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公开(公告)号：US10680158B2
公开(公告)日：2020-06-09
申请号：US16176552
申请日：2018-10-31
摘要： A resonator element includes: a substrate; and an electrode that includes a first conductive layer provided on a surface of the substrate, and a second conductive layer, provided on the opposite side to the first conductive layer on the substrate side, which is disposed within an outer edge of the first conductive layer when seen in a plan view from a direction perpendicular to the surface.
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公开(公告)号：US10147867B2
公开(公告)日：2018-12-04
申请号：US15165090
申请日：2016-05-26
IPC分类号： H01L41/04 , H01L41/047 , H01L41/29 , H03H3/02 , H03H9/02 , H03H9/05 , H03H9/10 , H03H9/13 , H03H9/17
摘要： A resonator element includes: a substrate; and an electrode that includes a first conductive layer provided on a surface of the substrate, and a second conductive layer, provided on the opposite side to the first conductive layer on the substrate side, which is disposed within an outer edge of the first conductive layer when seen in a plan view from a direction perpendicular to the surface.
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公开(公告)号：US11495727B2
公开(公告)日：2022-11-08
申请号：US16860101
申请日：2020-04-28
摘要： A resonator element includes: a substrate; and an electrode that includes a first conductive layer provided on a surface of the substrate, and a second conductive layer, provided on the opposite side to the first conductive layer on the substrate side, which is disposed within an outer edge of the first conductive layer when seen in a plan view from a direction perpendicular to the surface.
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4.发明授权Resonator element, resonator, electronic device, electronic apparatus, mobile body and method of manufacturing resonator element 有权谐振器元件，谐振器，电子器件，电子设备，移动体以及制造谐振元件的方法公开(公告)号：US09450166B2
公开(公告)日：2016-09-20
申请号：US13910569
申请日：2013-06-05
CPC分类号： H01L41/0475 , H01L41/29 , H03H3/02 , H03H9/02086 , H03H9/0542 , H03H9/0547 , H03H9/0552 , H03H9/1021 , H03H9/131 , H03H9/17 , H03H9/177
摘要： A resonator element includes: a substrate; and an electrode that includes a first conductive layer provided on a surface of the substrate, and a second conductive layer, provided on the opposite side to the first conductive layer on the substrate side, which is disposed within an outer edge of the first conductive layer when seen in a plan view from a direction perpendicular to the surface.
摘要翻译： 谐振元件包括：基板; 以及电极，其包括设置在所述基板的表面上的第一导电层和设置在所述基板侧的与所述第一导电层相反的一侧上的第二导电层，所述第二导电层设置在所述第一导电层的外边缘内 当从垂直于表面的方向的平面图中观察时。
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