarized first low-k dielectric material layer.

    Method for manufacturing a semiconductor device including a low-k dielectric material layer

    公开(公告)号:US11476419B2

    公开(公告)日:2022-10-18

    申请号:US16874781

    申请日:2020-05-15

    摘要: A method for manufacturing a semiconductor device includes forming a first pattern structure having a first opening on a lower structure comprising a semiconductor substrate. The first pattern structure includes a stacked pattern and a first spacer layer covering at least a side surface of the stacked pattern. A first flowable material layer including a SiOCH material is formed on the first spacer layer to fill the first opening and cover an upper portion of the first pattern structure. A first curing process including supplying a gaseous ammonia catalyst into the first flowable material layer is performed on the first flowable material layer to form a first cured material layer that includes water. A second curing process is performed on the first cured material layer to form a first low-k dielectric material layer. The first low-k dielectric material layer is planarized to form a planarized first low-k dielectric material layer.

    Variable resistance memory device and method of fabricating the same

    公开(公告)号:US11411179B2

    公开(公告)日:2022-08-09

    申请号:US16933123

    申请日:2020-07-20

    IPC分类号: H01L45/00 H01L27/24

    摘要: A method of fabricating a variable resistance memory device that includes forming a plurality of memory cells on a substrate. Each of the plurality of memory cells in a switching device and a variable resistance pattern. A capping structure is formed that commonly covers lateral side surfaces of the plurality of memory cells. An insulating gapfill layer is formed that covers the capping structure and fills a region between adjacent memory cells of the plurality of memory cells. The forming of the capping structure includes forming a second capping layer including silicon oxide that covers the lateral side surfaces of the plurality of memory cells. At least a partial portion of the second capping layer is nitrided by performing a first decoupled plasma process to form a third capping layer that includes silicon oxynitride.

    Semiconductor device and method of forming the same

    公开(公告)号:US11672130B2

    公开(公告)日:2023-06-06

    申请号:US17032571

    申请日:2020-09-25

    IPC分类号: H01L27/24 H01L45/00

    摘要: A semiconductor device and a method of forming the same are provided. The semiconductor device including a first conductive line on a substrate, memory cell structures stacked on the first conductive line, a second conductive line between the memory cell structures; and a third conductive line on the memory cell structures may be provided. Each of the plurality of memory cell structures includes a data storage material pattern, a switching material pattern, and a plurality of electrode patterns, at least one of the electrode patterns includes at least one of carbon material layer or a carbon-containing material layer, and the at least one of the electrode patterns includes a first region doped with a nitrogen and a second region that is not doped with the nitrogen, or is doped with the nitrogen at a first concentration lower than a second concentration of the nitrogen in the first region.

    Apparatus for and method of fabricating semiconductor device

    公开(公告)号:US11600776B2

    公开(公告)日:2023-03-07

    申请号:US17033460

    申请日:2020-09-25

    摘要: An apparatus of fabricating a semiconductor device may include a chamber including a housing and a slit valve used to open or close a portion of the housing, a heater chuck provided in a lower region of the housing and used to heat a substrate, a target provided over the heater chuck, a plasma electrode provided in an upper region of the housing and used to generate plasma on the target, a heat-dissipation shield surrounding the inner wall of the housing between the plasma electrode and the heater chuck, and an edge heating structure provided between the heat-dissipation shield and the inner wall of the housing and configured to heat the heat-dissipation shield and an edge region of the substrate and to reduce a difference in temperature between center and edge regions of the substrate.