公开(公告)号：US20240191337A1

公开(公告)日：2024-06-13

申请号：US18389138

申请日：2023-11-13

Applicant: Samsung Display Co., LTD.

Inventor： WONYOUNG JANG ,  JONGDAE LEE ,  SOOHYUN MIN ,  Mina WOO ,  SEUNGJU HONG

IPC: C23C14/04 ,  C23C14/24 ,  H10K71/16

CPC classification number: C23C14/042 ,  C23C14/24 ,  H10K71/166

Abstract: A deposition apparatus includes: a chamber; a stage defining a stage-opening therein and disposed inside the chamber; a frame disposed on the stage and defining a frame-opening therein corresponding to the stage-opening; a mask coupled to the frame and defining a plurality of deposition openings therein corresponding to the frame-opening; a deposition source configured to spray a deposition material to the frame-opening; alignment units coupled to the stage and contacting the frame to move a position of the frame on the stage; and correction units each of which includes a magnetic force part disposed on the stage and adjacent to the frame, and a driving part configured to provide a magnetic force to the magnetic force part, wherein the correction units are configured to change a shape of the frame, and are coupled to the stage.

公开(公告)号：US20250066898A1

公开(公告)日：2025-02-27

申请号：US18746778

申请日：2024-06-18

Applicant: Samsung Display Co., LTD.

Inventor： Mina WOO ,  Jongdae LEE ,  Jongbum KIM ,  Jongsung PARK

IPC: C23C14/04

Abstract: A mask assembly includes a mask frame including a plurality of ribs including a first rib extending in a first direction, the plurality of ribs defining an opening area, and a mask sheet disposed on a first surface of the first rib and covering the opening area, where the mask frame further includes a plurality of receiving portions disposed on a second surface of the first rib, and spaced apart from each other in a longitudinal direction of the first rib, the second surface being opposite to the first surface.

公开(公告)号：US20240425965A1

公开(公告)日：2024-12-26

申请号：US18631220

申请日：2024-04-10

Applicant: Samsung Display Co., Ltd.

Inventor： SEUNGJU HONG ,  JONGDAE LEE ,  SOOHYUN MIN ,  JONGSUNG PARK ,  Mina WOO ,  WONYOUNG JANG

IPC: C23C14/04 ,  H10K71/16

Abstract: A mask assembly includes a mask frame including a frame opening, a first stick disposed on the mask frame, overlapping the frame opening, and extending in a first direction to have a first length, a second stick disposed on the first stick, overlapping the frame opening, and extending in a second direction intersecting the first direction to have a second length longer than the first length, and a mask disposed on the second stick and including a mask opening overlapping the frame opening. The second stick includes a first center portion crossing the frame opening and a first end portion extending from the first center portion in the second direction.

公开(公告)号：US20240093350A1

公开(公告)日：2024-03-21

申请号：US18332895

申请日：2023-06-12

Applicant: Samsung Display Co., Ltd.

Inventor： SEUNGJU HONG ,  Mina WOO ,  JONGDAE LEE ,  SOOHYUN MIN ,  JONGSUNG PARK ,  MINCHUL SONG ,  WONYOUNG JANG

IPC: C23C14/04

CPC classification number: C23C14/044 ,  H10K71/166

Abstract: A mask frame assembly includes a mask frame including: a first surface including a first long side part extending in a first direction, a first short side part extending in a second direction intersecting the first direction, and a first recessed part extending in the first direction or the second direction, a second surface opposite to the first surface and including a second long side part extending in the first direction, a second short side part extending in the second direction, and a second recessed part disposed in the first direction or the second direction, a third surface connected to the first surface and the second surface and defining a frame opening part; a first support member disposed in the first recessed part; and a second support member disposed in the second recessed part.