发明授权
US09496480B2 Resonator element, resonator, electronic device and electronic apparatus
有权
谐振器元件，谐振器，电子设备和电子设备
- 专利标题： Resonator element, resonator, electronic device and electronic apparatus
- 专利标题（中）： 谐振器元件，谐振器，电子设备和电子设备
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申请号： US13845236申请日： 2013-03-18
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公开(公告)号： US09496480B2公开(公告)日： 2016-11-15
- 发明人: Matsutaro Naito , Hideo Endo , Toshihiro Il
- 申请人： Seiko Epson Corporation
- 申请人地址： JP
- 专利权人： Seiko Epson Corporation
- 当前专利权人： Seiko Epson Corporation
- 当前专利权人地址： JP
- 代理机构： Harness, Dickey & Pierce, P.L.C.
- 优先权： JP2012-063267 20120321
- 主分类号： H03H9/05
- IPC分类号： H03H9/05 ; H01L41/08 ; H03H9/02 ; H03H9/17 ; H03H9/19 ; H03H9/10
摘要：
When a size from a main surface of an outer edge to a step of a first stage of a vibration section is Md1, a size from the step of the first stage to a step of a second stage is Md2, a density of materials of the substrate is dA, a density of materials of the excitation electrode is dB, and a thickness of the excitation electrode on a main surface of a mesa of the second stage is tB, a relationship of ((Md2+(dB/dA)×tB))/Md1≦1.4 is satisfied.
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