公开(公告)号：US20190107569A1

公开(公告)日：2019-04-11

申请号：US15730486

申请日：2017-10-11

Applicant: QUALCOMM Incorporated

Inventor： David Kidd ,  Ardavan Moassessi ,  Angelo Pinto ,  Albert Kumar ,  Yi Lou ,  Bipin Duggal ,  Amar Gulhane ,  Michael Bourland ,  Mustafa Badaroglu ,  Paul Penzes

IPC: G01R31/02 ,  G01R31/28 ,  G01R31/36 ,  H01L21/66

Abstract: Aspects of the disclosure includes a transistor-under-test (TUT) to charge/discharge a capacitor; changing an oscillation state when a capacitor voltage crosses a threshold and turning OFF the TUT; discharging the capacitor using the TUT; commencing precharging the capacitor after detecting the capacitor reaches a transition voltage; commencing discharging the capacitor after a precharger time delay; sustaining a relaxation oscillator waveform, wherein the relaxation oscillator waveform is based on turning OFF/ON the TUT; and generating a digital representation of a TUT current associated with a relaxation oscillator period of the relaxation oscillator waveform. For example, a measurement tile includes a pulse generator to sustain the relaxation oscillator waveform with the relaxation oscillator period associated with an inverse TUT current; and a precharger charging a capacitor and the TUT charging/discharging the capacitor, wherein the relaxation oscillator waveform is based on turning OFF/ON the TUT in accordance with discharging and charging the capacitor.

公开(公告)号：US11011459B1

公开(公告)日：2021-05-18

申请号：US16784054

申请日：2020-02-06

Applicant: QUALCOMM Incorporated

Inventor： Samy Shafik Tawfik Zaynoun ,  David Kidd

IPC: H01L23/498 ,  H01L23/00

Abstract: An integrated circuit (IC), including a substrate and back-end-of-line (BEOL) layers on the substrate is described. The IC includes a sensor in a BEOL layer (Mx) of the BEOL layers. The BEOL sensor includes conductive traces and shield traces interdigitated with the conductive traces in the BEOL layer Mx. The BEOL sensor also includes a first ground shield in a BEOL layer Mx−1, and a second ground shield in a BEOL layer Mx+1. The BEOL sensor further includes logic configured to ground/float the shield traces.

公开(公告)号：US11139802B1

公开(公告)日：2021-10-05

申请号：US16930187

申请日：2020-07-15

Applicant: QUALCOMM Incorporated

Inventor： Percy Tehmul Marfatia ,  David Kidd

IPC: H03K3/03 ,  H03K5/133 ,  H03L7/099 ,  H01L21/66

Abstract: A ring oscillator is disclosed according to certain aspects of the present disclosure. The ring oscillator include N flip-flops, each of the N flip-flops having a data input, a clock input, and an output, wherein N is an integer greater than 1. In certain aspects, the output of each of the N flip-flops is coupled to the clock input of an adjacent other one of the N flip-flops, the output of each of the N flip-flops is coupled to a reset input or a preset input of a non-adjacent other one of the N flip-flops, and the data input of each of the N flip-flops is coupled to a voltage line or a ground line.

公开(公告)号：US11823962B2

公开(公告)日：2023-11-21

申请号：US17180652

申请日：2021-02-19

Applicant: QUALCOMM Incorporated

Inventor： Saravanan Marimuthu ,  De Lu ,  Baldeo Sharan Sharma ,  Peeyush Kumar Parkar ,  Venkat Narayanan ,  Rui Li ,  Samy Shafik Tawfik Zaynoun ,  Min Chen ,  David Kidd ,  Amit Patil

IPC: H01L21/66 ,  G06F30/398

CPC classification number: H01L22/14 ,  G06F30/398 ,  H01L22/34

Abstract: Aspects of the disclosure are directed to sensing integrated circuit (IC) Back End Of Line (BEOL) process corners. In one aspect, an apparatus for sensing IC BEOL process corners includes a ring oscillator including a plurality of ring oscillator stages configured to generate an output waveform with a frequency state; and a shield net circuit including a plurality of shield net stages corresponding to the plurality of ring oscillator stages, the shield net circuit having a toggle input. And, a method includes generating an output waveform with a frequency state using a ring oscillator that includes a plurality of ring oscillator stages; modifying a plurality of ring oscillator stage time delays through a coupling between a plurality of shield net stages and the plurality of ring oscillator stages; and selecting the frequency state using a toggle input of a shield net circuit which includes the plurality of shield net stages.