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公开(公告)号：US20210080328A1
公开(公告)日：2021-03-18
申请号：US16571298
申请日：2019-09-16
Applicant: Photon Control Inc.
Inventor： Yi LIU , Jose Jay Ruben Joven APELES , Michael FEAVER , Yoshua ICHIHASHI
Abstract: There is provided a fiber optic temperature probe having a base, a first tube connected to the base, a second tube provided coaxially within the first tube, a probe tip extending through an opening in a distal end of the first tube; and an optical fiber extending from within the base through an opening in the proximal end of the first tube and being substantially coaxial with respect to the first tube. There is also provided a fiber optic temperature probe having a base, a first tube connected to the base, a probe tip extending through an opening in a distal end of the first tube, an optical fiber extending from within the base through an opening in the proximal end of the first tube and being substantially coaxial with respect to the first tube, and a first lens positioned between the probe tip and the optical fiber.
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Patent Agency Ranking
公开(公告)号：US20240310193A1
公开(公告)日：2024-09-19
申请号：US18606120
申请日：2024-03-15
Applicant: Photon Control, Inc.
Inventor： Yuriy SYVENKYY , Bram SADLIK , Arjun AGRAWAL , Michael FEAVER , Yoshua ICHIHASHI , Michael TISCHLER
IPC: G01D5/353
CPC classification number: G01D5/3537
Abstract: The present application discloses embodiments of optical assemblies used in optical sensor systems where access to the equipment components or areas to be sensed is difficult. In one embodiment, an optical assembly may include a housing having an optical waveguide operative to guide an optical signal to an optical element configured to change the direction of propagation of the optical signal orthogonal to the original direction of propagation. The optical element may have a refractive surface and a reflective surface. Use of two such optical assemblies arranged optically in series enables the user to route an optical signal to propagate along an optical axis parallel to but laterally offset from the original axis of propagation. Such optical assemblies may allow optical access to regions of semiconductor manufacturing equipment such as process chambers, wafer supports, electrostatic chucks, showerheads, edge rings, or end effectors of wafer handling robots.
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公开(公告)号：US20240426668A1
公开(公告)日：2024-12-26
申请号：US18341395
申请日：2023-06-26
Applicant: Photon Control Inc.
Inventor： Michael FEAVER , Richard HAWLEY , Michael TISCHLER , Bram SADLIK , Hamed AKBARI
Abstract: The present application discloses embodiments of a temperature sensor system that uses multiple characteristics of optical radiation signals to determine a temperature of an object. The temperature sensor system includes a light source configured to emit an optical excitation signal propagating to a temperature probe having a phosphor sensing element that emits an optical excitation response signal having a characteristic of phosphorescent radiation proportional to the temperature of the object. The temperature probe emits an optical-excitation-independent signal having a characteristic of black-body radiation emitted by components of the temperature probe. The optical excitation response signal and the optical-excitation-independent signal form a combined signal propagating to a detector that provides a signal representative of the combined signal to a controller configured to separate the signal representative of the combined signal into signals representative of the optical excitation response signal and the optical-excitation-independent signal and calculate the temperature of the object.
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公开(公告)号：US20230066887A1
公开(公告)日：2023-03-02
申请号：US18049379
申请日：2022-10-25
Applicant: Photon Control Inc.
Inventor： Yoshua ICHIHASHI , Michael FEAVER , Florin Constantin CIOATA , Hari Kishore AMBAL , Yi LIU , Alborz AMINI
Abstract: An optical temperature sensing system is disclosed which includes a fiber optic sensor as a primary temperature sensor for reading a temperature of a measured object or a measured environment. The temperature probe is coupled to a converter which generates using solid-state electronic components without software, a temperature output. A temperature sensing system is also disclosed that includes a temperature sensor for reading a temperature of a measured object, and a dual converter module comprising a first converter to provide a primary temperature sensor signal, and a second converter to generate a secondary temperature sensor signal from a signal provided by the first converter. An optical temperature sensor is also described, with a conversion module that generates an output that mimics the output of a thermistor or a thermocouple.
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公开(公告)号：US20220334004A1
公开(公告)日：2022-10-20
申请号：US17742877
申请日：2022-05-12
Applicant: Photon Control Inc.
Inventor： Hamed AKBARI KHORAMI , Michael FEAVER , Pranshu Vyomesh SHELAT
Abstract: There is provided a temperature sensor including an optical fiber, and a sensing element spaced from the optical fiber. The sensing element is encapsulated in a optically transparent, non-porous material, isolating the sensing element from a surrounding environment. The optical fiber is aligned with the sensing element to deliver a source beam to interact with the sensing element and detect a return beam, where the return beam exhibits a temperature dependent property that is measured to determine a temperature of a measured object thermally coupled to the sensing element.
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公开(公告)号：US20220205851A1
公开(公告)日：2022-06-30
申请号：US17697220
申请日：2022-03-17
Applicant: Photon Control Inc.
Inventor： Reza DAVAR , Timothy BRAY , Michael FEAVER , Trevor Sonny LUM
Abstract: A temperature sensing system is provided, including an optical temperature sensing probe; a cable coupled to the probe for interfacing the probe with a converter via a connector; an optical fiber carried through the cable from the probe; and a calibration module positioned in the probe or connector, wherein the connector comprises at least two electrical conductors to enable the calibration module to communicate with the converter via the connector. A connector is also provided for connecting an optical temperature sensing probe to a converter via a cable coupled to the connector, the connector including a bore for carrying an optical fiber from the cable to the converter; at least two contact points; and at least two electrical connections via the at least two contact points. An extension cable is also provided for connecting an optical temperature sensing probe to a converter, the extension cable comprising a first end and a second end, and at least two electrical conductors extending between the first end and the second end to carry a signal from the probe to the converter via the extension cable.
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