METHOD OF FORMING A PLUG, METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SAME, POLISHING CHAMBER USED FOR MANUFACTURING THE SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR DEVICE
    2.
    发明申请
    METHOD OF FORMING A PLUG, METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SAME, POLISHING CHAMBER USED FOR MANUFACTURING THE SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR DEVICE 审中-公开
    形成插片的方法,制造使用其的半导体器件的方法,用于制造半导体器件的抛光室和半导体器件

    公开(公告)号:US20170040208A1

    公开(公告)日:2017-02-09

    申请号:US15142043

    申请日:2016-04-29

    IPC分类号: H01L21/768

    摘要: A method of forming a plug and manufacturing a semiconductor device, a polishing chamber, and a semiconductor device, the method of forming a plug including forming an opening in an insulating interlayer pattern on a substrate; forming a metal layer to fill the opening; performing a first CMP process during a first time period until a top surface of the insulating interlayer pattern is exposed while pressing the substrate onto a first polishing pad to polish the metal layer; performing a second CMP process during a second time period while pressing the substrate onto a second polishing pad to polish the metal layer and the insulating interlayer pattern, so that a metal plug is formed in the insulating interlayer pattern; and performing a first cleaning process on the second polishing pad while keeping the substrate spaced apart from the second polishing pad on the second platen.

    摘要翻译: 一种形成插头并制造半导体器件,抛光室和半导体器件的方法,包括在衬底上形成绝缘层间图案中的开口的形成插头的方法; 形成金属层以填充开口; 在第一时间段内执行第一CMP处理直到绝缘层间图案的顶表面暴露,同时将基板压在第一抛光垫上以抛光金属层; 在第二时间段内执行第二CMP处理,同时将衬底按压到第二抛光垫上以抛光金属层和绝缘层间图案,从而在绝缘层间图案中形成金属插塞; 以及在所述第二台板上保持与所述第二抛光垫间隔开的所述基板的同时对所述第二抛光垫进行第一清洁处理。

    DOWNLINK CONTROL CHANNEL DECODING METHOD AND DEVICE FOR LOW POWER CONSUMPTION IN WIRELESS COMMUNICATION SYSTEM

    公开(公告)号:US20200177306A1

    公开(公告)日:2020-06-04

    申请号:US16632109

    申请日:2018-07-17

    IPC分类号: H04L1/00 H04W72/04 H04W76/11

    摘要: Disclosed in one embodiment is a downlink control channel decoding method of a wireless communication system, comprising the steps of: receiving setting information on a first resource and a second resource; blind-decoding reception signals on PDCCH resource candidates within the first resource determined by the setting information, so as to search for a PDCCH of the first resource; and blind-decoding reception signals on PDCCH resource candidates within the second resource determined by the setting information, and by blind-decoding, among the resource candidates, the remaining one or more resource candidates excluding one or more resource candidates, which include a resource area overlapping with the PDCCH having been searched for, so as to search for a PDCCH of the second resource. Therefore, since the number of PDCCH resource candidates required for blind-decoding is adjusted on the basis of an overlapping resource area, power consumption of a terminal can be reduced.

    METHOD AND DEVICE FOR RECEIVING BROADCAST INFORMATION IN COMMUNICATION SYSTEM

    公开(公告)号:US20180159671A1

    公开(公告)日:2018-06-07

    申请号:US15576063

    申请日:2016-05-20

    IPC分类号: H04L5/00 H04W72/04

    摘要: Disclosed are a communication technique for merging, with IoT technology, a 5G communication system for supporting a data transmission rate higher than that of a 4G system, and a system therefor. The disclosed communication technique and system therefor can be applied to intelligent services (for example, smart home, smart building, smart city, smart car or connected car, health care, digital education, retail, security and safety related services, and the like) on the basis of 5G communication technology and IoT-related technology. The present disclosure relates to a method and a device for receiving, by a terminal, broadcast information in a communication system. According to an embodiment of the present disclosure, the method by which a terminal receives broadcast information in a communication system comprises the steps of: receiving a plurality of radio frames from a base station; extracting at least one broadcasting channel signal from the plurality of radio frames in every set period; combining, for a preset time slot, the at least one broadcasting channel signal extracted in every set period; and acquiring broadcast information by decoding the combined broadcasting channel signal.