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公开(公告)号:US20190019648A1
公开(公告)日:2019-01-17
申请号:US16128441
申请日:2018-09-11
Applicant: Purdue Research Foundation
Inventor: Liang Pan , Xianfan Xu
IPC: H01J37/10 , H01J37/317 , H01J37/12 , H01J37/06 , G02B5/00 , H01J37/073
Abstract: A system for generating an electron beam array, comprising a light source, a first substrate having a plurality of plasmonic lenses mounted thereon, the plasmonic lenses configured to received light from the light source and produce an electron emission, and a plurality of electrostatic microlenses configured to focus the electron emissions into a beam for focusing on a wafer substrate. A light source modulator and digital micro mirror may be included which captures light from the light source and projects light beamlets on the plasmonic lenses.
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公开(公告)号:US20240191004A1
公开(公告)日:2024-06-13
申请号:US18539218
申请日:2023-12-13
Applicant: Purdue Research Foundation
Inventor: Liang Pan , Xianfan Xu , Bryan William Boudouris
IPC: C08F2/50 , B29C64/135 , B29C64/20 , B33Y10/00 , B33Y30/00 , B33Y70/00 , C08F222/10
CPC classification number: C08F2/50 , B29C64/135 , B29C64/20 , B33Y10/00 , B33Y30/00 , B33Y70/00 , C08F222/102 , C08F222/103 , C08F222/105 , B29K2105/0005
Abstract: A three-dimensional nanolithography system includes forming a photocurable resin including one or more organic monomers, a photoinitiator, and an inhibitor, defining a lithographical patterning region, directing a light beam toward the lithographical patterning region to initiate polymerization, and controlling an initiator depletion technique to reduce an undesired portion of the polymerization.
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公开(公告)号:US10074509B2
公开(公告)日:2018-09-11
申请号:US15176147
申请日:2016-06-07
Applicant: Purdue Research Foundation
Inventor: Liang Pan , Xianfan Xu
IPC: H01J37/317 , H01J37/06 , H01J37/10 , H01J37/12
CPC classification number: H01J37/10 , G02B5/008 , H01J37/06 , H01J37/073 , H01J37/12 , H01J37/3174 , H01J37/3177 , H01J2201/342 , H01J2237/0492 , H01J2237/062 , H01J2237/06333 , H01J2237/202 , H01J2237/20221
Abstract: A system for generating an electron beam array, comprising a light source, a first substrate having a plurality of plasmonic lenses mounted thereon, the plasmonic lenses configured to received light from the light source and produce an electron emission, and a plurality of electrostatic microlenses configured to focus the electron emissions into a beam for focusing on a wafer substrate. A light source modulator and digital micro mirror may be included which captures light from the light source and projects light beamlets on the plasmonic lenses.
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公开(公告)号:US20250073989A1
公开(公告)日:2025-03-06
申请号:US18818417
申请日:2024-08-28
Applicant: Purdue Research Foundation
Inventor: Liang Pan , Xianfan Xu , Bryan W. Boudouris
IPC: B29C64/129 , B29C64/268 , B29C64/277 , B33Y10/00 , B33Y30/00 , B82Y40/00
Abstract: A method of additive manufacturing includes directing a first photon beam onto a resin and directing a second photon beam onto the resin to generate a reactive species from the initiator molecule to thereby polymerize a portion of the resin. The resin includes an initiator molecule and a sensitizer molecule. The first photon beam simultaneously excites each of the initiator molecule and the sensitizer molecule, transitions each of the initiator molecule and the sensitizer molecule into their respective singlet excited states; and transfers, at least one of energy or electrons, from the singlet excited state of the sensitizer molecule to the initiator molecule.
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公开(公告)号:US11305482B2
公开(公告)日:2022-04-19
申请号:US15652105
申请日:2017-07-17
Applicant: Purdue Research Foundation
Inventor: Xianfan Xu , Bryan William Boudouris , Liang Pan
IPC: B29C64/129 , B29C64/135 , B29C64/245 , B29C64/268 , B33Y10/00 , B33Y30/00
Abstract: A rapidly printing 3D nanostructures arrangement, comprising a first photonic source configured to provide photoinitiation energy to a polymer medium via a dynamic light spatial modulator to an excited state to initiate polymerization, a second photonic source configured to selectively provide inhibition energy to the polymerized medium to a depleted state to inhibit polymerization thereby generating a dead zone below a growth zone, the dead zone allows continuous 3D polymerization.
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公开(公告)号:US10861668B2
公开(公告)日:2020-12-08
申请号:US16128441
申请日:2018-09-11
Applicant: Purdue Research Foundation
Inventor: Liang Pan , Xianfan Xu
IPC: H01J37/10 , H01J37/06 , H01J37/12 , H01J37/317 , G02B5/00 , H01J37/073
Abstract: A system for generating an electron beam array, comprising a light source, a first substrate having a plurality of plasmonic lenses mounted thereon, the plasmonic lenses configured to received light from the light source and produce an electron emission, and a plurality of electrostatic microlenses configured to focus the electron emissions into a beam for focusing on a wafer substrate. A light source modulator and digital micro mirror may be included which captures light from the light source and projects light beamlets on the plasmonic lenses.
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公开(公告)号:US10000384B2
公开(公告)日:2018-06-19
申请号:US13906057
申请日:2013-05-30
Applicant: Purdue Research Foundation
Inventor: Xianfan Xu , Dapeng Wei , Peide Ye
IPC: C01B31/04 , C01B32/184 , B82Y30/00 , B82Y40/00 , C30B29/18
CPC classification number: C01B32/184 , B82Y30/00 , B82Y40/00 , C30B29/18
Abstract: A method of forming single and few layer graphene on a quartz substrate in one embodiment includes providing a quartz substrate, melting a portion of the quartz substrate, diffusing a form of carbon into the melted portion to form a carbon and quartz mixture, and precipitating at least one graphene layer out of the carbon and quartz mixture.
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公开(公告)号:US09437228B2
公开(公告)日:2016-09-06
申请号:US14666237
申请日:2015-03-23
Applicant: Purdue Research Foundation
Inventor: Xianfan Xu , Edward Kinzel
CPC classification number: G11B5/4866 , G11B5/314 , G11B5/3163 , G11B5/6088 , G11B2005/0021
Abstract: An antenna for heat assisted magnetic recording is disclosed. The antenna includes an optically opaque material and an optically transparent material positioned on the optically opaque material, the optically transparent material includes a half bowtie shape which includes a first half-wing substantially shaped in form of a right angle trapezoid, having a height substantially equal to the overall height of the half bowtie, a second half-wing substantially shaped in form of a mirror image of the first half-wing and formed proximate and coupled to the first half-wing by a substantially rectangular aperture having an aperture width and an aperture height. The aperture height is as small as 1 nm.
Abstract translation: 公开了一种用于热辅助磁记录的天线。 天线包括光学不透明材料和位于光学不透明材料上的光学透明材料,该光学透明材料包括一个半弓形形状,其包括基本成形为直角梯形的第一半翼形,其高度基本相等 相对于半弓的整体高度,第二半翼基本上形成为第一半翼的镜像的形式,并且通过具有孔宽度的基本上矩形的孔形成并接近并联接到第一半翼, 孔径高度。 光圈高度小至1nm。
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9.
公开(公告)号:US20150269959A1
公开(公告)日:2015-09-24
申请号:US14666237
申请日:2015-03-23
Applicant: Purdue Research Foundation
Inventor: Xianfan Xu , Edward Kinzel
CPC classification number: G11B5/4866 , G11B5/314 , G11B5/3163 , G11B5/6088 , G11B2005/0021
Abstract: An antenna for heat assisted magnetic recording is disclosed. The antenna includes an optically opaque material and an optically transparent material positioned on the optically opaque material, the optically transparent material includes a half bowtie shape which includes a first half-wing substantially shaped in form of a right angle trapezoid, having a height substantially equal to the overall height of the half bowtie, a second half-wing substantially shaped in form of a mirror image of the first half-wing and formed proximate and coupled to the first half-wing by a substantially rectangular aperture having an aperture width and an aperture height. The aperture height is as small as 1 nm.
Abstract translation: 公开了一种用于热辅助磁记录的天线。 天线包括光学不透明材料和位于光学不透明材料上的光学透明材料,该光学透明材料包括一个半弓形形状,其包括基本成形为直角梯形的第一半翼形,其高度基本相等 相对于半弓的整体高度,第二半翼基本上形成为第一半翼的镜像的形式,并且通过具有孔宽度的基本上矩形的孔形成并接近并联接到第一半翼, 孔径高度。 光圈高度小至1nm。
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公开(公告)号:US20220234282A1
公开(公告)日:2022-07-28
申请号:US17724237
申请日:2022-04-19
Applicant: Purdue Research Foundation
Inventor: Xianfan Xu , Bryan William Boudouris , Liang Pan
IPC: B29C64/129 , B29C64/135 , B29C64/268 , B29C64/245 , B33Y10/00 , B33Y30/00
Abstract: A rapidly printing 3D nanostructures arrangement, comprising a first photonic source configured to provide photoinitiation energy to a polymer medium via a dynamic light spatial modulator to an excited state to initiate polymerization, a second photonic source configured to selectively provide inhibition energy to the polymerized medium to a depleted state to inhibit polymerization thereby generating a dead zone below a growth zone, the dead zone allows continuous 3D polymerization.
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