摘要:
A metallic salt including at least one anion having a heterocyclic aromatic structure represented by one of Formulae 1 to 3; and a metallic cation: wherein, in Formulae 1 to 3, each X is independently N, P, or As, one of A1 and A2 is an electron-donating group, and the other one is an electron-withdrawing group, ring, Ar1 and ring Ar2 are as defined herein, L is a linker group as defined herein, m is an integer from 1 to 5, and n is an integer from 0 to 5.
摘要:
An organometallic compound represented by Formula 1: wherein in Formula 1, CY1, M, L, R1, R2, R3, R4, a1, a2, n1, and n2 are described in the specification.
摘要:
A carbazole compound represented by Formula 1 wherein, in Formula 1, X1, L1 to L5, R1 to R4, R11, R12, a1 to a5, b1 to b4, b11, b12, and c1 are described in the specification.
摘要:
Provided are an organic salt represented by Formula 1 below, a photoresist composition including the same, and a method of forming a pattern by using the photoresist composition:
For descriptions of L1, n1, R1, and A+ in Formula 1, refer to those provided herein.
摘要:
Provided is a photoresist composition including an organometallic compound including: a central metal; a first ligand compound; and a second ligand compound, wherein the first ligand compound bonds with the central metal, the second ligand compound does not bond with the central metal, and the first or second ligand compound includes a halogen element. The photoresist composition may improve photosensitivity while securing stability.
摘要:
Provided are a carboxylate salt represented by Formula 1, a photoresist composition including the same, and a pattern forming method using the same:
wherein A11, L11, L12, a11, a12, R11 to R13, b13, n11, n12, and M+ in Formula 1 are defined as described in the specification.
摘要:
Disclosed are a photoacid generator, a photoresist composition including the same, and a method of preparing the photoacid generator. The photoacid generator may include a compound represented by Formula 1:
wherein, in Formula 1, CY, A1, A2, and B are respectively described in the specification.
摘要:
Provided are a photoacid generator, a photoresist composition including the same, and a method of forming a pattern by using the photoacid generator. The photoacid generator includes a copolymer of a monomer that generates an acid upon exposure to light and an acid-labile monomer of which solubility with respect to a developing solvent is changed by decomposition by an acid, wherein the copolymer is represented by Formula 1:
wherein, in Formula 1, x, y, L, A−, B+, R1, R2, and R3 are each the same as described in the detailed description.