公开(公告)号：US20160005970A1

公开(公告)日：2016-01-07

申请号：US14576394

申请日：2014-12-19

Applicant: Samsung Display Co., Ltd.

Inventor： Hanul KWEN ,  Junghoon KIM ,  Hanyoung KIM ,  Younghoon ROH ,  Wooyoung JUNG ,  Cheolgyu JEONG ,  Pilseon JI ,  Jaemin HONG

IPC: H01L51/00

CPC classification number: H01L51/0011 ,  C23C14/042 ,  C23C16/042 ,  H01L51/56

Abstract: Provided is a mask frame assembly for thin film deposition. The mask frame assembly includes a mask frame having an opening surrounded by the mask frame; and a support extending across the opening to support a mask on the mask frame. The support includes a support body, a plurality of ribs in the support body, and one or more patterned portions in spaces between the plurality of ribs, the one or more patterned portions having a different thickness than the ribs.

Abstract translation: 提供了一种用于薄膜沉积的掩模框架组件。 面罩框架组件包括具有由面罩框架包围的开口的面罩框架; 以及延伸穿过开口以支撑掩模框架上的掩模的支撑件。 支撑件包括支撑体，支撑体中的多个肋，以及多个肋之间的空间中的一个或多个图案化部分，所述一个或多个图案部分具有与肋不同的厚度。