公开(公告)号：US20060289806A1

公开(公告)日：2006-12-28

申请号：US11168785

申请日：2005-06-28

Applicant: Rodney Simmons ,  John Viatella ,  Jerzy Hoffman ,  R. Webb ,  Alexander Bykanov ,  Oleh Khodykin

Inventor： Rodney Simmons ,  John Viatella ,  Jerzy Hoffman ,  R. Webb ,  Alexander Bykanov ,  Oleh Khodykin

IPC: G21G4/00

CPC classification number: H05G2/001

Abstract: A laser produced plasma (“LPP”) extreme ultraviolet (“EUV”) light source and method of operating same is disclosed which may comprise an EUV plasma production chamber having a chamber wall; a drive laser entrance window in the chamber wall; a drive laser entrance enclosure intermediate the entrance window and a plasma initiation site within the chamber and comprising an entrance enclosure distal end opening; at least one aperture plate intermediate the distal opening and the entrance window comprising at least one drive laser passage aperture. The at least one aperture plate may comprise at least two aperture plates comprising a first aperture plate and a second aperture plate defining an aperture plate interim space. The at least one drive laser aperture passage may comprise at least two drive laser aperture passages. The laser passage aperture may define an opening large enough to let the drive laser beam pass without attenuation and small enough to substantially reduce debris passing through the laser passage aperture in the direction of the entrance window.

Abstract translation: 公开了一种激光产生的等离子体（“LPP”）极紫外（“EUV”）光源及其操作方法，其可以包括具有室壁的EUV等离子体生产室; 在室壁中的驱动激光入口窗口; 在入口窗口中间的驱动激光入口外壳和腔室内的等离子体起始位置，并且包括入口外壳远端开口; 在远端开口和入口窗之间的至少一个孔板包括至少一个驱动激光通道孔。 至少一个孔板可以包括至少两个孔板，其包括限定孔板中间空间的第一孔板和第二孔板。 至少一个驱动激光孔通道可以包括至少两个驱动激光孔通道。 激光通道孔可以限定足够大的开口，使得驱动激光束通过而不衰减，并且足够小以基本上减少通过入口窗口方向的穿过激光通道孔的碎屑。

公开(公告)号：US20070161340A1

公开(公告)日：2007-07-12

申请号：US11543174

申请日：2006-10-02

Applicant: R. Webb

Inventor： R. Webb

IPC: B24C5/04

CPC classification number: B24C1/00

Abstract: Water jet milled ribbed silicon carbide mirrors and a method of making the mirrors. In a preferred embodiment the component is a light weight silicon carbide mirror fabricated with water jet milling from a solid silicon carbide work piece. A prior art water jet cutting process has typically cuts edges, slots, and holes is utilized in a controlled-depth application where the jet does not pass all the way through the silicon carbide work piece. In preferred embodiments the silicon carbide material is a product of a chemical vapor composite process such as that described in U.S. Pat. Nos. 5,154,862 and 5,348,765

Abstract translation: 水喷磨磨肋碳化硅镜和制造镜子的方法。 在优选实施例中，该部件是由固体碳化硅工件进行水喷射研磨制成的重量轻的碳化硅反射镜。 现有技术的水射流切割工艺通常切割边缘，狭槽和孔被用于受控深度应用，其中射流不贯穿碳化硅工件。 在优选的实施方案中，碳化硅材料是化学气相复合工艺的产物，例如美国专利No. 第5,154,862和5,348,765号

公开(公告)号：US20070207268A1

公开(公告)日：2007-09-06

申请号：US11249860

申请日：2005-10-12

Applicant: R. Webb ,  Ronald Chand ,  Clifford Tanaka ,  Colby Foss

Inventor： R. Webb ,  Ronald Chand ,  Clifford Tanaka ,  Colby Foss

IPC: C23C16/26 ,  C23C16/00

CPC classification number: C23C16/325 ,  C04B35/565 ,  C04B2235/6028 ,  C04B2235/94 ,  C04B2235/9653 ,  C23C16/56 ,  Y02T50/67

Abstract: A process for making a ribbed light weight composite mirror unit. Preferred embodiments are silicon carbide composite structures. Preferred structures comprise a front smooth silicon carbide surface supported by a silicon carbide ribbed back support. The ribbed back support may be produce by milling out portions of SiC block or by the joining of multiple simple shapes to form the ribbed support. At least the smooth front SiC surface is produced using a chemical vapor composite process as described in the Background Section. These include very large mirrors that resist gravitational sagging and smaller scanning and stepping mirrors that can be pointed quickly and accurately with minimal hysteresis. Preferred milling techniques include precision water jet milling. Special bonding techniques are described to produce ribbed support from multiple parts.

Abstract translation: 制造带肋轻质复合镜单元的方法。 优选的实施方案是碳化硅复合结构。 优选的结构包括由碳化硅肋背支撑支撑的前平滑碳化硅表面。 肋背支撑件可以通过铣削SiC块的部分或通过多个简单形状的连接来形成肋状支撑件来产生。 使用如背景技术部分中所述的化学气相复合方法，至少形成光滑的前表面SiC表面。 这些包括非常大的反射镜抵抗重力下垂和较小的扫描和步进镜，可以快速准确地以最小的滞后指向。 优选的铣削技术包括精密喷水铣削。 描述了特殊粘合技术以从多个部分产生肋状支撑。

公开(公告)号：US20060283317A1

公开(公告)日：2006-12-21

申请号：US11184509

申请日：2005-07-18

Applicant: Stephan Melnychuk ,  Howard Hyman ,  David Sandler ,  R. Webb

Inventor： Stephan Melnychuk ,  Howard Hyman ,  David Sandler ,  R. Webb

IPC: B64D1/04 ,  F41G3/08 ,  F41G3/12

CPC classification number: F41G3/147 ,  G01S3/7864 ,  G01S17/023 ,  G01S17/66

Abstract: A projectile tracking system for acquiring and precisely tracking a projectile in flight in order to reveal the source from which the projectile was fired. The source is revealed by the back projection of a 3-dimensional track file. In preferred embodiments the system is installed on a vehicle, such as an un-manned blimp or other aircraft, road vehicle or ship, for locating and destroying small arms fire directed at the vehicle. A kill system may also be included on the vehicle to destroy the source of the projectile.

Abstract translation: 一种用于在飞行中获取和精确跟踪射弹的射弹跟踪系统，以揭示射弹被射击的根源。 来源通过三维轨道文件的背投显示。 在优选实施例中，系统安装在诸如无人值班飞行器或其他飞机，道路车辆或船舶的车辆上，用于定位和销毁针对车辆的小武器。 车辆上也可能包括一个杀死系统，以摧毁射弹的来源。

公开(公告)号：US20070160103A1

公开(公告)日：2007-07-12

申请号：US11715082

申请日：2007-03-06

Applicant: Palash Das ,  Khurshid Ahmed ,  Gregory Francis ,  Holger Glatzel ,  Alexei Lukashev ,  Jeremy Tyler ,  R. Webb

Inventor： Palash Das ,  Khurshid Ahmed ,  Gregory Francis ,  Holger Glatzel ,  Alexei Lukashev ,  Jeremy Tyler ,  R. Webb

IPC: H01S3/22

CPC classification number: B23K26/12 ,  B23K26/128 ,  B23K26/705 ,  G01J1/04 ,  G01J1/0418 ,  G01J1/4257 ,  G01J2001/0285 ,  G03F7/70025 ,  G03F7/70041 ,  G03F7/7055 ,  G03F7/70575 ,  G03F7/70933 ,  H01S3/005 ,  H01S3/0057 ,  H01S3/0071 ,  H01S3/02 ,  H01S3/03 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0385 ,  H01S3/0404 ,  H01S3/041 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/0943 ,  H01S3/097 ,  H01S3/09705 ,  H01S3/0971 ,  H01S3/0975 ,  H01S3/104 ,  H01S3/105 ,  H01S3/1305 ,  H01S3/134 ,  H01S3/139 ,  H01S3/22 ,  H01S3/2207 ,  H01S3/223 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/2258 ,  H01S3/2333 ,  H01S3/2366

Abstract: A beam delivery unit and method of delivering a laser beam from a laser light source for excimer or molecular fluorine gas discharge laser systems in the DUV and smaller wavelengths is disclosed, which may comprise: a beam delivery enclosure defining an output laser light pulse beam delivery path from an output of a gas discharge laser to an input of a working apparatus employing the light contained in the output laser light pulse beam; a purge mechanism operatively connected to the beam delivery enclosure; an in-situ beam parameter monitor and adjustment mechanism within the enclosure, comprising a retractable beam redirecting optic; a beam analysis mechanism external to the enclosure; and, a retraction mechanism within the enclosure and operable from outside the enclosure and operative to move the retractable beam redirecting optic from a retracted position out of the beam path to an operative position in the beam path. The BDU may also include a beam attenuator unit contained within the enclosure adjustably mounted within the enclosure for positioning within the beam delivery path. The BDU may have at least two enclosure isolation mechanisms comprising a first enclosure isolation mechanism on a first side of the enclosure from the at least one optic module and a second enclosure isolation mechanism on a second side of the enclosure from the at least one optic module, each respective enclosure isolation mechanism comprising a flapper valve having a metal to metal seating mechanism and a locking pin assembly. A precision offset ratchet driver operative to manipulate actuator mechanisms in difficult to reach locations may be provided. An external kinematic alignment tool may be provided. A method of contamination control for a BDU is disclosed comprising selection of allowable materials and fabrication processes.

Abstract translation: 公开了一种束传递单元和从DUV和较小波长的准分子或分子氟气体放电激光系统的激光光源传送激光束的方法，其可以包括：限定输出激光束脉冲束传送 从气体放电激光器的输出到使用包含在输出激光脉冲光束中的光的工作装置的输入的路径; 可操作地连接到射束输送罩的清洗机构; 壳体内的原位光束参数监视和调节机构，包括可伸缩光束重定向光学元件; 外壳外部的光束分析机构; 以及在所述外壳内的收缩机构，并且可从所述外壳的外部操作，并且可操作地将所述可伸缩的束重定向光学器件从缩回位置移出所述光束路径到所述光束路径中的操作位置。 BDU还可以包括容纳在可调节地安装在外壳内的外壳内的光束衰减器单元，用于定位在光束输送路径内。 BDU可以具有至少两个机壳隔离机构，该机构包括位于外壳的第一侧面上的至少一个光学模块的第一外壳隔离机构和位于外壳的第二侧的第二外壳隔离机构，所述第二外壳隔离机构与所述至少一个光学模块 每个相应的外壳隔离机构包括具有金属对金属安置机构和锁销组件的挡板阀。 可以提供操作来操作难以到达位置的致动器机构的精密偏移棘轮驱动器。 可以提供外部运动学对准工具。 公开了一种用于BDU的污染控制方法，包括选择允许的材料和制造工艺。

公开(公告)号：US20060237092A1

公开(公告)日：2006-10-26

申请号：US11113651

申请日：2005-04-25

Applicant: R. Webb

Inventor： R. Webb

IPC: B65B1/04

CPC classification number: B67D7/78 ,  B60S5/02 ,  E04H1/1233

Abstract: An aboveground fueling facility includes one or more vertical fuel supply tanks, each of which is positioned on a reinforced mounting pad on a fueling island that also includes one or more fuel dispensers. Fuel is supplied from the vertical fuel supply tanks to the dispensers via piping that is secondarily contained within the reinforced mounting pad. Each of the vertical fuel supply tanks may have more than one compartment so as to permit different grades of fuel to be dispensed by the dispensers, including mixtures. Fueling lanes are defined between the vertical fuel supply tanks for permitting vehicular access to the fuel dispensers. A canopy for sheltering the fueling lanes is structurally supported by the vertical fuel supply tanks, and informational signage is provided on the canopy for providing information such as fuel pricing to the consumer.

Abstract translation: 地上加油设备包括一个或多个垂直燃料供应罐，每个立式燃料供应罐都位于加油岛上的加强安装垫上，该加压安装垫还包括一个或多个燃料分配器。 燃料从立式燃料供应罐通过管道供给到分配器，该管道被二次包含在加强的安装垫中。 每个垂直燃料供应罐可以具有多于一个隔室，以便允许由分配器（包括混合物）分配不同等级的燃料。 在立式燃料供应罐之间限定加油车道，以允许车辆进入燃料分配器。 用于庇护燃油通道的舱盖在垂直燃料供应罐的结构上得到支撑，并且在舱盖上提供信息标识，以向消费者提供燃料定价等信息。

公开(公告)号：US20060195078A1

公开(公告)日：2006-08-31

申请号：US11277477

申请日：2006-03-24

Applicant: R. Webb ,  Michael Brownell ,  Christopher Horvath ,  Tibor Juhasz ,  Ronald Kurtz ,  Leszlo Nagy ,  Mark Ross ,  Carlos Suarez

Inventor： R. Webb ,  Michael Brownell ,  Christopher Horvath ,  Tibor Juhasz ,  Ronald Kurtz ,  Leszlo Nagy ,  Mark Ross ,  Carlos Suarez

IPC: A61B18/18

CPC classification number: A61F9/009 ,  A61B2017/306 ,  A61F9/008 ,  A61F2009/00846

Abstract: An interface for coupling an eye to a surgical laser is disclosed. A lens cone includes a base ring opposite an apex ring. The base ring defines a first plane and is adapted to couple to the delivery tip of the laser such that the first plane has a predetermined position relative to the delivery tip. An applanation lens is affixed to the apex ring and has a surface disposed in a second plane such that the second plane is parallel to and has a predetermined position relative to the first plane. A gripper is engagable with the lens cone. An attachment ring is affixed to the gripper and is adapted to couple to the anterior surface of the eye. When the lens cone and gripper are engaged, the applanation lens contacts the anterior surface of the eye, placing the anterior surface in spatial registration with the delivery tip.

Abstract translation: 公开了一种用于将眼睛联接到手术激光器的界面。 透镜锥体包括与顶点环相对的基座环。 基座限定第一平面并且适于联接到激光器的输送末端，使得第一平面相对于输送末端具有预定位置。 压平透镜固定到顶点环上，并且具有设置在第二平面中的表面，使得第二平面相对于第一平面平行并具有预定位置。 夹具可与透镜锥接合。 附接环固定在夹持器上并适于联接到眼睛的前表面。 当透镜锥体和夹持器接合时，压平透镜接触眼睛的前表面，将前表面与输送尖端空间对准。