公开(公告)号：US20210080328A1

公开(公告)日：2021-03-18

申请号：US16571298

申请日：2019-09-16

Applicant: Photon Control Inc.

Inventor： Yi LIU ,  Jose Jay Ruben Joven APELES ,  Michael FEAVER ,  Yoshua ICHIHASHI

IPC: G01J5/08 ,  G01K11/32

Abstract: There is provided a fiber optic temperature probe having a base, a first tube connected to the base, a second tube provided coaxially within the first tube, a probe tip extending through an opening in a distal end of the first tube; and an optical fiber extending from within the base through an opening in the proximal end of the first tube and being substantially coaxial with respect to the first tube. There is also provided a fiber optic temperature probe having a base, a first tube connected to the base, a probe tip extending through an opening in a distal end of the first tube, an optical fiber extending from within the base through an opening in the proximal end of the first tube and being substantially coaxial with respect to the first tube, and a first lens positioned between the probe tip and the optical fiber.

公开(公告)号：US20230066887A1

公开(公告)日：2023-03-02

申请号：US18049379

申请日：2022-10-25

Applicant: Photon Control Inc.

Inventor： Yoshua ICHIHASHI ,  Michael FEAVER ,  Florin Constantin CIOATA ,  Hari Kishore AMBAL ,  Yi LIU ,  Alborz AMINI

IPC: G01K11/32 ,  G01K1/143 ,  H05B1/02

Abstract: An optical temperature sensing system is disclosed which includes a fiber optic sensor as a primary temperature sensor for reading a temperature of a measured object or a measured environment. The temperature probe is coupled to a converter which generates using solid-state electronic components without software, a temperature output. A temperature sensing system is also disclosed that includes a temperature sensor for reading a temperature of a measured object, and a dual converter module comprising a first converter to provide a primary temperature sensor signal, and a second converter to generate a secondary temperature sensor signal from a signal provided by the first converter. An optical temperature sensor is also described, with a conversion module that generates an output that mimics the output of a thermistor or a thermocouple.

公开(公告)号：US20240310193A1

公开(公告)日：2024-09-19

申请号：US18606120

申请日：2024-03-15

Applicant: Photon Control, Inc.

Inventor： Yuriy SYVENKYY ,  Bram SADLIK ,  Arjun AGRAWAL ,  Michael FEAVER ,  Yoshua ICHIHASHI ,  Michael TISCHLER

IPC: G01D5/353

CPC classification number: G01D5/3537

Abstract: The present application discloses embodiments of optical assemblies used in optical sensor systems where access to the equipment components or areas to be sensed is difficult. In one embodiment, an optical assembly may include a housing having an optical waveguide operative to guide an optical signal to an optical element configured to change the direction of propagation of the optical signal orthogonal to the original direction of propagation. The optical element may have a refractive surface and a reflective surface. Use of two such optical assemblies arranged optically in series enables the user to route an optical signal to propagate along an optical axis parallel to but laterally offset from the original axis of propagation. Such optical assemblies may allow optical access to regions of semiconductor manufacturing equipment such as process chambers, wafer supports, electrostatic chucks, showerheads, edge rings, or end effectors of wafer handling robots.