公开(公告)号：US20240426668A1

公开(公告)日：2024-12-26

申请号：US18341395

申请日：2023-06-26

Applicant: Photon Control Inc.

Inventor： Michael FEAVER ,  Richard HAWLEY ,  Michael TISCHLER ,  Bram SADLIK ,  Hamed AKBARI

IPC: G01J5/0821 ,  G01J5/02 ,  G01J5/04 ,  G01J5/08 ,  G01J5/53 ,  G01N21/64

Abstract: The present application discloses embodiments of a temperature sensor system that uses multiple characteristics of optical radiation signals to determine a temperature of an object. The temperature sensor system includes a light source configured to emit an optical excitation signal propagating to a temperature probe having a phosphor sensing element that emits an optical excitation response signal having a characteristic of phosphorescent radiation proportional to the temperature of the object. The temperature probe emits an optical-excitation-independent signal having a characteristic of black-body radiation emitted by components of the temperature probe. The optical excitation response signal and the optical-excitation-independent signal form a combined signal propagating to a detector that provides a signal representative of the combined signal to a controller configured to separate the signal representative of the combined signal into signals representative of the optical excitation response signal and the optical-excitation-independent signal and calculate the temperature of the object.

公开(公告)号：US20240310193A1

公开(公告)日：2024-09-19

申请号：US18606120

申请日：2024-03-15

Applicant: Photon Control, Inc.

Inventor： Yuriy SYVENKYY ,  Bram SADLIK ,  Arjun AGRAWAL ,  Michael FEAVER ,  Yoshua ICHIHASHI ,  Michael TISCHLER

IPC: G01D5/353

CPC classification number: G01D5/3537

Abstract: The present application discloses embodiments of optical assemblies used in optical sensor systems where access to the equipment components or areas to be sensed is difficult. In one embodiment, an optical assembly may include a housing having an optical waveguide operative to guide an optical signal to an optical element configured to change the direction of propagation of the optical signal orthogonal to the original direction of propagation. The optical element may have a refractive surface and a reflective surface. Use of two such optical assemblies arranged optically in series enables the user to route an optical signal to propagate along an optical axis parallel to but laterally offset from the original axis of propagation. Such optical assemblies may allow optical access to regions of semiconductor manufacturing equipment such as process chambers, wafer supports, electrostatic chucks, showerheads, edge rings, or end effectors of wafer handling robots.