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    OFF-AXIS FIBER OPTIC SENSOR
    1.
    发明公开
    OFF-AXIS FIBER OPTIC SENSOR 审中-公开

    公开(公告)号：US20240310193A1

    公开(公告)日：2024-09-19

    申请号：US18606120

    申请日：2024-03-15

    Applicant: Photon Control, Inc.

    Inventor： Yuriy SYVENKYY ,  Bram SADLIK ,  Arjun AGRAWAL ,  Michael FEAVER ,  Yoshua ICHIHASHI ,  Michael TISCHLER

    IPC: G01D5/353

    CPC classification number: G01D5/3537

    Abstract: The present application discloses embodiments of optical assemblies used in optical sensor systems where access to the equipment components or areas to be sensed is difficult. In one embodiment, an optical assembly may include a housing having an optical waveguide operative to guide an optical signal to an optical element configured to change the direction of propagation of the optical signal orthogonal to the original direction of propagation. The optical element may have a refractive surface and a reflective surface. Use of two such optical assemblies arranged optically in series enables the user to route an optical signal to propagate along an optical axis parallel to but laterally offset from the original axis of propagation. Such optical assemblies may allow optical access to regions of semiconductor manufacturing equipment such as process chambers, wafer supports, electrostatic chucks, showerheads, edge rings, or end effectors of wafer handling robots.

    Optical fiber cable
    3.
    发明授权
    Optical fiber cable 有权

    公开(公告)号：US09989388B2

    公开(公告)日：2018-06-05

    申请号：US15029480

    申请日：2014-10-15

    Applicant: SILIXA LTD. ,  Chevron U.S.A. Inc.

    Inventor： Mahmoud Farhadiroushan ,  Daniel Finfer ,  Veronique Mahue ,  Tom Parker ,  Sergey Shatalin ,  Dmitry Strusevich

    IPC: G02B6/44 ,  G01F1/66 ,  G01D5/353

    CPC classification number: G01F1/661 ,  G01D5/3537 ,  G02B6/4415

    Abstract: Embodiments of the present invention provide a cable for optical fiber sensing applications formed from fiber wound around a cable core. A protective layer is then preferably placed over the top of the wound fiber, to protect the fiber, and to help keep it in place on the cable core. The cable core is preferably of a diameter to allow bend-insensitive fiber to be wound thereon with low bending losses. The effect of winding the fiber onto the cable core means that the longitudinal sensing resolution of the resulting cable is higher than simple straight fiber, when the cable is used with an optical fiber sensing system such as a DAS or DTS system. The achieved resolution for the resulting cable is a function of the fiber winding diameter and pitch, with a larger diameter and reduced winding pitch giving a higher longitudinal sensing resolution.

    Method and Apparatus for Optical Sensing
    5.
    发明申请
    Method and Apparatus for Optical Sensing 审中-公开

    公开(公告)号：US20180045543A1

    公开(公告)日：2018-02-15

    申请号：US15555628

    申请日：2016-03-07

    Applicant: Silixa Ltd.

    Inventor： Mahmoud Farhadiroushan ,  Tom Parker ,  Sergey Shatalin

    IPC: G01D5/353 ,  G01H9/00

    CPC classification number: G01D5/35374 ,  G01D5/35306 ,  G01D5/3537 ,  G01H9/004

    Abstract: An optical fiber distributed acoustic sensor system includes weak broadband reflectors inserted periodically along the fiber. The reflectors reflect only a small proportion of the light from the DAS incident thereon back along the fiber, typically in the region of 0.001% to 0.1%, but preferably around 0.01% reflectivity per reflector. In addition, to allow for temperate compensation to ensure that the same reflectivity is obtained if the temperature changes, the reflection bandwidth is relatively broadband. In some embodiments the reflectors are formed from a series of fiber Bragg gratings, each with a different center reflecting frequency, the reflecting frequencies and bandwidths of the gratings being selected to provide the broadband reflection. A chirped grating may also be used to provide the same effect. In preferred embodiments, the reflectors are spaced at half the gauge length i.e. the desired spatial resolution of the optical fiber DAS.

    DBF FIBER LASER BEND SENSOR AND OPTICAL HETERODYNE MICROPHONE
    8.
    发明申请
    DBF FIBER LASER BEND SENSOR AND OPTICAL HETERODYNE MICROPHONE 审中-公开
    DBF纤维激光弯曲传感器和光学异型麦克风

    公开(公告)号：US20140054451A1

    公开(公告)日：2014-02-27

    申请号：US13990617

    申请日：2011-12-02

    Applicant: Kazi S. Abedin ,  Paul S. Westbrook

    Inventor： Kazi S. Abedin ,  Paul S. Westbrook

    IPC: G01D5/26 ,  G01J1/04

    CPC classification number: G01D5/268 ,  G01D5/35316 ,  G01D5/3537 ,  G01D5/3538 ,  G01H9/004 ,  G01J1/0425 ,  G01L1/243 ,  G01L1/246 ,  G01L11/025 ,  G01N2021/7716 ,  H04R23/008

    Abstract: Methods and systems using one or more distributed feedback (DFB) lasers for capturing changes in the lasing environment are disclosed. Specifically, a sensor for measuring a measurand, such as pressure or temperature, or changes in a measurand, includes a fiber with at least one core, at least one fiber laser cavity formed by a single fiber grating in the core, wherein the laser operates on at least two modes along at least part of its length. The DFB laser includes a section that is bent into a non-linear shape and at least one pump laser connected to the fiber laser cavity. When the DFB laser experiences a perturbation or measurand change that changes the spacing of the modes, a change in an RF beat note is generated. This beat note can then be measured and related to the measurand change.

    Abstract translation: 公开了使用一个或多个分布式反馈（DFB）激光器捕获激光环境变化的方法和系统。 具体地说，用于测量诸如压力或温度的被测量或被测量的变化的传感器包括具有至少一个芯的光纤，由芯中的单个光纤光栅形成的至少一个光纤激光腔，其中激光器操作 沿其长度的至少一部分的至少两个模式。 DFB激光器包括弯曲成非线性形状的部分和连接到光纤激光腔的至少一个泵浦激光器。 当DFB激光器经历改变模式间距的扰动或被测量的变化时，产生RF拍音的变化。 然后可以测量这个拍音，并与被测量的变化相关。

    Embedded fiber optic demodulator
    9.
    发明授权
    Embedded fiber optic demodulator 失效
    嵌入式光纤解调器

    公开(公告)号：US06930820B1

    公开(公告)日：2005-08-16

    申请号：US10828675

    申请日：2004-04-21

    Applicant: Wesley Raymond Shooks, Jr. ,  James P. Dunne

    Inventor： Wesley Raymond Shooks, Jr. ,  James P. Dunne

    IPC: G01D5/353 ,  G01M5/00 ,  G02B6/42 ,  G02F2/00 ,  B32B9/04 ,  G02B6/26

    CPC classification number: G01M11/086 ,  G01D5/3537 ,  G01M5/0041 ,  G01M5/0091 ,  G02B6/42 ,  Y10T428/249924 ,  Y10T428/31504

    Abstract: A composite material is provided that includes laminated layers, an optical fiber, and a demodulator. The layers define a surface portion generally parallel to the layers and an edge portion generally perpendicular to the layers. The optical fiber and demodulator are embedded in the material. The demodulator is optically coupled to the optical fiber and demodulates light transmitted through the optical fiber. A method of monitoring the health of a structural member, which includes a composite material having an optical fiber, is also provided. The method includes demodulating light from the optical fiber using a demodulator embedded in the composite material. Also, a signal representative of the demodulated light is received and interpreted as a condition of the composite material.

    Abstract translation: 提供了包括层压层，光纤和解调器的复合材料。 这些层限定大致平行于层的表面部分和大致垂直于层的边缘部分。 光纤和解调器嵌入材料中。 解调器光耦合到光纤并解调透过光纤的光。 还提供了一种监测包括具有光纤的复合材料的结构件的健康状况的方法。 该方法包括使用嵌入在复合材料中的解调器来解调来自光纤的光。 此外，表示解调光的信号被接收并被解释为复合材料的条件。

    Five-degree-of-freedom heterodyne grating interferometry system
    10.
    发明授权
    Five-degree-of-freedom heterodyne grating interferometry system 有权

    公开(公告)号：US11703361B2

    公开(公告)日：2023-07-18

    申请号：US17257173

    申请日：2019-06-26

    Applicant: TSINGHUA UNIVERSITY ,  BEIJING U-PRECISION TECH CO., LTD.

    Inventor： Ming Zhang ,  Yu Zhu ,  Fuzhong Yang ,  Leijie Wang ,  Rong Cheng ,  Xin Li ,  Weinan Ye ,  Jinchun Hu

    IPC: G01D5/353 ,  G01D5/34

    CPC classification number: G01D5/3537 ,  G01D5/344

    Abstract: A five-degree-of-freedom heterodyne grating interferometry system comprises: a single-frequency laser for emitting single-frequency laser light, the single-frequency laser light can be split into a reference light beam and a measurement light beam; an interferometer lens set and a measurement grating for converting the reference light and the measurement light into a reference interference signal and a measurement interference signal; and multiple optical fiber bundles respectively receiving the measurement interference signal and the reference interference signal, wherein each optical fiber bundle has multiple multi-mode optical fibers respectively receiving interference signals at different positions on the same plane. The system is not over-sensitive to the environment, is small and light, and is easy to arrange. Six-degree-of-freedom ultra-precision measurement can be achieved by arranging multiple five-degree-of-freedom interferometry systems and using redundant information, thereby meeting the needs of a lithography machine worktable for six-degree-of-freedom position and orientation measurement.

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