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    INTEGRATED THERMAL SENSOR AND MANUFACTURING PROCESS THEREOF
    2.
    发明申请
    INTEGRATED THERMAL SENSOR AND MANUFACTURING PROCESS THEREOF 有权

    公开(公告)号：US20230087516A1

    公开(公告)日：2023-03-23

    申请号：US17931482

    申请日：2022-09-12

    Applicant: STMICROELECTRONICS S.R.L.

    Inventor： Enri DUQI ,  Maria Eloisa CASTAGNA

    IPC: H01L35/22 ,  H01L35/32 ,  H01L35/34

    Abstract: Integrated thermal sensor having a housing delimiting an internal space. A support region extends through the internal space; a plurality of thermocouple elements are carried by the support region and are electrically coupled to each other. Each thermocouple element is formed by a first and a second thermoelectrically active region of a first and, respectively, a second thermoelectrically active material, the first thermoelectrically active material having a first Seeback coefficient, the second thermoelectrically active material having a second Seeback coefficient, other than the first Seeback coefficient. At least one of the first and second thermoelectrically active regions is a silicon-based material. The first and second thermoelectrically active regions of each thermocouple element are formed by respective elongated regions extending at a mutual distance into the internal space of the housing, from and transversely to the support region.

    SEMICONDUCTOR INTEGRATED DEVICE WITH ELECTRICAL CONTACTS BETWEEN STACKED DIES AND CORRESPONDING MANUFACTURING PROCESS
    3.
    发明申请
    SEMICONDUCTOR INTEGRATED DEVICE WITH ELECTRICAL CONTACTS BETWEEN STACKED DIES AND CORRESPONDING MANUFACTURING PROCESS 有权

    公开(公告)号：US20210147222A1

    公开(公告)日：2021-05-20

    申请号：US17161367

    申请日：2021-01-28

    Applicant: STMICROELECTRONICS S.R.L.

    Inventor： Enri DUQI ,  Lorenzo BALDO ,  Domenico GIUSTI

    IPC: B81C1/00 ,  B81B7/00

    Abstract: An integrated device includes: a first die; a second die coupled in a stacked way on the first die along a vertical axis; a coupling region arranged between facing surfaces of the first die and of the second die, which face one another along the vertical axis and lie in a horizontal plane orthogonal to the vertical axis, for mechanical coupling of the first and second dies; electrical-contact elements carried by the facing surfaces of the first and second dies, aligned in pairs along the vertical axis; and conductive regions arranged between the pairs of electrical-contact elements carried by the facing surfaces of the first and second dies, for their electrical coupling. Supporting elements are arranged at the facing surface of at least one of the first and second dies and elastically support respective electrical-contact elements.

    WATERPROOF SWITCH ACTUATABLE BY A FLUID SUCH AS AIR AND USABLE IN PARTICULAR FOR ACTIVATING AN INHALATOR APPARATUS, SUCH AS AN ELECTRONIC CIGARETTE
    9.
    发明申请
    WATERPROOF SWITCH ACTUATABLE BY A FLUID SUCH AS AIR AND USABLE IN PARTICULAR FOR ACTIVATING AN INHALATOR APPARATUS, SUCH AS AN ELECTRONIC CIGARETTE 有权

    公开(公告)号：US20210114867A1

    公开(公告)日：2021-04-22

    申请号：US17072813

    申请日：2020-10-16

    Applicant: STMicroelectronics S.r.l.

    Inventor： Enri DUQI ,  Fabrizio CERINI ,  Lorenzo BALDO

    IPC: B81B7/02 ,  A24F40/51 ,  B81B7/00

    Abstract: A MEMS switch is actuatable by a fluid, and includes a piezoelectric pressure sensor that detects the movement of a fluid generating a negative pressure. The piezoelectric pressure sensor is formed by a chip of semiconductor material having a through cavity and a sensitive membrane, which extends over the through cavity and has a first and a second surface. The piezoelectric pressure sensor is mounted on a face of a board having a through hole so that the through cavity overlies and is in fluid connection with the through hole. The board has a fixing structure, which enables securing in an opening of a partition wall separating a first and a second space from each other. The board is arranged so that the first surface of the sensitive membrane faces the first space, and the second surface of the sensitive membrane faces the second space.

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