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    ELECTROSTATIC CHUCK AND THIN FILM DEPOSITION APPARATUS INCLUDING THE SAME
    1.
    发明公开
    ELECTROSTATIC CHUCK AND THIN FILM DEPOSITION APPARATUS INCLUDING THE SAME 审中-公开

    公开(公告)号：US20240322713A1

    公开(公告)日：2024-09-26

    申请号：US18396845

    申请日：2023-12-27

    Applicant: Samsung Display Co., LTD.

    Inventor： MINCHUL SONG ,  MINGOO KANG ,  JUNHYEUK KO ,  Eui Gyu KIM ,  Sukha RYU ,  SANGHEON JEON

    IPC: H02N13/00 ,  B05C13/00 ,  B05C21/00

    CPC classification number: H02N13/00 ,  B05C13/00 ,  B05C21/005

    Abstract: A thin film deposition apparatus according to an embodiment includes a chamber, a deposition source disposed in a chamber and that supplies a deposition material to the substrate, a mask assembly comprising pattern holes through which the deposition material passes, and an electrostatic chuck facing the mask assembly and that fixes the substrate. The electrostatic chuck comprises a body that supports the substrate, an insulating layer disposed on the body, a first electrode disposed in the insulating layer and spaced apart from the body by a first distance, a second electrode disposed in the insulating layer and spaced apart from the body by a second distance, and a conductive layer disposed in the insulating layer and spaced apart from the body by a third distance. The first electrode and the second electrode are supplied with different voltages, and the third distance is greater than the first distance.

    SUBSTRATE LOADING DEVICE AND SUBSTRATE LOADING METHOD USING THE SAME
    4.
    发明公开
    SUBSTRATE LOADING DEVICE AND SUBSTRATE LOADING METHOD USING THE SAME 审中-公开

    公开(公告)号：US20240096679A1

    公开(公告)日：2024-03-21

    申请号：US18469684

    申请日：2023-09-19

    Applicant: Samsung Display Co., LTD.

    Inventor： JUNHYEUK KO ,  MINGOO KANG ,  MINSEOK KIM ,  MINCHUL SONG ,  Sukha Ryu ,  EUIGYU KIM

    IPC: H01L21/683 ,  H01L21/68

    CPC classification number: H01L21/6833 ,  H01L21/682

    Abstract: A substrate loading device includes an electrostatic chuck that chucks a substrate, a mask frame disposed under the electrostatic chuck, and including an edge having a flat top surface, and a plurality of holders disposed between the electrostatic chuck and the mask frame. Each of the plurality of holders includes a first connection part connected to a side of the electrostatic chuck, a second connection part connected to the first connection part and extending in a direction intersecting an extension direction of the first connection part, and a third connection part connected to the second connection part, extending in a direction intersecting an extension direction of the second connection part, and rotationally moving between a first position overlapping the substrate in a thickness direction of the substrate and a second position spaced apart from the substrate.

    MASK FRAME ASSEMBLY, MASK ASSEMBLY AND DEPOSITION APPARATUS INCLUDING MASK ASSEMBLY
    5.
    发明公开
    MASK FRAME ASSEMBLY, MASK ASSEMBLY AND DEPOSITION APPARATUS INCLUDING MASK ASSEMBLY 审中-公开

    公开(公告)号：US20240093350A1

    公开(公告)日：2024-03-21

    申请号：US18332895

    申请日：2023-06-12

    Applicant: Samsung Display Co., Ltd.

    Inventor： SEUNGJU HONG ,  Mina WOO ,  JONGDAE LEE ,  SOOHYUN MIN ,  JONGSUNG PARK ,  MINCHUL SONG ,  WONYOUNG JANG

    IPC: C23C14/04

    CPC classification number: C23C14/044 ,  H10K71/166

    Abstract: A mask frame assembly includes a mask frame including: a first surface including a first long side part extending in a first direction, a first short side part extending in a second direction intersecting the first direction, and a first recessed part extending in the first direction or the second direction, a second surface opposite to the first surface and including a second long side part extending in the first direction, a second short side part extending in the second direction, and a second recessed part disposed in the first direction or the second direction, a third surface connected to the first surface and the second surface and defining a frame opening part; a first support member disposed in the first recessed part; and a second support member disposed in the second recessed part.

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