Invention Grant
- Patent Title: Integrated circuit (IC) including semiconductor resistor and resistance compensation circuit and related methods
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Application No.: US15614292Application Date: 2017-06-05
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Publication No.: US10153073B2Publication Date: 2018-12-11
- Inventor: Alberto Pagani , Alessandro Motta
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza (MB)
- Assignee: STMicroelectronics S.R.L.
- Current Assignee: STMicroelectronics S.R.L.
- Current Assignee Address: IT Agrate Brianza (MB)
- Agency: Slater Matsil, LLP
- Main IPC: H01C7/10
- IPC: H01C7/10 ; H01L27/02 ; H01L49/02 ; H01L23/34 ; H01L29/36 ; H01L21/66

Abstract:
In one example, a method of compensating resistance in an integrated circuit includes providing a four terminal resistor in a semiconductor substrate. The resistor includes a first resistor and a second resistor coupled in series, a first terminal at a first end of the resistor, a second terminal at a second end of the resistor, a test terminal at a node connecting the first resistor and the second resistor, and a tuning terminal. The first resistor has a first conductivity type and the second resistor has a second conductivity type opposite to the first conductivity type. The first resistor includes a first portion extending along a first direction and a second portion extending along a second direction perpendicular to the first direction. The method further includes computing a voltage to be applied at the tuning terminal to compensate the difference between the resistance of the first and the second resistors.
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