Integrated Micro-Electromechanical Device of Semiconductor Material Having a Diaphragm

    公开(公告)号:US20190292045A1

    公开(公告)日:2019-09-26

    申请号:US16442199

    申请日:2019-06-14

    Abstract: A method for making an integrated micro-electromechanical device includes forming a first body of semiconductor material having a first face and a second face opposite the first face. The first body includes a buried cavity forming a diaphragm delimited between the buried cavity and the first face. The diaphragm is monolithic with the first body. The method further includes forming at least one first magnetic via extending between the second face and the buried cavity of the first body, forming a first magnetic region extending over the first face of the first body, and forming a first coil extending over the second face of the first body and being magnetically coupled to the first magnetic via.

    INTEGRATED OPTOELECTRONIC DEVICE AND SYSTEM WITH WAVEGUIDE AND MANUFACTURING PROCESS THEREOF
    6.
    发明申请
    INTEGRATED OPTOELECTRONIC DEVICE AND SYSTEM WITH WAVEGUIDE AND MANUFACTURING PROCESS THEREOF 有权
    集成光电装置及其制造方法及其制造方法

    公开(公告)号:US20140001493A1

    公开(公告)日:2014-01-02

    申请号:US13933858

    申请日:2013-07-02

    Abstract: An integrated electronic device, delimited by a first surface and by a second surface and including: a body made of semiconductor material, formed inside which is at least one optoelectronic component chosen between a detector and an emitter; and an optical path which is at least in part of a guided type and extends between the first surface and the second surface, the optical path traversing the body. The optoelectronic component is optically coupled, through the optical path, to a first portion of free space and a second portion of free space, which are arranged, respectively, above and underneath the first and second surfaces.

    Abstract translation: 一种集成的电子器件,由第一表面和第二表面限定,并包括:由半导体材料制成的主体,其内部是在检测器和发射极之间选择的至少一个光电元件; 以及光路,其至少部分地被引导并且在所述第一表面和所述第二表面之间延伸,所述光路穿过所述主体。 光电子部件通过光路被光耦合到自由空间的第一部分和自由空间的第二部分,其分别布置在第一和第二表面的上方和下方。

    Integrated circuit (IC) including semiconductor resistor and resistance compensation circuit and related methods

    公开(公告)号:US10153073B2

    公开(公告)日:2018-12-11

    申请号:US15614292

    申请日:2017-06-05

    Abstract: In one example, a method of compensating resistance in an integrated circuit includes providing a four terminal resistor in a semiconductor substrate. The resistor includes a first resistor and a second resistor coupled in series, a first terminal at a first end of the resistor, a second terminal at a second end of the resistor, a test terminal at a node connecting the first resistor and the second resistor, and a tuning terminal. The first resistor has a first conductivity type and the second resistor has a second conductivity type opposite to the first conductivity type. The first resistor includes a first portion extending along a first direction and a second portion extending along a second direction perpendicular to the first direction. The method further includes computing a voltage to be applied at the tuning terminal to compensate the difference between the resistance of the first and the second resistors.

    Integrated optoelectronic device and system with waveguide and manufacturing process thereof
    10.
    发明授权
    Integrated optoelectronic device and system with waveguide and manufacturing process thereof 有权
    具有波导的集成光电子器件及系统及其制造工艺

    公开(公告)号:US09202951B2

    公开(公告)日:2015-12-01

    申请号:US13933858

    申请日:2013-07-02

    Abstract: An integrated electronic device, delimited by a first surface and by a second surface and including: a body made of semiconductor material, formed inside which is at least one optoelectronic component chosen between a detector and an emitter; and an optical path which is at least in part of a guided type and extends between the first surface and the second surface, the optical path traversing the body. The optoelectronic component is optically coupled, through the optical path, to a first portion of free space and a second portion of free space, which are arranged, respectively, above and underneath the first and second surfaces.

    Abstract translation: 一种集成的电子器件,由第一表面和第二表面限定,并包括:由半导体材料制成的主体,其内部是在检测器和发射极之间选择的至少一个光电元件; 以及光路,其至少部分地被引导并且在所述第一表面和所述第二表面之间延伸,所述光路穿过所述主体。 光电子部件通过光路被光耦合到自由空间的第一部分和自由空间的第二部分,其分别布置在第一和第二表面的上方和下方。

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