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公开(公告)号：US11495727B2
公开(公告)日：2022-11-08
申请号：US16860101
申请日：2020-04-28
摘要： A resonator element includes: a substrate; and an electrode that includes a first conductive layer provided on a surface of the substrate, and a second conductive layer, provided on the opposite side to the first conductive layer on the substrate side, which is disposed within an outer edge of the first conductive layer when seen in a plan view from a direction perpendicular to the surface.
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2.发明授权Resonator element, resonator, electronic device, electronic apparatus, mobile body and method of manufacturing resonator element 有权谐振器元件，谐振器，电子器件，电子设备，移动体以及制造谐振元件的方法公开(公告)号：US09450166B2
公开(公告)日：2016-09-20
申请号：US13910569
申请日：2013-06-05
CPC分类号： H01L41/0475 , H01L41/29 , H03H3/02 , H03H9/02086 , H03H9/0542 , H03H9/0547 , H03H9/0552 , H03H9/1021 , H03H9/131 , H03H9/17 , H03H9/177
摘要： A resonator element includes: a substrate; and an electrode that includes a first conductive layer provided on a surface of the substrate, and a second conductive layer, provided on the opposite side to the first conductive layer on the substrate side, which is disposed within an outer edge of the first conductive layer when seen in a plan view from a direction perpendicular to the surface.
摘要翻译： 谐振元件包括：基板; 以及电极，其包括设置在所述基板的表面上的第一导电层和设置在所述基板侧的与所述第一导电层相反的一侧上的第二导电层，所述第二导电层设置在所述第一导电层的外边缘内 当从垂直于表面的方向的平面图中观察时。
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3.发明授权公开(公告)号：US09837982B2
公开(公告)日：2017-12-05
申请号：US14682466
申请日：2015-04-09
发明人： Toshihiro Il , Matsutaro Naito
CPC分类号： H03H9/19 , H03B5/36 , H03H3/02 , H03H9/02023 , H03H9/02086 , H03H9/02149 , H03H9/02157 , H03H9/0509 , H03H9/0542 , H03H9/0547 , H03H9/0552 , H03H9/1021 , H03H9/177 , H03H2003/022
摘要： A vibrating element includes a piezoelectric substrate having an excitation section adapted to excite a thickness-shear vibration, and provided with a step section in each of side surfaces on both ends, and a peripheral section having a thickness smaller than a thickness of the excitation section, and the peripheral section has at least one projection section disposed on both principal surfaces in an area where a vibratory displacement when the excitation section excites a vibration is sufficiently attenuated.
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4.发明授权Resonator element, resonator, oscillator, electronic apparatus, and moving object 有权谐振器元件，谐振器，振荡器，电子设备和移动物体公开(公告)号：US09503045B2
公开(公告)日：2016-11-22
申请号：US14991602
申请日：2016-01-08
CPC分类号： H03H9/17 , H03B5/30 , H03B5/32 , H03H9/02062 , H03H9/02157 , H03H9/177 , H03H9/24 , H03H2009/02496
摘要： A resonator element includes a thick section, a middle section and a thin section, in which at least the thick section performs thickness shear vibration, in which a first step difference is provided at a boundary between the thick section and the middle section, and a second step difference is provided at a boundary between the middle section and the thin section, on one side of a direction of the thickness shear vibration, in which a first antinode of flexural vibration is located between the first step difference and the second step difference, and in which, a distance between the first antinode and the first step difference is indicated by d1, a distance between the first antinode and the second step difference is indicated by d2, and a wavelength of the flexural vibration is indicated by λ, a relationship of 0≦d1≦λ/8 and 0≦d2≦λ/8 is satisfied.
摘要翻译： 谐振器元件包括厚部分，中间部分和薄部分，其中至少厚部分执行厚度剪切振动，其中在厚部分和中间部分之间的边界处设置第一阶差，以及 在中间部分和薄部分之间的边界处，在厚度剪切振动的方向的一侧上提供第一步差，其中弯曲振动的第一波腹位于第一步差和第二步差之间， 其中，第一波腹与第一阶梯差之间的距离由d1表示，第一波腹与第二台阶差之间的距离由d2表示，弯曲振动的波长用λ表示， 0≤d1≤λ/ 8，0≤d2≤λ/ 8。
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5.发明授权公开(公告)号：US09496480B2
公开(公告)日：2016-11-15
申请号：US13845236
申请日：2013-03-18
发明人： Matsutaro Naito , Hideo Endo , Toshihiro Il
CPC分类号： H01L41/0825 , H03H9/02023 , H03H9/02157 , H03H9/0519 , H03H9/0542 , H03H9/0552 , H03H9/1021 , H03H9/177 , H03H9/19
摘要： When a size from a main surface of an outer edge to a step of a first stage of a vibration section is Md1, a size from the step of the first stage to a step of a second stage is Md2, a density of materials of the substrate is dA, a density of materials of the excitation electrode is dB, and a thickness of the excitation electrode on a main surface of a mesa of the second stage is tB, a relationship of ((Md2+(dB/dA)×tB))/Md1≦1.4 is satisfied.
摘要翻译： 当从外边缘的主表面到振动部分的第一阶段的步骤的尺寸为Md1时，从第一阶段的步骤到第二阶段的步骤的尺寸为Md2，材料的密度 基板为dA，激励电极的材料密度为dB，第二级台面的主表面上的激励电极的厚度为tB，（（Md2 +（dB / dA）×tB））的关系为 ）/Md1≤1.4。
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公开(公告)号：US09344056B2
公开(公告)日：2016-05-17
申请号：US14532444
申请日：2014-11-04
发明人： Matsutaro Naito , Manabu Kondo , Kensaku Isohata
IPC分类号： H03B5/32 , H01L41/047 , H01L41/053 , H03H9/10 , H03H9/13 , H03H9/19 , H03H9/17 , H01L41/09 , H03H9/05 , H03H9/02
CPC分类号： H03H9/17 , H01L41/047 , H01L41/053 , H01L41/092 , H03B5/32 , H03H9/02023 , H03H9/02102 , H03H9/0504 , H03H9/0514 , H03H9/0538 , H03H9/0547 , H03H9/10 , H03H9/1014 , H03H9/132 , H03H9/19
摘要： A resonator includes: a package; a support section that is provided on a surface of the package; and a vibration element in which an attachment section, which is disposed between an outer edge of a vibration substrate, in which excitation electrodes are provided on main surfaces thereof, and an outer edge of the excitation electrode, is attached to the support section through a conductive adhesive. The attachment section is disposed in a region S obtained by rotating a virtual line which connects the center of the vibration element and one end of the vibration element, in a range of −35° to +35° of a rotation angle θ about the center, and an attachment area becomes 0.7 mm2 or more.
摘要翻译： 谐振器包括：封装; 支撑部，其设置在所述包装的表面上; 以及振动元件，其中设置在其主表面上设置有激励电极的振动基板的外边缘与激励电极的外边缘之间的安装部分通过一个 导电胶。 安装部设置在通过旋转在旋转角度-35°〜+ 35°的范围内旋转将振动元件的中心与振动元件的一端连接的虚拟线而获得的区域S; 围绕中心，并且附接区域变为0.7mm 2以上。
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7.发明授权Piezoelectric vibration element, piezoelectric vibrator, piezoelectric oscillator, and electronic device 有权压电振动元件，压电振动器，压电振荡器和电子器件公开(公告)号：US09093634B2
公开(公告)日：2015-07-28
申请号：US14012338
申请日：2013-08-28
发明人： Toshihiro Il , Matsutaro Naito
IPC分类号： H01L41/047 , H01L41/053 , H01L41/09 , H03B1/00 , H03H9/17
CPC分类号： H03H9/19 , H01L41/047 , H03B5/36 , H03H9/0542 , H03H9/0552 , H03H9/1021 , H03H9/177
摘要： A piezoelectric vibration element includes: a piezoelectric substrate; excitation electrodes that are arranged so as to face each other on both principal faces of the piezoelectric substrate; drawn-out electrodes; and pads. The piezoelectric substrate includes an excitation portion that is located at the center and a peripheral portion that is thin-walled to be thinner than the thickness of the excitation portion and is disposed on a peripheral edge thereof. The pads have support areas that fix the piezoelectric substrate to a support member at positions of the piezoelectric substrate corresponding to corner portions. The excitation electrodes are formed over the excitation portion and a vibration area that is at least a part of the peripheral portion.
摘要翻译： 压电振动元件包括：压电基板; 励磁电极，被布置成在压电基板的两个主面上彼此面对; 拉出电极; 和垫。 压电基板包括位于中心的激励部分和薄壁的周边部分，其比激励部分的厚度薄，并且设置在其周边。 垫具有将压电基板固定在压电基板对应于拐角部分的位置处的支撑构件的支撑区域。 励磁电极形成在励磁部分上方，振动区域是周边部分的至少一部分。
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公开(公告)号：US09948275B2
公开(公告)日：2018-04-17
申请号：US14683891
申请日：2015-04-10
发明人： Toshihiro Il , Matsutaro Naito
CPC分类号： H03H9/19 , H01L41/047 , H03B5/36 , H03H9/0542 , H03H9/0552 , H03H9/1021 , H03H9/177
摘要： A piezoelectric vibration element includes a piezoelectric substrate including (i) an excitation portion and (ii) a peripheral portion that is integrally arranged at a periphery of the excitation portion and whose thickness is smaller than that of the excitation portion. The piezoelectric vibration element further includes excitation electrodes that are arranged in a front-and-rear relationship on front and rear principal faces of the piezoelectric substrate. The excitation portion includes a first portion that is at a location of a maximum thickness of the excitation portion and a side face that is connected to (i) a principal face of the first portion and (ii) a principal face of the peripheral portion. The side face includes level difference portions having a level difference and a face that has no level difference from the principal face of the first portion to the principal face of the peripheral portion.
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公开(公告)号：US09543922B2
公开(公告)日：2017-01-10
申请号：US14163512
申请日：2014-01-24
发明人： Matsutaro Naito , Yoshiyuki Aoshima
CPC分类号： H03H9/17 , H03H3/04 , H03H9/02157 , H03H9/177 , H03H2003/0435
摘要： A mesa-shaped piezoelectric resonator element including a resonator section having a thicker thickness than a peripheral section on the board surface of a piezoelectric substrate formed in a rectangular shape, wherein, when the length of the long side of the piezoelectric substrate is x and the board thickness of the resonator section is t, etching depth y of a level-difference section is set to fulfill a relationship in the following equation, based on the board thickness t. y = - 1.32 × ( x t ) + 43 ± 5 ( % )
摘要翻译： 一种台面状的压电谐振元件，其特征在于，具有厚度比形成为矩形的压电基板的基板表面的周边部的厚度大的谐振器部，其中，当所述压电基板的长边的长度为x时， 谐振器部分的板厚度为t，电平差部分的蚀刻深度y被设置为基于板厚度t满足以下等式中的关系。 y = - 132×x t + 43±5
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10.发明授权Resonating element, resonator, oscillator, electronic apparatus, and mobile object 有权谐振元件，谐振器，振荡器，电子设备和移动物体公开(公告)号：US09178471B2
公开(公告)日：2015-11-03
申请号：US13959986
申请日：2013-08-06
发明人： Matsutaro Naito , Toshiaki Sato , Jun Nishide , Takumi Suzuki
CPC分类号： H03B5/32 , H03H9/02023 , H03H9/0509 , H03H9/0547 , H03H9/1014 , H03H9/177 , H03H9/19 , H03H2003/0457
摘要： A resonating element has a quartz crystal substrate having a vibrating portion and a thin-walled portion that is thinner than the vibrating portion, and a pair of excitation electrodes respectively disposed on opposite surfaces of the vibrating portion. Moreover, in the excitation electrode, each of a pair of sides arranged in a Z′-axis direction is convexly curved toward the center so that the excitation electrode has a constricted portion in which a length in the Z′-axis direction increases gradually from a central portion toward both ends in an X-axis direction.
摘要翻译： 谐振元件具有石英晶体基板，其具有比振动部分薄的振动部分和薄壁部分，以及分别设置在振动部分的相对表面上的一对激励电极。 此外，在激励电极中，沿Z'轴方向排列的一对侧的每一侧朝向中心凸出弯曲，使得激励电极具有缩径部分，其中Z'轴方向上的长度从 朝向X轴方向两端的中央部。
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