公开(公告)号：US20160333469A1

公开(公告)日：2016-11-17

申请号：US14994906

申请日：2016-01-13

Applicant: Samsung Display Co., Ltd.

Inventor： Yoonchan OH ,  Jongho YANG ,  Youngsun CHO ,  Jaemin HONG

IPC: C23C16/04

CPC classification number: C23C14/042 ,  C23C16/042 ,  C23C16/4585

Abstract: A mask frame assembly and a manufacturing method of the same are provided. The mask frame assembly includes a frame unit having a plurality of frames to form an opening, a deposition mask extended in a first direction and fixed to the frame unit, and a gap adjusting unit installed between one frame and another frame disposed adjacent to the one frame among the plurality of frames, wherein the gap adjusting unit adjusts a distance between the one frame and the another frame.

Abstract translation: 提供了一种面罩框组件及其制造方法。 荫罩框架组件包括具有多个框架以形成开口的框架单元，沿第一方向延伸并固定到框架单元的沉积掩模，以及间隔调整单元，安装在一个框架和另一个框架之间，该框架与该框架相邻设置 在所述多个帧中，所述间隙调整单元调整所述一帧与所述另一帧之间的距离。

公开(公告)号：US20160296966A1

公开(公告)日：2016-10-13

申请号：US14882902

申请日：2015-10-14

Applicant: Samsung Display Co., Ltd.

Inventor： Jaemin HONG ,  Hyunseung Kang ,  Hanul Kwen ,  Jeunghoon Kim ,  Hanyoung Kim ,  Younghoon Roh ,  Jihye Seo ,  Wooyoung Jung ,  Pilseon Ji

IPC: B05D1/32

Abstract: A mask assembly for thin film deposition includes: a mask frame including an opening, the mask frame disposed surrounding the opening; and a mask unit including: first masks mounted on the mask frame, the first masks extending in a first direction; a second mask disposed on the first masks, the second mask including: one open hole; and at least one foreign substance discharge hole; and a third mask disposed on the second mask, the third mask extending in a second direction and including deposition holes, wherein the second direction crosses the first direction, and wherein a substrate is disposed on the third mask.

Abstract translation: 用于薄膜沉积的掩模组件包括：掩模框架，其包括开口，所述掩模框架围绕所述开口设置; 以及掩模单元，包括：安装在所述掩模框架上的第一掩模，所述第一掩模沿第一方向延伸; 设置在所述第一掩模上的第二掩模，所述第二掩模包括：一个开孔; 和至少一个异物排出孔; 以及设置在所述第二掩模上的第三掩模，所述第三掩模在第二方向上延伸并且包括沉积孔，其中所述第二方向跨越所述第一方向，并且其中在所述第三掩模上设置衬底。

公开(公告)号：US20210285086A1

公开(公告)日：2021-09-16

申请号：US16953123

申请日：2020-11-19

Applicant: Samsung Display Co., Ltd.

Inventor： Jeunghoon Kim ,  Seungmin Jin ,  Jaemin HONG

IPC: C23C14/04 ,  H01L51/52 ,  H01L51/56 ,  H01L51/00

Abstract: Provided are a method of manufacturing a mask that has a high precision configured to minimize a shadow effect, and a method of manufacturing a display device. The method of manufacturing a mask includes: tensioning a mask sheet; bonding the mask sheet that is tensioned to a mask frame; and forming an opening in the mask sheet by irradiating laser light on the mask sheet such that an inner wall of the opening has a slope with respect to a surface of the mask sheet.

公开(公告)号：US20160005970A1

公开(公告)日：2016-01-07

申请号：US14576394

申请日：2014-12-19

Applicant: Samsung Display Co., Ltd.

Inventor： Hanul KWEN ,  Junghoon KIM ,  Hanyoung KIM ,  Younghoon ROH ,  Wooyoung JUNG ,  Cheolgyu JEONG ,  Pilseon JI ,  Jaemin HONG

IPC: H01L51/00

CPC classification number: H01L51/0011 ,  C23C14/042 ,  C23C16/042 ,  H01L51/56

Abstract: Provided is a mask frame assembly for thin film deposition. The mask frame assembly includes a mask frame having an opening surrounded by the mask frame; and a support extending across the opening to support a mask on the mask frame. The support includes a support body, a plurality of ribs in the support body, and one or more patterned portions in spaces between the plurality of ribs, the one or more patterned portions having a different thickness than the ribs.

Abstract translation: 提供了一种用于薄膜沉积的掩模框架组件。 面罩框架组件包括具有由面罩框架包围的开口的面罩框架; 以及延伸穿过开口以支撑掩模框架上的掩模的支撑件。 支撑件包括支撑体，支撑体中的多个肋，以及多个肋之间的空间中的一个或多个图案化部分，所述一个或多个图案部分具有与肋不同的厚度。

公开(公告)号：US20210313548A1

公开(公告)日：2021-10-07

申请号：US17131254

申请日：2020-12-22

Applicant: Samsung Display Co., Ltd

Inventor： Youngkwang LEE ,  Sangyun LEE ,  Jaemin HONG

IPC: H01L51/56

Abstract: Provided are a mask frame assembly in which deformation of a frame may be reduced, and a method of manufacturing an organic light-emitting display apparatus using the mask frame assembly. The mask frame assembly includes a frame of a rectangular shape, the frame including an opening and a lower surface including first grooves extending in a first direction, a plurality of first auxiliary sticks extending in the first direction across the opening, wherein a first end and a second end of each of the first auxiliary sticks are bonded to an upper surface of the frame, a mask on the plurality of first auxiliary sticks, and a plurality of second auxiliary sticks arranged in the first grooves, wherein one end and an opposite end of each of the plurality of second auxiliary sticks are bonded to a bottom surface in each of the first grooves.

公开(公告)号：US20200181767A1

公开(公告)日：2020-06-11

申请号：US16788185

申请日：2020-02-11

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jaemin HONG

IPC: C23C16/04 ,  C23C14/04 ,  H01L51/00

Abstract: A deposition mask set includes a first mask, a second mask, and a third mask. Each of the first mask, second, and third masks includes a first edge substantially parallel to a first direction, a second edge substantially parallel to a second direction, and a plurality of first openings. Each of the openings includes a first opening side that is substantially parallel to a third direction and a second opening side that is substantially parallel to a fourth direction, and each of the openings corresponds to one of a first, second, or third color area at one of pixel areas. The third and fourth directions are not parallel to the first and second directions, and the first, second, and third color areas are adjacent to each other in the third direction.

公开(公告)号：US20160293899A1

公开(公告)日：2016-10-06

申请号：US14968746

申请日：2015-12-14

Applicant: Samsung Display Co., Ltd.

Inventor： Jaemin HONG

IPC: H01L51/56 ,  H01L27/32 ,  C23C16/04 ,  H01L51/00

Abstract: A manufacturing method of a display panel includes preparing a substrate including a display part having first and second display sides that are substantially parallel to first and second directions, respectively; defining a plurality of pixel areas on the substrate, the pixel areas being arranged in a matrix form along the first and second directions, each of the pixel areas including first and second area sides that are substantially parallel to third and fourth directions, respectively, the third and fourth directions being not parallel to the first and second directions; and depositing a first color material on the substrate using a first mask to form a first color layer in a first color area of each of the pixel areas. The first mask includes a first opening corresponding to the first color area of each of the pixel areas and includes first and second opening sides that are substantially parallel to the third and fourth directions, respectively.

Abstract translation: 一种显示面板的制造方法，包括：准备具有分别具有大致平行于第一和第二方向的第一显示侧和第二显示侧的显示部的基板; 在所述基板上限定多个像素区域，所述像素区域沿着所述第一和第二方向以矩阵形式布置，每个所述像素区域包括基本上平行于第三和第四方向的第一和第二区域侧， 第三和第四方向不平行于第一和第二方向; 以及使用第一掩模在所述基板上沉积第一颜色材料，以在每个像素区域的第一颜色区域中形成第一颜色层。 第一掩模包括对应于每个像素区域的第一颜色区域的第一开口，并且包括分别基本上平行于第三和第四方向的第一和第二开口侧。