公开(公告)号：US20180130651A1

公开(公告)日：2018-05-10

申请号：US15727198

申请日：2017-10-06

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： VLADIMIR VOLYNETS ,  Protopopov Vladimir ,  Young Do Kim ,  Yuri Barsukov ,  Sang Heon Lee ,  Sung Ho Jang

IPC: H01J49/40 ,  G01J3/443 ,  H01J49/10 ,  H01J49/00 ,  H01J49/12 ,  H01L21/02 ,  C23C16/455 ,  H01J37/32 ,  H01L29/786

CPC classification number: H01J49/40 ,  C23C16/45502 ,  G01J3/2889 ,  G01J3/443 ,  H01J37/32963 ,  H01J49/0031 ,  H01J49/10 ,  H01J49/12 ,  H01J2237/327 ,  H01L21/02274 ,  H01L29/78696

Abstract: A pulsed plasma analyzer includes a pulse modulator that controls an off-time of a pulsed plasma that includes a target radical, an optical spectrometer that measures optical emissions of the pulsed plasma after the off-time to determine optical emission data, and a concentration estimating module that estimates a concentration of the target radical during the off-time based on an initial optical emission value of the optical emission data that changes as a function of the off-time, and outputs an estimated concentration.