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公开(公告)号：US20220341793A1
公开(公告)日：2022-10-27
申请号：US17726725
申请日：2022-04-22
Applicant: Photon Control Inc.
Inventor： Celestino Andrew BORJA , Jose Jay Ruben Joven APELES , Lewis Vernon Milino JANZEN , Eric LIU
Abstract: A flexible fiber optic temperature probe is disclosed. The probe includes a plurality of fiber optic elements, a sensing member having a first and a second end, the first end connected to distal portions of the plurality of fiber optic elements, and a flexible jacket surrounding the plurality of fiber optic elements. The flexible jacket is engaged with the sensing member to prevent relative movement between the flexible jacket and the sensing member.
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公开(公告)号：US20240426668A1
公开(公告)日：2024-12-26
申请号：US18341395
申请日：2023-06-26
Applicant: Photon Control Inc.
Inventor： Michael FEAVER , Richard HAWLEY , Michael TISCHLER , Bram SADLIK , Hamed AKBARI
Abstract: The present application discloses embodiments of a temperature sensor system that uses multiple characteristics of optical radiation signals to determine a temperature of an object. The temperature sensor system includes a light source configured to emit an optical excitation signal propagating to a temperature probe having a phosphor sensing element that emits an optical excitation response signal having a characteristic of phosphorescent radiation proportional to the temperature of the object. The temperature probe emits an optical-excitation-independent signal having a characteristic of black-body radiation emitted by components of the temperature probe. The optical excitation response signal and the optical-excitation-independent signal form a combined signal propagating to a detector that provides a signal representative of the combined signal to a controller configured to separate the signal representative of the combined signal into signals representative of the optical excitation response signal and the optical-excitation-independent signal and calculate the temperature of the object.
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公开(公告)号：US20230066887A1
公开(公告)日：2023-03-02
申请号：US18049379
申请日：2022-10-25
Applicant: Photon Control Inc.
Inventor： Yoshua ICHIHASHI , Michael FEAVER , Florin Constantin CIOATA , Hari Kishore AMBAL , Yi LIU , Alborz AMINI
Abstract: An optical temperature sensing system is disclosed which includes a fiber optic sensor as a primary temperature sensor for reading a temperature of a measured object or a measured environment. The temperature probe is coupled to a converter which generates using solid-state electronic components without software, a temperature output. A temperature sensing system is also disclosed that includes a temperature sensor for reading a temperature of a measured object, and a dual converter module comprising a first converter to provide a primary temperature sensor signal, and a second converter to generate a secondary temperature sensor signal from a signal provided by the first converter. An optical temperature sensor is also described, with a conversion module that generates an output that mimics the output of a thermistor or a thermocouple.
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公开(公告)号：US20210025819A1
公开(公告)日：2021-01-28
申请号：US16522769
申请日：2019-07-26
Applicant: Photon Control Inc.
Inventor： Yuriy SYVENKYY
Abstract: A precision edge detection system and sensor assembly is provided that uses a reflection technique to provide an energy efficient device that can be achieved using a relatively small form factor. There is provided an optical reflective sensor assembly that includes a light source, an optical element positioned to collimate and focus light from the light source to generate a focused beam, and at least one photodetector positioned adjacent the light source. The at least one photodetector is configured to detect light from the focused beam that has been reflected by an object positioned opposite the light source.
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公开(公告)号：US20210080328A1
公开(公告)日：2021-03-18
申请号：US16571298
申请日：2019-09-16
Applicant: Photon Control Inc.
Inventor： Yi LIU , Jose Jay Ruben Joven APELES , Michael FEAVER , Yoshua ICHIHASHI
Abstract: There is provided a fiber optic temperature probe having a base, a first tube connected to the base, a second tube provided coaxially within the first tube, a probe tip extending through an opening in a distal end of the first tube; and an optical fiber extending from within the base through an opening in the proximal end of the first tube and being substantially coaxial with respect to the first tube. There is also provided a fiber optic temperature probe having a base, a first tube connected to the base, a probe tip extending through an opening in a distal end of the first tube, an optical fiber extending from within the base through an opening in the proximal end of the first tube and being substantially coaxial with respect to the first tube, and a first lens positioned between the probe tip and the optical fiber.
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公开(公告)号：US20240310193A1
公开(公告)日：2024-09-19
申请号：US18606120
申请日：2024-03-15
Applicant: Photon Control, Inc.
Inventor： Yuriy SYVENKYY , Bram SADLIK , Arjun AGRAWAL , Michael FEAVER , Yoshua ICHIHASHI , Michael TISCHLER
IPC: G01D5/353
CPC classification number: G01D5/3537
Abstract: The present application discloses embodiments of optical assemblies used in optical sensor systems where access to the equipment components or areas to be sensed is difficult. In one embodiment, an optical assembly may include a housing having an optical waveguide operative to guide an optical signal to an optical element configured to change the direction of propagation of the optical signal orthogonal to the original direction of propagation. The optical element may have a refractive surface and a reflective surface. Use of two such optical assemblies arranged optically in series enables the user to route an optical signal to propagate along an optical axis parallel to but laterally offset from the original axis of propagation. Such optical assemblies may allow optical access to regions of semiconductor manufacturing equipment such as process chambers, wafer supports, electrostatic chucks, showerheads, edge rings, or end effectors of wafer handling robots.
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公开(公告)号：US20220381943A1
公开(公告)日：2022-12-01
申请号：US17817119
申请日：2022-08-03
Applicant: Photon Control Inc.
Inventor： Yuriy SYVENKYY
Abstract: Single board multi-channel programmable detection sensor is disclosed. The sensor has a processor operatively connected to the emitter driver, and a photodetector for controlling one or more operational parameters of the sensor in response to a program. Sensor outputs the TTL signal when desired level of light attenuated or transmitted through the system of fiber optics sensors. The processor sets triggering levels of the signal detected by the sensor in analog fast comparator circuit to threshold based on the signal difference pre-set and actual values.
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公开(公告)号：US11112356B2
公开(公告)日：2021-09-07
申请号：US16522769
申请日：2019-07-26
Applicant: Photon Control Inc.
Inventor： Yuriy Syvenkyy
Abstract: A precision edge detection system and sensor assembly is provided that uses a reflection technique to provide an energy efficient device that can be achieved using a relatively small form factor. There is provided an optical reflective sensor assembly that includes a light source, an optical element positioned to collimate and focus light from the light source to generate a focused beam, and at least one photodetector positioned adjacent the light source. The at least one photodetector is configured to detect light from the focused beam that has been reflected by an object positioned opposite the light source.
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公开(公告)号：US11585698B2
公开(公告)日：2023-02-21
申请号：US16571298
申请日：2019-09-16
Applicant: Photon Control Inc.
Inventor： Yi Liu , Jose Jay Ruben Joven Apeles , Michael Feaver , Yoshua Ichihashi
IPC: G01J5/00 , G01J5/0821 , G01K11/32 , G01J5/0806
Abstract: There is provided a fiber optic temperature probe having a base, a first tube connected to the base, a second tube provided coaxially within the first tube, a probe tip extending through an opening in a distal end of the first tube; and an optical fiber extending from within the base through an opening in the proximal end of the first tube and being substantially coaxial with respect to the first tube. There is also provided a fiber optic temperature probe having a base, a first tube connected to the base, a probe tip extending through an opening in a distal end of the first tube, an optical fiber extending from within the base through an opening in the proximal end of the first tube and being substantially coaxial with respect to the first tube, and a first lens positioned between the probe tip and the optical fiber.
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公开(公告)号：US20220334004A1
公开(公告)日：2022-10-20
申请号：US17742877
申请日：2022-05-12
Applicant: Photon Control Inc.
Inventor： Hamed AKBARI KHORAMI , Michael FEAVER , Pranshu Vyomesh SHELAT
Abstract: There is provided a temperature sensor including an optical fiber, and a sensing element spaced from the optical fiber. The sensing element is encapsulated in a optically transparent, non-porous material, isolating the sensing element from a surrounding environment. The optical fiber is aligned with the sensing element to deliver a source beam to interact with the sensing element and detect a return beam, where the return beam exhibits a temperature dependent property that is measured to determine a temperature of a measured object thermally coupled to the sensing element.
